8/30/2011	9:44:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	9:44:42 AM	Recipe started at 9:44 AM
8/30/2011	9:44:42 AM	Helium valve closed
8/30/2011	9:44:42 AM	H2 valve closed
8/30/2011	9:44:42 AM	BCl3 valve closed
8/30/2011	9:44:42 AM	PH3 valve closed
8/30/2011	9:44:42 AM	SiCl4 pre valve closed
8/30/2011	9:44:42 AM	SiCl4 post valve closed
8/30/2011	9:44:42 AM	Main Vac valve closed
8/30/2011	9:44:42 AM	Bypass valve closed
8/30/2011	9:44:42 AM	Bubbler valve closed
8/30/2011	9:44:42 AM	Helium MFC set to  0.000000
8/30/2011	9:44:42 AM	H2 MFC set to  0.000000
8/30/2011	9:44:42 AM	BCl3 MFC set to  0.000000
8/30/2011	9:44:42 AM	PHl3 MFC set to  0.000000
8/30/2011	9:44:42 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:44:42 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:44:42 AM	Tube furnace set to 0
8/30/2011	9:44:45 AM	H2 valve closed
8/30/2011	9:44:45 AM	BCl3 valve closed
8/30/2011	9:44:45 AM	PH3 valve closed
8/30/2011	9:44:45 AM	SiCl4 pre valve closed
8/30/2011	9:44:45 AM	SiCl4 post valve closed
8/30/2011	9:44:45 AM	Main Vac valve closed
8/30/2011	9:44:45 AM	Bypass valve closed
8/30/2011	9:44:45 AM	Bubbler valve closed
8/30/2011	9:44:45 AM	Helium valve opened
8/30/2011	9:44:45 AM	Helium MFC set to  500.000000
8/30/2011	9:44:45 AM	H2 MFC set to  0.000000
8/30/2011	9:44:45 AM	BCl3 MFC set to  0.000000
8/30/2011	9:44:45 AM	PHl3 MFC set to  0.000000
8/30/2011	9:44:45 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:44:45 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:44:45 AM	Tube furnace set to 0
8/30/2011	9:45:50 AM	Helium valve closed
8/30/2011	9:45:50 AM	H2 valve closed
8/30/2011	9:45:50 AM	BCl3 valve closed
8/30/2011	9:45:50 AM	PH3 valve closed
8/30/2011	9:45:50 AM	SiCl4 pre valve closed
8/30/2011	9:45:50 AM	SiCl4 post valve closed
8/30/2011	9:45:50 AM	Main Vac valve closed
8/30/2011	9:45:50 AM	Bypass valve closed
8/30/2011	9:45:50 AM	Bubbler valve closed
8/30/2011	9:45:50 AM	Helium MFC set to  0.000000
8/30/2011	9:45:50 AM	H2 MFC set to  0.000000
8/30/2011	9:45:50 AM	BCl3 MFC set to  0.000000
8/30/2011	9:45:50 AM	PHl3 MFC set to  0.000000
8/30/2011	9:45:50 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:45:50 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:45:51 AM	Tube furnace set to 0
8/30/2011	9:45:52 AM	Run finished at 9:45 AM
8/30/2011	9:45:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	9:53:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	9:53:25 AM	Recipe started at 9:53 AM
8/30/2011	9:53:25 AM	Helium valve closed
8/30/2011	9:53:25 AM	H2 valve closed
8/30/2011	9:53:25 AM	BCl3 valve closed
8/30/2011	9:53:25 AM	PH3 valve closed
8/30/2011	9:53:25 AM	SiCl4 pre valve closed
8/30/2011	9:53:25 AM	SiCl4 post valve closed
8/30/2011	9:53:25 AM	Main Vac valve closed
8/30/2011	9:53:25 AM	Bubbler valve closed
8/30/2011	9:53:25 AM	Bypass valve opened
8/30/2011	9:53:25 AM	Helium MFC set to  0.000000
8/30/2011	9:53:25 AM	H2 MFC set to  0.000000
8/30/2011	9:53:25 AM	BCl3 MFC set to  0.000000
8/30/2011	9:53:25 AM	PHl3 MFC set to  0.000000
8/30/2011	9:53:25 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:53:25 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:53:25 AM	Tube furnace set to 0
8/30/2011	9:55:37 AM	Helium valve closed
8/30/2011	9:55:37 AM	H2 valve closed
8/30/2011	9:55:37 AM	BCl3 valve closed
8/30/2011	9:55:37 AM	PH3 valve closed
8/30/2011	9:55:37 AM	SiCl4 pre valve closed
8/30/2011	9:55:37 AM	SiCl4 post valve closed
8/30/2011	9:55:37 AM	Main Vac valve closed
8/30/2011	9:55:37 AM	Bubbler valve closed
8/30/2011	9:55:37 AM	Bypass valve opened
8/30/2011	9:55:37 AM	Helium MFC set to  0.000000
8/30/2011	9:55:37 AM	H2 MFC set to  0.000000
8/30/2011	9:55:37 AM	BCl3 MFC set to  0.000000
8/30/2011	9:55:37 AM	PHl3 MFC set to  0.000000
8/30/2011	9:55:37 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:55:37 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:55:38 AM	Tube furnace set to 0
8/30/2011	9:56:38 AM	Helium valve closed
8/30/2011	9:56:38 AM	H2 valve closed
8/30/2011	9:56:38 AM	BCl3 valve closed
8/30/2011	9:56:38 AM	PH3 valve closed
8/30/2011	9:56:38 AM	SiCl4 pre valve closed
8/30/2011	9:56:38 AM	SiCl4 post valve closed
8/30/2011	9:56:38 AM	Bypass valve closed
8/30/2011	9:56:38 AM	Bubbler valve closed
8/30/2011	9:56:38 AM	Main Vac valve opened
8/30/2011	9:56:38 AM	Helium MFC set to  0.000000
8/30/2011	9:56:38 AM	H2 MFC set to  0.000000
8/30/2011	9:56:38 AM	BCl3 MFC set to  0.000000
8/30/2011	9:56:38 AM	PHl3 MFC set to  0.000000
8/30/2011	9:56:38 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:56:38 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:56:38 AM	Tube furnace set to 0
8/30/2011	9:56:39 AM	Run finished at 9:56 AM
8/30/2011	9:56:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	9:57:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/30/2011	9:57:29 AM	Recipe started at 9:57 AM
8/30/2011	9:57:29 AM	Helium valve closed
8/30/2011	9:57:29 AM	H2 valve closed
8/30/2011	9:57:29 AM	BCl3 valve closed
8/30/2011	9:57:29 AM	PH3 valve closed
8/30/2011	9:57:29 AM	SiCl4 pre valve closed
8/30/2011	9:57:29 AM	SiCl4 post valve closed
8/30/2011	9:57:29 AM	Main Vac valve closed
8/30/2011	9:57:29 AM	Bubbler valve closed
8/30/2011	9:57:29 AM	Bypass valve opened
8/30/2011	9:57:29 AM	Helium MFC set to  0.000000
8/30/2011	9:57:29 AM	H2 MFC set to  0.000000
8/30/2011	9:57:29 AM	BCl3 MFC set to  0.000000
8/30/2011	9:57:29 AM	PHl3 MFC set to  0.000000
8/30/2011	9:57:29 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:57:29 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:57:29 AM	Tube furnace set to 0
8/30/2011	9:57:30 AM	Helium valve closed
8/30/2011	9:57:30 AM	H2 valve closed
8/30/2011	9:57:30 AM	BCl3 valve closed
8/30/2011	9:57:30 AM	PH3 valve closed
8/30/2011	9:57:30 AM	SiCl4 pre valve closed
8/30/2011	9:57:30 AM	SiCl4 post valve closed
8/30/2011	9:57:30 AM	Main Vac valve closed
8/30/2011	9:57:30 AM	Bubbler valve closed
8/30/2011	9:57:30 AM	Bypass valve opened
8/30/2011	9:57:30 AM	Helium MFC set to  0.000000
8/30/2011	9:57:30 AM	H2 MFC set to  0.000000
8/30/2011	9:57:30 AM	BCl3 MFC set to  0.000000
8/30/2011	9:57:30 AM	PHl3 MFC set to  0.000000
8/30/2011	9:57:30 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:57:30 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:57:30 AM	Tube furnace set to 0
8/30/2011	9:57:52 AM	Helium valve closed
8/30/2011	9:57:52 AM	H2 valve closed
8/30/2011	9:57:52 AM	BCl3 valve closed
8/30/2011	9:57:52 AM	PH3 valve closed
8/30/2011	9:57:52 AM	SiCl4 pre valve closed
8/30/2011	9:57:52 AM	SiCl4 post valve closed
8/30/2011	9:57:52 AM	Bypass valve closed
8/30/2011	9:57:52 AM	Bubbler valve closed
8/30/2011	9:57:52 AM	Main Vac valve opened
8/30/2011	9:57:52 AM	Helium MFC set to  0.000000
8/30/2011	9:57:52 AM	H2 MFC set to  0.000000
8/30/2011	9:57:52 AM	BCl3 MFC set to  0.000000
8/30/2011	9:57:52 AM	PHl3 MFC set to  0.000000
8/30/2011	9:57:52 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:57:52 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:57:52 AM	Tube furnace set to 0
8/30/2011	9:57:59 AM	H2 valve closed
8/30/2011	9:57:59 AM	BCl3 valve closed
8/30/2011	9:57:59 AM	PH3 valve closed
8/30/2011	9:57:59 AM	SiCl4 pre valve closed
8/30/2011	9:57:59 AM	SiCl4 post valve closed
8/30/2011	9:57:59 AM	Bypass valve closed
8/30/2011	9:57:59 AM	Bubbler valve closed
8/30/2011	9:57:59 AM	Helium valve opened
8/30/2011	9:57:59 AM	Main Vac valve opened
8/30/2011	9:57:59 AM	Helium MFC set to  20.000000
8/30/2011	9:57:59 AM	H2 MFC set to  0.000000
8/30/2011	9:57:59 AM	BCl3 MFC set to  0.000000
8/30/2011	9:57:59 AM	PHl3 MFC set to  0.000000
8/30/2011	9:57:59 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:57:59 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:57:59 AM	Tube furnace set to 0
8/30/2011	9:58:19 AM	Helium valve closed
8/30/2011	9:58:19 AM	H2 valve closed
8/30/2011	9:58:19 AM	BCl3 valve closed
8/30/2011	9:58:19 AM	PH3 valve closed
8/30/2011	9:58:19 AM	SiCl4 pre valve closed
8/30/2011	9:58:19 AM	SiCl4 post valve closed
8/30/2011	9:58:19 AM	Bypass valve closed
8/30/2011	9:58:19 AM	Bubbler valve closed
8/30/2011	9:58:19 AM	Main Vac valve opened
8/30/2011	9:58:19 AM	Helium MFC set to  0.000000
8/30/2011	9:58:19 AM	H2 MFC set to  0.000000
8/30/2011	9:58:19 AM	BCl3 MFC set to  0.000000
8/30/2011	9:58:19 AM	PHl3 MFC set to  0.000000
8/30/2011	9:58:19 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:58:19 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:58:19 AM	Tube furnace set to 0
8/30/2011	9:58:35 AM	H2 valve closed
8/30/2011	9:58:35 AM	BCl3 valve closed
8/30/2011	9:58:35 AM	PH3 valve closed
8/30/2011	9:58:35 AM	SiCl4 pre valve closed
8/30/2011	9:58:35 AM	SiCl4 post valve closed
8/30/2011	9:58:35 AM	Bypass valve closed
8/30/2011	9:58:35 AM	Bubbler valve closed
8/30/2011	9:58:35 AM	Helium valve opened
8/30/2011	9:58:35 AM	Main Vac valve opened
8/30/2011	9:58:35 AM	Helium MFC set to  20.000000
8/30/2011	9:58:35 AM	H2 MFC set to  0.000000
8/30/2011	9:58:35 AM	BCl3 MFC set to  0.000000
8/30/2011	9:58:35 AM	PHl3 MFC set to  0.000000
8/30/2011	9:58:35 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:58:35 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:58:35 AM	Tube furnace set to 0
8/30/2011	9:58:49 AM	Helium valve closed
8/30/2011	9:58:49 AM	H2 valve closed
8/30/2011	9:58:49 AM	BCl3 valve closed
8/30/2011	9:58:49 AM	PH3 valve closed
8/30/2011	9:58:49 AM	SiCl4 pre valve closed
8/30/2011	9:58:49 AM	SiCl4 post valve closed
8/30/2011	9:58:49 AM	Bypass valve closed
8/30/2011	9:58:49 AM	Bubbler valve closed
8/30/2011	9:58:49 AM	Main Vac valve opened
8/30/2011	9:58:49 AM	Helium MFC set to  0.000000
8/30/2011	9:58:49 AM	H2 MFC set to  0.000000
8/30/2011	9:58:49 AM	BCl3 MFC set to  0.000000
8/30/2011	9:58:49 AM	PHl3 MFC set to  0.000000
8/30/2011	9:58:49 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:58:49 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:58:49 AM	Tube furnace set to 0
8/30/2011	9:59:04 AM	Run aborted at 9:59 AM
8/30/2011	9:59:04 AM	Helium valve closed
8/30/2011	9:59:04 AM	H2 valve closed
8/30/2011	9:59:04 AM	BCl3 valve closed
8/30/2011	9:59:04 AM	PH3 valve closed
8/30/2011	9:59:04 AM	SiCl4 pre valve closed
8/30/2011	9:59:04 AM	SiCl4 post valve closed
8/30/2011	9:59:04 AM	Bypass valve closed
8/30/2011	9:59:04 AM	Main Vac valve closed
8/30/2011	9:59:04 AM	Bubbler valve closed
8/30/2011	9:59:04 AM	Helium MFC set to  0.000000
8/30/2011	9:59:04 AM	H2 MFC set to  0.000000
8/30/2011	9:59:04 AM	BCl3 MFC set to  0.000000
8/30/2011	9:59:04 AM	PHl3 MFC set to  0.000000
8/30/2011	9:59:04 AM	SiCl4 MFC set to  0.000000
8/30/2011	9:59:04 AM	Tube furnace set to 0
8/30/2011	9:59:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/30/2011	9:59:28 AM	Main Vac valve opened
8/30/2011	10:00:30 AM	Recipe started at 10:00 AM
8/30/2011	10:00:30 AM	Helium valve closed
8/30/2011	10:00:30 AM	H2 valve closed
8/30/2011	10:00:30 AM	BCl3 valve closed
8/30/2011	10:00:30 AM	PH3 valve closed
8/30/2011	10:00:30 AM	SiCl4 pre valve closed
8/30/2011	10:00:30 AM	SiCl4 post valve closed
8/30/2011	10:00:30 AM	Bypass valve closed
8/30/2011	10:00:30 AM	Bubbler valve closed
8/30/2011	10:00:30 AM	Main Vac valve opened
8/30/2011	10:00:30 AM	Helium MFC set to  0.000000
8/30/2011	10:00:30 AM	H2 MFC set to  0.000000
8/30/2011	10:00:30 AM	BCl3 MFC set to  0.000000
8/30/2011	10:00:30 AM	PHl3 MFC set to  0.000000
8/30/2011	10:00:30 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:00:30 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:00:30 AM	Tube furnace set to 150
8/30/2011	10:01:00 AM	H2 valve closed
8/30/2011	10:01:00 AM	BCl3 valve closed
8/30/2011	10:01:00 AM	PH3 valve closed
8/30/2011	10:01:00 AM	SiCl4 pre valve closed
8/30/2011	10:01:00 AM	SiCl4 post valve closed
8/30/2011	10:01:00 AM	Bypass valve closed
8/30/2011	10:01:00 AM	Bubbler valve closed
8/30/2011	10:01:00 AM	Helium valve opened
8/30/2011	10:01:00 AM	Main Vac valve opened
8/30/2011	10:01:00 AM	Helium MFC set to  20.000000
8/30/2011	10:01:00 AM	H2 MFC set to  0.000000
8/30/2011	10:01:00 AM	BCl3 MFC set to  0.000000
8/30/2011	10:01:00 AM	PHl3 MFC set to  0.000000
8/30/2011	10:01:00 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:01:00 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:01:00 AM	Tube furnace set to 150
8/30/2011	10:01:30 AM	Helium valve closed
8/30/2011	10:01:30 AM	H2 valve closed
8/30/2011	10:01:30 AM	BCl3 valve closed
8/30/2011	10:01:30 AM	PH3 valve closed
8/30/2011	10:01:30 AM	SiCl4 pre valve closed
8/30/2011	10:01:30 AM	SiCl4 post valve closed
8/30/2011	10:01:30 AM	Bypass valve closed
8/30/2011	10:01:30 AM	Bubbler valve closed
8/30/2011	10:01:30 AM	Main Vac valve opened
8/30/2011	10:01:30 AM	Helium MFC set to  0.000000
8/30/2011	10:01:30 AM	H2 MFC set to  0.000000
8/30/2011	10:01:30 AM	BCl3 MFC set to  0.000000
8/30/2011	10:01:30 AM	PHl3 MFC set to  0.000000
8/30/2011	10:01:30 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:01:30 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:01:30 AM	Tube furnace set to 150
8/30/2011	10:02:01 AM	H2 valve closed
8/30/2011	10:02:01 AM	BCl3 valve closed
8/30/2011	10:02:01 AM	PH3 valve closed
8/30/2011	10:02:01 AM	SiCl4 pre valve closed
8/30/2011	10:02:01 AM	SiCl4 post valve closed
8/30/2011	10:02:01 AM	Bypass valve closed
8/30/2011	10:02:01 AM	Bubbler valve closed
8/30/2011	10:02:01 AM	Helium valve opened
8/30/2011	10:02:01 AM	Main Vac valve opened
8/30/2011	10:02:01 AM	Helium MFC set to  20.000000
8/30/2011	10:02:01 AM	H2 MFC set to  0.000000
8/30/2011	10:02:01 AM	BCl3 MFC set to  0.000000
8/30/2011	10:02:01 AM	PHl3 MFC set to  0.000000
8/30/2011	10:02:01 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:02:01 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:02:01 AM	Tube furnace set to 150
8/30/2011	10:02:31 AM	Helium valve closed
8/30/2011	10:02:31 AM	H2 valve closed
8/30/2011	10:02:31 AM	BCl3 valve closed
8/30/2011	10:02:31 AM	PH3 valve closed
8/30/2011	10:02:31 AM	SiCl4 pre valve closed
8/30/2011	10:02:31 AM	SiCl4 post valve closed
8/30/2011	10:02:31 AM	Bypass valve closed
8/30/2011	10:02:31 AM	Bubbler valve closed
8/30/2011	10:02:31 AM	Main Vac valve opened
8/30/2011	10:02:31 AM	Helium MFC set to  0.000000
8/30/2011	10:02:31 AM	H2 MFC set to  0.000000
8/30/2011	10:02:31 AM	BCl3 MFC set to  0.000000
8/30/2011	10:02:31 AM	PHl3 MFC set to  0.000000
8/30/2011	10:02:31 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:02:31 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:02:31 AM	Tube furnace set to 150
8/30/2011	10:03:01 AM	H2 valve closed
8/30/2011	10:03:01 AM	BCl3 valve closed
8/30/2011	10:03:01 AM	PH3 valve closed
8/30/2011	10:03:01 AM	SiCl4 pre valve closed
8/30/2011	10:03:01 AM	SiCl4 post valve closed
8/30/2011	10:03:01 AM	Bypass valve closed
8/30/2011	10:03:01 AM	Bubbler valve closed
8/30/2011	10:03:01 AM	Helium valve opened
8/30/2011	10:03:01 AM	Main Vac valve opened
8/30/2011	10:03:01 AM	Helium MFC set to  20.000000
8/30/2011	10:03:01 AM	H2 MFC set to  0.000000
8/30/2011	10:03:01 AM	BCl3 MFC set to  0.000000
8/30/2011	10:03:01 AM	PHl3 MFC set to  0.000000
8/30/2011	10:03:01 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:03:01 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:03:01 AM	Tube furnace set to 150
8/30/2011	10:03:31 AM	Helium valve closed
8/30/2011	10:03:31 AM	H2 valve closed
8/30/2011	10:03:31 AM	BCl3 valve closed
8/30/2011	10:03:31 AM	PH3 valve closed
8/30/2011	10:03:31 AM	SiCl4 pre valve closed
8/30/2011	10:03:31 AM	SiCl4 post valve closed
8/30/2011	10:03:31 AM	Bypass valve closed
8/30/2011	10:03:31 AM	Bubbler valve closed
8/30/2011	10:03:31 AM	Main Vac valve opened
8/30/2011	10:03:31 AM	Helium MFC set to  0.000000
8/30/2011	10:03:31 AM	H2 MFC set to  0.000000
8/30/2011	10:03:31 AM	BCl3 MFC set to  0.000000
8/30/2011	10:03:31 AM	PHl3 MFC set to  0.000000
8/30/2011	10:03:31 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:03:31 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:03:31 AM	Tube furnace set to 150
8/30/2011	10:04:01 AM	H2 valve closed
8/30/2011	10:04:01 AM	BCl3 valve closed
8/30/2011	10:04:01 AM	PH3 valve closed
8/30/2011	10:04:01 AM	SiCl4 pre valve closed
8/30/2011	10:04:01 AM	SiCl4 post valve closed
8/30/2011	10:04:01 AM	Bypass valve closed
8/30/2011	10:04:01 AM	Bubbler valve closed
8/30/2011	10:04:01 AM	Helium valve opened
8/30/2011	10:04:01 AM	Main Vac valve opened
8/30/2011	10:04:01 AM	Helium MFC set to  20.000000
8/30/2011	10:04:01 AM	H2 MFC set to  0.000000
8/30/2011	10:04:01 AM	BCl3 MFC set to  0.000000
8/30/2011	10:04:01 AM	PHl3 MFC set to  0.000000
8/30/2011	10:04:01 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:04:01 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:04:02 AM	Tube furnace set to 150
8/30/2011	10:04:32 AM	Helium valve closed
8/30/2011	10:04:32 AM	H2 valve closed
8/30/2011	10:04:32 AM	BCl3 valve closed
8/30/2011	10:04:32 AM	PH3 valve closed
8/30/2011	10:04:32 AM	SiCl4 pre valve closed
8/30/2011	10:04:32 AM	SiCl4 post valve closed
8/30/2011	10:04:32 AM	Bypass valve closed
8/30/2011	10:04:32 AM	Bubbler valve closed
8/30/2011	10:04:32 AM	Main Vac valve opened
8/30/2011	10:04:32 AM	Helium MFC set to  0.000000
8/30/2011	10:04:32 AM	H2 MFC set to  0.000000
8/30/2011	10:04:32 AM	BCl3 MFC set to  0.000000
8/30/2011	10:04:32 AM	PHl3 MFC set to  0.000000
8/30/2011	10:04:32 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:04:32 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:04:32 AM	Tube furnace set to 150
8/30/2011	10:05:02 AM	H2 valve closed
8/30/2011	10:05:02 AM	BCl3 valve closed
8/30/2011	10:05:02 AM	PH3 valve closed
8/30/2011	10:05:02 AM	SiCl4 pre valve closed
8/30/2011	10:05:02 AM	SiCl4 post valve closed
8/30/2011	10:05:02 AM	Bypass valve closed
8/30/2011	10:05:02 AM	Bubbler valve closed
8/30/2011	10:05:02 AM	Helium valve opened
8/30/2011	10:05:02 AM	Main Vac valve opened
8/30/2011	10:05:02 AM	Helium MFC set to  20.000000
8/30/2011	10:05:02 AM	H2 MFC set to  0.000000
8/30/2011	10:05:02 AM	BCl3 MFC set to  0.000000
8/30/2011	10:05:02 AM	PHl3 MFC set to  0.000000
8/30/2011	10:05:02 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:05:02 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:05:02 AM	Tube furnace set to 150
8/30/2011	10:05:32 AM	Helium valve closed
8/30/2011	10:05:32 AM	H2 valve closed
8/30/2011	10:05:32 AM	BCl3 valve closed
8/30/2011	10:05:32 AM	PH3 valve closed
8/30/2011	10:05:32 AM	SiCl4 pre valve closed
8/30/2011	10:05:32 AM	SiCl4 post valve closed
8/30/2011	10:05:32 AM	Bypass valve closed
8/30/2011	10:05:32 AM	Bubbler valve closed
8/30/2011	10:05:32 AM	Main Vac valve opened
8/30/2011	10:05:32 AM	Helium MFC set to  0.000000
8/30/2011	10:05:32 AM	H2 MFC set to  0.000000
8/30/2011	10:05:32 AM	BCl3 MFC set to  0.000000
8/30/2011	10:05:32 AM	PHl3 MFC set to  0.000000
8/30/2011	10:05:32 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:05:32 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:05:32 AM	Tube furnace set to 150
8/30/2011	10:06:02 AM	H2 valve closed
8/30/2011	10:06:02 AM	BCl3 valve closed
8/30/2011	10:06:02 AM	PH3 valve closed
8/30/2011	10:06:02 AM	SiCl4 pre valve closed
8/30/2011	10:06:02 AM	SiCl4 post valve closed
8/30/2011	10:06:02 AM	Bypass valve closed
8/30/2011	10:06:02 AM	Bubbler valve closed
8/30/2011	10:06:02 AM	Helium valve opened
8/30/2011	10:06:02 AM	Main Vac valve opened
8/30/2011	10:06:02 AM	Helium MFC set to  20.000000
8/30/2011	10:06:02 AM	H2 MFC set to  0.000000
8/30/2011	10:06:02 AM	BCl3 MFC set to  0.000000
8/30/2011	10:06:02 AM	PHl3 MFC set to  0.000000
8/30/2011	10:06:02 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:06:02 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:06:02 AM	Tube furnace set to 150
8/30/2011	10:06:04 AM	Run aborted at 10:06 AM
8/30/2011	10:06:04 AM	Helium valve closed
8/30/2011	10:06:04 AM	H2 valve closed
8/30/2011	10:06:04 AM	BCl3 valve closed
8/30/2011	10:06:04 AM	PH3 valve closed
8/30/2011	10:06:04 AM	SiCl4 pre valve closed
8/30/2011	10:06:04 AM	SiCl4 post valve closed
8/30/2011	10:06:04 AM	Bypass valve closed
8/30/2011	10:06:04 AM	Main Vac valve closed
8/30/2011	10:06:04 AM	Bubbler valve closed
8/30/2011	10:06:04 AM	Helium MFC set to  0.000000
8/30/2011	10:06:04 AM	H2 MFC set to  0.000000
8/30/2011	10:06:04 AM	BCl3 MFC set to  0.000000
8/30/2011	10:06:04 AM	PHl3 MFC set to  0.000000
8/30/2011	10:06:04 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:06:04 AM	Tube furnace set to 0
8/30/2011	10:07:47 AM	Main Vac valve opened
8/30/2011	10:07:53 AM	Main Vac valve closed
8/30/2011	10:08:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	10:08:19 AM	Recipe started at 10:08 AM
8/30/2011	10:08:19 AM	Helium valve closed
8/30/2011	10:08:19 AM	H2 valve closed
8/30/2011	10:08:19 AM	BCl3 valve closed
8/30/2011	10:08:19 AM	PH3 valve closed
8/30/2011	10:08:19 AM	SiCl4 pre valve closed
8/30/2011	10:08:19 AM	SiCl4 post valve closed
8/30/2011	10:08:19 AM	Main Vac valve closed
8/30/2011	10:08:19 AM	Bypass valve closed
8/30/2011	10:08:19 AM	Bubbler valve closed
8/30/2011	10:08:19 AM	Helium MFC set to  0.000000
8/30/2011	10:08:19 AM	H2 MFC set to  0.000000
8/30/2011	10:08:19 AM	BCl3 MFC set to  0.000000
8/30/2011	10:08:19 AM	PHl3 MFC set to  0.000000
8/30/2011	10:08:19 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:08:19 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:08:19 AM	Tube furnace set to 0
8/30/2011	10:08:22 AM	H2 valve closed
8/30/2011	10:08:22 AM	BCl3 valve closed
8/30/2011	10:08:22 AM	PH3 valve closed
8/30/2011	10:08:22 AM	SiCl4 pre valve closed
8/30/2011	10:08:22 AM	SiCl4 post valve closed
8/30/2011	10:08:22 AM	Main Vac valve closed
8/30/2011	10:08:22 AM	Bypass valve closed
8/30/2011	10:08:22 AM	Bubbler valve closed
8/30/2011	10:08:22 AM	Helium valve opened
8/30/2011	10:08:22 AM	Helium MFC set to  500.000000
8/30/2011	10:08:22 AM	H2 MFC set to  0.000000
8/30/2011	10:08:22 AM	BCl3 MFC set to  0.000000
8/30/2011	10:08:22 AM	PHl3 MFC set to  0.000000
8/30/2011	10:08:22 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:08:22 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:08:22 AM	Tube furnace set to 0
8/30/2011	10:09:24 AM	Helium valve closed
8/30/2011	10:09:24 AM	H2 valve closed
8/30/2011	10:09:24 AM	BCl3 valve closed
8/30/2011	10:09:24 AM	PH3 valve closed
8/30/2011	10:09:24 AM	SiCl4 pre valve closed
8/30/2011	10:09:24 AM	SiCl4 post valve closed
8/30/2011	10:09:24 AM	Main Vac valve closed
8/30/2011	10:09:24 AM	Bypass valve closed
8/30/2011	10:09:24 AM	Bubbler valve closed
8/30/2011	10:09:24 AM	Helium MFC set to  0.000000
8/30/2011	10:09:24 AM	H2 MFC set to  0.000000
8/30/2011	10:09:24 AM	BCl3 MFC set to  0.000000
8/30/2011	10:09:24 AM	PHl3 MFC set to  0.000000
8/30/2011	10:09:24 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:09:24 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:09:24 AM	Tube furnace set to 0
8/30/2011	10:09:25 AM	Run finished at 10:09 AM
8/30/2011	10:09:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	10:16:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	10:16:40 AM	Recipe started at 10:16 AM
8/30/2011	10:16:40 AM	Helium valve closed
8/30/2011	10:16:40 AM	H2 valve closed
8/30/2011	10:16:40 AM	BCl3 valve closed
8/30/2011	10:16:40 AM	PH3 valve closed
8/30/2011	10:16:40 AM	SiCl4 pre valve closed
8/30/2011	10:16:40 AM	SiCl4 post valve closed
8/30/2011	10:16:40 AM	Main Vac valve closed
8/30/2011	10:16:40 AM	Bubbler valve closed
8/30/2011	10:16:40 AM	Bypass valve opened
8/30/2011	10:16:40 AM	Helium MFC set to  0.000000
8/30/2011	10:16:40 AM	H2 MFC set to  0.000000
8/30/2011	10:16:40 AM	BCl3 MFC set to  0.000000
8/30/2011	10:16:40 AM	PHl3 MFC set to  0.000000
8/30/2011	10:16:40 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:16:40 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:16:40 AM	Tube furnace set to 0
8/30/2011	10:17:48 AM	Helium valve closed
8/30/2011	10:17:48 AM	H2 valve closed
8/30/2011	10:17:48 AM	BCl3 valve closed
8/30/2011	10:17:48 AM	PH3 valve closed
8/30/2011	10:17:48 AM	SiCl4 pre valve closed
8/30/2011	10:17:48 AM	SiCl4 post valve closed
8/30/2011	10:17:48 AM	Main Vac valve closed
8/30/2011	10:17:48 AM	Bubbler valve closed
8/30/2011	10:17:48 AM	Bypass valve opened
8/30/2011	10:17:48 AM	Helium MFC set to  0.000000
8/30/2011	10:17:48 AM	H2 MFC set to  0.000000
8/30/2011	10:17:48 AM	BCl3 MFC set to  0.000000
8/30/2011	10:17:48 AM	PHl3 MFC set to  0.000000
8/30/2011	10:17:48 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:17:48 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:17:48 AM	Tube furnace set to 0
8/30/2011	10:18:29 AM	Helium valve closed
8/30/2011	10:18:29 AM	H2 valve closed
8/30/2011	10:18:29 AM	BCl3 valve closed
8/30/2011	10:18:29 AM	PH3 valve closed
8/30/2011	10:18:29 AM	SiCl4 pre valve closed
8/30/2011	10:18:29 AM	SiCl4 post valve closed
8/30/2011	10:18:29 AM	Bypass valve closed
8/30/2011	10:18:29 AM	Bubbler valve closed
8/30/2011	10:18:29 AM	Main Vac valve opened
8/30/2011	10:18:29 AM	Helium MFC set to  0.000000
8/30/2011	10:18:29 AM	H2 MFC set to  0.000000
8/30/2011	10:18:29 AM	BCl3 MFC set to  0.000000
8/30/2011	10:18:29 AM	PHl3 MFC set to  0.000000
8/30/2011	10:18:29 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:18:29 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:18:30 AM	Tube furnace set to 0
8/30/2011	10:18:31 AM	Run finished at 10:18 AM
8/30/2011	10:18:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	10:19:02 AM	Recipe started at 10:18 AM
8/30/2011	10:19:02 AM	Helium valve closed
8/30/2011	10:19:03 AM	H2 valve closed
8/30/2011	10:19:03 AM	BCl3 valve closed
8/30/2011	10:19:03 AM	PH3 valve closed
8/30/2011	10:19:03 AM	SiCl4 pre valve closed
8/30/2011	10:19:03 AM	SiCl4 post valve closed
8/30/2011	10:19:03 AM	Bypass valve closed
8/30/2011	10:19:03 AM	Bubbler valve closed
8/30/2011	10:19:03 AM	Main Vac valve opened
8/30/2011	10:19:03 AM	Helium MFC set to  0.000000
8/30/2011	10:19:03 AM	H2 MFC set to  0.000000
8/30/2011	10:19:03 AM	BCl3 MFC set to  0.000000
8/30/2011	10:19:03 AM	PHl3 MFC set to  0.000000
8/30/2011	10:19:03 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:19:03 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:19:03 AM	Tube furnace set to 150
8/30/2011	10:19:33 AM	H2 valve closed
8/30/2011	10:19:33 AM	BCl3 valve closed
8/30/2011	10:19:33 AM	PH3 valve closed
8/30/2011	10:19:33 AM	SiCl4 pre valve closed
8/30/2011	10:19:33 AM	SiCl4 post valve closed
8/30/2011	10:19:33 AM	Bypass valve closed
8/30/2011	10:19:33 AM	Bubbler valve closed
8/30/2011	10:19:33 AM	Helium valve opened
8/30/2011	10:19:33 AM	Main Vac valve opened
8/30/2011	10:19:33 AM	Helium MFC set to  20.000000
8/30/2011	10:19:33 AM	H2 MFC set to  0.000000
8/30/2011	10:19:33 AM	BCl3 MFC set to  0.000000
8/30/2011	10:19:33 AM	PHl3 MFC set to  0.000000
8/30/2011	10:19:33 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:19:33 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:19:33 AM	Tube furnace set to 150
8/30/2011	10:20:03 AM	Helium valve closed
8/30/2011	10:20:03 AM	H2 valve closed
8/30/2011	10:20:03 AM	BCl3 valve closed
8/30/2011	10:20:03 AM	PH3 valve closed
8/30/2011	10:20:03 AM	SiCl4 pre valve closed
8/30/2011	10:20:03 AM	SiCl4 post valve closed
8/30/2011	10:20:03 AM	Bypass valve closed
8/30/2011	10:20:03 AM	Bubbler valve closed
8/30/2011	10:20:03 AM	Main Vac valve opened
8/30/2011	10:20:03 AM	Helium MFC set to  0.000000
8/30/2011	10:20:03 AM	H2 MFC set to  0.000000
8/30/2011	10:20:03 AM	BCl3 MFC set to  0.000000
8/30/2011	10:20:03 AM	PHl3 MFC set to  0.000000
8/30/2011	10:20:03 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:20:03 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:20:03 AM	Tube furnace set to 150
8/30/2011	10:20:33 AM	H2 valve closed
8/30/2011	10:20:33 AM	BCl3 valve closed
8/30/2011	10:20:33 AM	PH3 valve closed
8/30/2011	10:20:33 AM	SiCl4 pre valve closed
8/30/2011	10:20:33 AM	SiCl4 post valve closed
8/30/2011	10:20:33 AM	Bypass valve closed
8/30/2011	10:20:33 AM	Bubbler valve closed
8/30/2011	10:20:33 AM	Helium valve opened
8/30/2011	10:20:33 AM	Main Vac valve opened
8/30/2011	10:20:33 AM	Helium MFC set to  20.000000
8/30/2011	10:20:33 AM	H2 MFC set to  0.000000
8/30/2011	10:20:33 AM	BCl3 MFC set to  0.000000
8/30/2011	10:20:33 AM	PHl3 MFC set to  0.000000
8/30/2011	10:20:33 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:20:33 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:20:33 AM	Tube furnace set to 150
8/30/2011	10:21:03 AM	Helium valve closed
8/30/2011	10:21:03 AM	H2 valve closed
8/30/2011	10:21:03 AM	BCl3 valve closed
8/30/2011	10:21:03 AM	PH3 valve closed
8/30/2011	10:21:03 AM	SiCl4 pre valve closed
8/30/2011	10:21:03 AM	SiCl4 post valve closed
8/30/2011	10:21:03 AM	Bypass valve closed
8/30/2011	10:21:03 AM	Bubbler valve closed
8/30/2011	10:21:03 AM	Main Vac valve opened
8/30/2011	10:21:03 AM	Helium MFC set to  0.000000
8/30/2011	10:21:03 AM	H2 MFC set to  0.000000
8/30/2011	10:21:03 AM	BCl3 MFC set to  0.000000
8/30/2011	10:21:03 AM	PHl3 MFC set to  0.000000
8/30/2011	10:21:03 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:21:03 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:21:03 AM	Tube furnace set to 150
8/30/2011	10:21:33 AM	H2 valve closed
8/30/2011	10:21:33 AM	BCl3 valve closed
8/30/2011	10:21:33 AM	PH3 valve closed
8/30/2011	10:21:33 AM	SiCl4 pre valve closed
8/30/2011	10:21:33 AM	SiCl4 post valve closed
8/30/2011	10:21:33 AM	Bypass valve closed
8/30/2011	10:21:33 AM	Bubbler valve closed
8/30/2011	10:21:34 AM	Helium valve opened
8/30/2011	10:21:34 AM	Main Vac valve opened
8/30/2011	10:21:34 AM	Helium MFC set to  20.000000
8/30/2011	10:21:34 AM	H2 MFC set to  0.000000
8/30/2011	10:21:34 AM	BCl3 MFC set to  0.000000
8/30/2011	10:21:34 AM	PHl3 MFC set to  0.000000
8/30/2011	10:21:34 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:21:34 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:21:34 AM	Tube furnace set to 150
8/30/2011	10:22:04 AM	Helium valve closed
8/30/2011	10:22:04 AM	H2 valve closed
8/30/2011	10:22:04 AM	BCl3 valve closed
8/30/2011	10:22:04 AM	PH3 valve closed
8/30/2011	10:22:04 AM	SiCl4 pre valve closed
8/30/2011	10:22:04 AM	SiCl4 post valve closed
8/30/2011	10:22:04 AM	Bypass valve closed
8/30/2011	10:22:04 AM	Bubbler valve closed
8/30/2011	10:22:04 AM	Main Vac valve opened
8/30/2011	10:22:04 AM	Helium MFC set to  0.000000
8/30/2011	10:22:04 AM	H2 MFC set to  0.000000
8/30/2011	10:22:04 AM	BCl3 MFC set to  0.000000
8/30/2011	10:22:04 AM	PHl3 MFC set to  0.000000
8/30/2011	10:22:04 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:22:04 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:22:04 AM	Tube furnace set to 150
8/30/2011	10:22:34 AM	H2 valve closed
8/30/2011	10:22:34 AM	BCl3 valve closed
8/30/2011	10:22:34 AM	PH3 valve closed
8/30/2011	10:22:34 AM	SiCl4 pre valve closed
8/30/2011	10:22:34 AM	SiCl4 post valve closed
8/30/2011	10:22:34 AM	Bypass valve closed
8/30/2011	10:22:34 AM	Bubbler valve closed
8/30/2011	10:22:34 AM	Helium valve opened
8/30/2011	10:22:34 AM	Main Vac valve opened
8/30/2011	10:22:34 AM	Helium MFC set to  20.000000
8/30/2011	10:22:34 AM	H2 MFC set to  0.000000
8/30/2011	10:22:34 AM	BCl3 MFC set to  0.000000
8/30/2011	10:22:34 AM	PHl3 MFC set to  0.000000
8/30/2011	10:22:34 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:22:34 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:22:34 AM	Tube furnace set to 150
8/30/2011	10:23:04 AM	Helium valve closed
8/30/2011	10:23:04 AM	H2 valve closed
8/30/2011	10:23:04 AM	BCl3 valve closed
8/30/2011	10:23:04 AM	PH3 valve closed
8/30/2011	10:23:04 AM	SiCl4 pre valve closed
8/30/2011	10:23:04 AM	SiCl4 post valve closed
8/30/2011	10:23:04 AM	Bypass valve closed
8/30/2011	10:23:04 AM	Bubbler valve closed
8/30/2011	10:23:04 AM	Main Vac valve opened
8/30/2011	10:23:04 AM	Helium MFC set to  0.000000
8/30/2011	10:23:04 AM	H2 MFC set to  0.000000
8/30/2011	10:23:04 AM	BCl3 MFC set to  0.000000
8/30/2011	10:23:04 AM	PHl3 MFC set to  0.000000
8/30/2011	10:23:04 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:23:04 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:23:04 AM	Tube furnace set to 150
8/30/2011	10:23:30 AM	Run aborted at 10:23 AM
8/30/2011	10:23:30 AM	Helium valve closed
8/30/2011	10:23:30 AM	H2 valve closed
8/30/2011	10:23:30 AM	BCl3 valve closed
8/30/2011	10:23:30 AM	PH3 valve closed
8/30/2011	10:23:30 AM	SiCl4 pre valve closed
8/30/2011	10:23:30 AM	SiCl4 post valve closed
8/30/2011	10:23:30 AM	Bypass valve closed
8/30/2011	10:23:30 AM	Main Vac valve closed
8/30/2011	10:23:30 AM	Bubbler valve closed
8/30/2011	10:23:30 AM	Helium MFC set to  0.000000
8/30/2011	10:23:30 AM	H2 MFC set to  0.000000
8/30/2011	10:23:30 AM	BCl3 MFC set to  0.000000
8/30/2011	10:23:30 AM	PHl3 MFC set to  0.000000
8/30/2011	10:23:30 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:23:30 AM	Tube furnace set to 0
8/30/2011	10:23:47 AM	Recipe started at 10:23 AM
8/30/2011	10:23:47 AM	Helium valve closed
8/30/2011	10:23:47 AM	H2 valve closed
8/30/2011	10:23:47 AM	BCl3 valve closed
8/30/2011	10:23:47 AM	PH3 valve closed
8/30/2011	10:23:47 AM	SiCl4 pre valve closed
8/30/2011	10:23:47 AM	SiCl4 post valve closed
8/30/2011	10:23:47 AM	Bypass valve closed
8/30/2011	10:23:47 AM	Bubbler valve closed
8/30/2011	10:23:47 AM	Main Vac valve opened
8/30/2011	10:23:47 AM	Helium MFC set to  0.000000
8/30/2011	10:23:47 AM	H2 MFC set to  0.000000
8/30/2011	10:23:47 AM	BCl3 MFC set to  0.000000
8/30/2011	10:23:47 AM	PHl3 MFC set to  0.000000
8/30/2011	10:23:47 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:23:47 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:23:47 AM	Tube furnace set to 150
8/30/2011	10:24:17 AM	H2 valve closed
8/30/2011	10:24:17 AM	BCl3 valve closed
8/30/2011	10:24:17 AM	PH3 valve closed
8/30/2011	10:24:17 AM	SiCl4 pre valve closed
8/30/2011	10:24:17 AM	SiCl4 post valve closed
8/30/2011	10:24:17 AM	Bypass valve closed
8/30/2011	10:24:17 AM	Bubbler valve closed
8/30/2011	10:24:17 AM	Helium valve opened
8/30/2011	10:24:17 AM	Main Vac valve opened
8/30/2011	10:24:17 AM	Helium MFC set to  20.000000
8/30/2011	10:24:17 AM	H2 MFC set to  0.000000
8/30/2011	10:24:17 AM	BCl3 MFC set to  0.000000
8/30/2011	10:24:17 AM	PHl3 MFC set to  0.000000
8/30/2011	10:24:17 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:24:17 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:24:17 AM	Tube furnace set to 150
8/30/2011	10:24:47 AM	Helium valve closed
8/30/2011	10:24:47 AM	H2 valve closed
8/30/2011	10:24:47 AM	BCl3 valve closed
8/30/2011	10:24:47 AM	PH3 valve closed
8/30/2011	10:24:47 AM	SiCl4 pre valve closed
8/30/2011	10:24:47 AM	SiCl4 post valve closed
8/30/2011	10:24:47 AM	Bypass valve closed
8/30/2011	10:24:47 AM	Bubbler valve closed
8/30/2011	10:24:47 AM	Main Vac valve opened
8/30/2011	10:24:47 AM	Helium MFC set to  0.000000
8/30/2011	10:24:47 AM	H2 MFC set to  0.000000
8/30/2011	10:24:47 AM	BCl3 MFC set to  0.000000
8/30/2011	10:24:47 AM	PHl3 MFC set to  0.000000
8/30/2011	10:24:47 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:24:47 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:24:48 AM	Tube furnace set to 150
8/30/2011	10:25:18 AM	H2 valve closed
8/30/2011	10:25:18 AM	BCl3 valve closed
8/30/2011	10:25:18 AM	PH3 valve closed
8/30/2011	10:25:18 AM	SiCl4 pre valve closed
8/30/2011	10:25:18 AM	SiCl4 post valve closed
8/30/2011	10:25:18 AM	Bypass valve closed
8/30/2011	10:25:18 AM	Bubbler valve closed
8/30/2011	10:25:18 AM	Helium valve opened
8/30/2011	10:25:18 AM	Main Vac valve opened
8/30/2011	10:25:18 AM	Helium MFC set to  20.000000
8/30/2011	10:25:18 AM	H2 MFC set to  0.000000
8/30/2011	10:25:18 AM	BCl3 MFC set to  0.000000
8/30/2011	10:25:18 AM	PHl3 MFC set to  0.000000
8/30/2011	10:25:18 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:25:18 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:25:18 AM	Tube furnace set to 150
8/30/2011	10:25:48 AM	Helium valve closed
8/30/2011	10:25:48 AM	H2 valve closed
8/30/2011	10:25:48 AM	BCl3 valve closed
8/30/2011	10:25:48 AM	PH3 valve closed
8/30/2011	10:25:48 AM	SiCl4 pre valve closed
8/30/2011	10:25:48 AM	SiCl4 post valve closed
8/30/2011	10:25:48 AM	Bypass valve closed
8/30/2011	10:25:48 AM	Bubbler valve closed
8/30/2011	10:25:48 AM	Main Vac valve opened
8/30/2011	10:25:48 AM	Helium MFC set to  0.000000
8/30/2011	10:25:48 AM	H2 MFC set to  0.000000
8/30/2011	10:25:48 AM	BCl3 MFC set to  0.000000
8/30/2011	10:25:48 AM	PHl3 MFC set to  0.000000
8/30/2011	10:25:48 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:25:48 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:25:48 AM	Tube furnace set to 150
8/30/2011	10:26:18 AM	H2 valve closed
8/30/2011	10:26:18 AM	BCl3 valve closed
8/30/2011	10:26:18 AM	PH3 valve closed
8/30/2011	10:26:18 AM	SiCl4 pre valve closed
8/30/2011	10:26:18 AM	SiCl4 post valve closed
8/30/2011	10:26:18 AM	Bypass valve closed
8/30/2011	10:26:18 AM	Bubbler valve closed
8/30/2011	10:26:18 AM	Helium valve opened
8/30/2011	10:26:18 AM	Main Vac valve opened
8/30/2011	10:26:18 AM	Helium MFC set to  20.000000
8/30/2011	10:26:18 AM	H2 MFC set to  0.000000
8/30/2011	10:26:18 AM	BCl3 MFC set to  0.000000
8/30/2011	10:26:18 AM	PHl3 MFC set to  0.000000
8/30/2011	10:26:18 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:26:18 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:26:18 AM	Tube furnace set to 150
8/30/2011	10:26:48 AM	Helium valve closed
8/30/2011	10:26:48 AM	H2 valve closed
8/30/2011	10:26:48 AM	BCl3 valve closed
8/30/2011	10:26:48 AM	PH3 valve closed
8/30/2011	10:26:48 AM	SiCl4 pre valve closed
8/30/2011	10:26:48 AM	SiCl4 post valve closed
8/30/2011	10:26:48 AM	Bypass valve closed
8/30/2011	10:26:48 AM	Bubbler valve closed
8/30/2011	10:26:48 AM	Main Vac valve opened
8/30/2011	10:26:48 AM	Helium MFC set to  0.000000
8/30/2011	10:26:48 AM	H2 MFC set to  0.000000
8/30/2011	10:26:48 AM	BCl3 MFC set to  0.000000
8/30/2011	10:26:48 AM	PHl3 MFC set to  0.000000
8/30/2011	10:26:48 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:26:48 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:26:48 AM	Tube furnace set to 150
8/30/2011	10:27:18 AM	H2 valve closed
8/30/2011	10:27:18 AM	BCl3 valve closed
8/30/2011	10:27:18 AM	PH3 valve closed
8/30/2011	10:27:18 AM	SiCl4 pre valve closed
8/30/2011	10:27:18 AM	SiCl4 post valve closed
8/30/2011	10:27:18 AM	Bypass valve closed
8/30/2011	10:27:18 AM	Bubbler valve closed
8/30/2011	10:27:18 AM	Helium valve opened
8/30/2011	10:27:18 AM	Main Vac valve opened
8/30/2011	10:27:18 AM	Helium MFC set to  20.000000
8/30/2011	10:27:18 AM	H2 MFC set to  0.000000
8/30/2011	10:27:18 AM	BCl3 MFC set to  0.000000
8/30/2011	10:27:18 AM	PHl3 MFC set to  0.000000
8/30/2011	10:27:18 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:27:18 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:27:19 AM	Tube furnace set to 150
8/30/2011	10:27:49 AM	Helium valve closed
8/30/2011	10:27:49 AM	H2 valve closed
8/30/2011	10:27:49 AM	BCl3 valve closed
8/30/2011	10:27:49 AM	PH3 valve closed
8/30/2011	10:27:49 AM	SiCl4 pre valve closed
8/30/2011	10:27:49 AM	SiCl4 post valve closed
8/30/2011	10:27:49 AM	Bypass valve closed
8/30/2011	10:27:49 AM	Bubbler valve closed
8/30/2011	10:27:49 AM	Main Vac valve opened
8/30/2011	10:27:49 AM	Helium MFC set to  0.000000
8/30/2011	10:27:49 AM	H2 MFC set to  0.000000
8/30/2011	10:27:49 AM	BCl3 MFC set to  0.000000
8/30/2011	10:27:49 AM	PHl3 MFC set to  0.000000
8/30/2011	10:27:49 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:27:49 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:27:49 AM	Tube furnace set to 150
8/30/2011	10:28:19 AM	H2 valve closed
8/30/2011	10:28:19 AM	BCl3 valve closed
8/30/2011	10:28:19 AM	PH3 valve closed
8/30/2011	10:28:19 AM	SiCl4 pre valve closed
8/30/2011	10:28:19 AM	SiCl4 post valve closed
8/30/2011	10:28:19 AM	Bypass valve closed
8/30/2011	10:28:19 AM	Bubbler valve closed
8/30/2011	10:28:19 AM	Helium valve opened
8/30/2011	10:28:19 AM	Main Vac valve opened
8/30/2011	10:28:19 AM	Helium MFC set to  20.000000
8/30/2011	10:28:19 AM	H2 MFC set to  0.000000
8/30/2011	10:28:19 AM	BCl3 MFC set to  0.000000
8/30/2011	10:28:19 AM	PHl3 MFC set to  0.000000
8/30/2011	10:28:19 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:28:19 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:28:19 AM	Tube furnace set to 150
8/30/2011	10:28:49 AM	Helium valve closed
8/30/2011	10:28:49 AM	H2 valve closed
8/30/2011	10:28:49 AM	BCl3 valve closed
8/30/2011	10:28:49 AM	PH3 valve closed
8/30/2011	10:28:49 AM	SiCl4 pre valve closed
8/30/2011	10:28:49 AM	SiCl4 post valve closed
8/30/2011	10:28:49 AM	Bypass valve closed
8/30/2011	10:28:49 AM	Bubbler valve closed
8/30/2011	10:28:49 AM	Main Vac valve opened
8/30/2011	10:28:49 AM	Helium MFC set to  0.000000
8/30/2011	10:28:49 AM	H2 MFC set to  0.000000
8/30/2011	10:28:49 AM	BCl3 MFC set to  0.000000
8/30/2011	10:28:49 AM	PHl3 MFC set to  0.000000
8/30/2011	10:28:49 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:28:49 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:28:49 AM	Tube furnace set to 150
8/30/2011	10:29:19 AM	H2 valve closed
8/30/2011	10:29:19 AM	BCl3 valve closed
8/30/2011	10:29:19 AM	PH3 valve closed
8/30/2011	10:29:19 AM	SiCl4 pre valve closed
8/30/2011	10:29:19 AM	SiCl4 post valve closed
8/30/2011	10:29:19 AM	Bypass valve closed
8/30/2011	10:29:19 AM	Bubbler valve closed
8/30/2011	10:29:19 AM	Helium valve opened
8/30/2011	10:29:19 AM	Main Vac valve opened
8/30/2011	10:29:19 AM	Helium MFC set to  20.000000
8/30/2011	10:29:19 AM	H2 MFC set to  0.000000
8/30/2011	10:29:19 AM	BCl3 MFC set to  0.000000
8/30/2011	10:29:19 AM	PHl3 MFC set to  0.000000
8/30/2011	10:29:19 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:29:19 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:29:19 AM	Tube furnace set to 150
8/30/2011	10:29:49 AM	Helium valve closed
8/30/2011	10:29:49 AM	H2 valve closed
8/30/2011	10:29:49 AM	BCl3 valve closed
8/30/2011	10:29:49 AM	PH3 valve closed
8/30/2011	10:29:49 AM	SiCl4 pre valve closed
8/30/2011	10:29:49 AM	SiCl4 post valve closed
8/30/2011	10:29:49 AM	Bypass valve closed
8/30/2011	10:29:49 AM	Bubbler valve closed
8/30/2011	10:29:49 AM	Main Vac valve opened
8/30/2011	10:29:49 AM	Helium MFC set to  0.000000
8/30/2011	10:29:49 AM	H2 MFC set to  0.000000
8/30/2011	10:29:49 AM	BCl3 MFC set to  0.000000
8/30/2011	10:29:49 AM	PHl3 MFC set to  0.000000
8/30/2011	10:29:49 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:29:49 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:29:50 AM	Tube furnace set to 150
8/30/2011	10:30:20 AM	H2 valve closed
8/30/2011	10:30:20 AM	BCl3 valve closed
8/30/2011	10:30:20 AM	PH3 valve closed
8/30/2011	10:30:20 AM	SiCl4 pre valve closed
8/30/2011	10:30:20 AM	SiCl4 post valve closed
8/30/2011	10:30:20 AM	Bypass valve closed
8/30/2011	10:30:20 AM	Bubbler valve closed
8/30/2011	10:30:20 AM	Helium valve opened
8/30/2011	10:30:20 AM	Main Vac valve opened
8/30/2011	10:30:20 AM	Helium MFC set to  20.000000
8/30/2011	10:30:20 AM	H2 MFC set to  0.000000
8/30/2011	10:30:20 AM	BCl3 MFC set to  0.000000
8/30/2011	10:30:20 AM	PHl3 MFC set to  0.000000
8/30/2011	10:30:20 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:30:20 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:30:20 AM	Tube furnace set to 150
8/30/2011	10:30:50 AM	Helium valve closed
8/30/2011	10:30:50 AM	H2 valve closed
8/30/2011	10:30:50 AM	BCl3 valve closed
8/30/2011	10:30:50 AM	PH3 valve closed
8/30/2011	10:30:50 AM	SiCl4 pre valve closed
8/30/2011	10:30:50 AM	SiCl4 post valve closed
8/30/2011	10:30:50 AM	Bypass valve closed
8/30/2011	10:30:50 AM	Bubbler valve closed
8/30/2011	10:30:50 AM	Main Vac valve opened
8/30/2011	10:30:50 AM	Helium MFC set to  0.000000
8/30/2011	10:30:50 AM	H2 MFC set to  0.000000
8/30/2011	10:30:50 AM	BCl3 MFC set to  0.000000
8/30/2011	10:30:50 AM	PHl3 MFC set to  0.000000
8/30/2011	10:30:50 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:30:50 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:30:50 AM	Tube furnace set to 150
8/30/2011	10:31:20 AM	H2 valve closed
8/30/2011	10:31:20 AM	BCl3 valve closed
8/30/2011	10:31:20 AM	PH3 valve closed
8/30/2011	10:31:20 AM	SiCl4 pre valve closed
8/30/2011	10:31:20 AM	SiCl4 post valve closed
8/30/2011	10:31:20 AM	Bypass valve closed
8/30/2011	10:31:20 AM	Bubbler valve closed
8/30/2011	10:31:20 AM	Helium valve opened
8/30/2011	10:31:20 AM	Main Vac valve opened
8/30/2011	10:31:20 AM	Helium MFC set to  20.000000
8/30/2011	10:31:20 AM	H2 MFC set to  0.000000
8/30/2011	10:31:20 AM	BCl3 MFC set to  0.000000
8/30/2011	10:31:20 AM	PHl3 MFC set to  0.000000
8/30/2011	10:31:20 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:31:20 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:31:20 AM	Tube furnace set to 150
8/30/2011	10:31:50 AM	Helium valve closed
8/30/2011	10:31:50 AM	H2 valve closed
8/30/2011	10:31:50 AM	BCl3 valve closed
8/30/2011	10:31:50 AM	PH3 valve closed
8/30/2011	10:31:50 AM	SiCl4 pre valve closed
8/30/2011	10:31:50 AM	SiCl4 post valve closed
8/30/2011	10:31:50 AM	Bypass valve closed
8/30/2011	10:31:50 AM	Bubbler valve closed
8/30/2011	10:31:50 AM	Main Vac valve opened
8/30/2011	10:31:50 AM	Helium MFC set to  0.000000
8/30/2011	10:31:50 AM	H2 MFC set to  0.000000
8/30/2011	10:31:50 AM	BCl3 MFC set to  0.000000
8/30/2011	10:31:50 AM	PHl3 MFC set to  0.000000
8/30/2011	10:31:50 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:31:50 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:31:50 AM	Tube furnace set to 150
8/30/2011	10:32:20 AM	H2 valve closed
8/30/2011	10:32:20 AM	BCl3 valve closed
8/30/2011	10:32:20 AM	PH3 valve closed
8/30/2011	10:32:20 AM	SiCl4 pre valve closed
8/30/2011	10:32:20 AM	SiCl4 post valve closed
8/30/2011	10:32:20 AM	Bypass valve closed
8/30/2011	10:32:20 AM	Bubbler valve closed
8/30/2011	10:32:20 AM	Helium valve opened
8/30/2011	10:32:20 AM	Main Vac valve opened
8/30/2011	10:32:20 AM	Helium MFC set to  20.000000
8/30/2011	10:32:20 AM	H2 MFC set to  0.000000
8/30/2011	10:32:20 AM	BCl3 MFC set to  0.000000
8/30/2011	10:32:20 AM	PHl3 MFC set to  0.000000
8/30/2011	10:32:20 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:32:20 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:32:21 AM	Tube furnace set to 150
8/30/2011	10:32:51 AM	Helium valve closed
8/30/2011	10:32:51 AM	H2 valve closed
8/30/2011	10:32:51 AM	BCl3 valve closed
8/30/2011	10:32:51 AM	PH3 valve closed
8/30/2011	10:32:51 AM	SiCl4 pre valve closed
8/30/2011	10:32:51 AM	SiCl4 post valve closed
8/30/2011	10:32:51 AM	Bypass valve closed
8/30/2011	10:32:51 AM	Bubbler valve closed
8/30/2011	10:32:51 AM	Main Vac valve opened
8/30/2011	10:32:51 AM	Helium MFC set to  0.000000
8/30/2011	10:32:51 AM	H2 MFC set to  0.000000
8/30/2011	10:32:51 AM	BCl3 MFC set to  0.000000
8/30/2011	10:32:51 AM	PHl3 MFC set to  0.000000
8/30/2011	10:32:51 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:32:51 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:32:51 AM	Tube furnace set to 150
8/30/2011	10:33:21 AM	H2 valve closed
8/30/2011	10:33:21 AM	BCl3 valve closed
8/30/2011	10:33:21 AM	PH3 valve closed
8/30/2011	10:33:21 AM	SiCl4 pre valve closed
8/30/2011	10:33:21 AM	SiCl4 post valve closed
8/30/2011	10:33:21 AM	Bypass valve closed
8/30/2011	10:33:21 AM	Bubbler valve closed
8/30/2011	10:33:21 AM	Helium valve opened
8/30/2011	10:33:21 AM	Main Vac valve opened
8/30/2011	10:33:21 AM	Helium MFC set to  20.000000
8/30/2011	10:33:21 AM	H2 MFC set to  0.000000
8/30/2011	10:33:21 AM	BCl3 MFC set to  0.000000
8/30/2011	10:33:21 AM	PHl3 MFC set to  0.000000
8/30/2011	10:33:21 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:33:21 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:33:21 AM	Tube furnace set to 150
8/30/2011	10:33:51 AM	Helium valve closed
8/30/2011	10:33:51 AM	H2 valve closed
8/30/2011	10:33:51 AM	BCl3 valve closed
8/30/2011	10:33:51 AM	PH3 valve closed
8/30/2011	10:33:51 AM	SiCl4 pre valve closed
8/30/2011	10:33:51 AM	SiCl4 post valve closed
8/30/2011	10:33:51 AM	Bypass valve closed
8/30/2011	10:33:51 AM	Bubbler valve closed
8/30/2011	10:33:51 AM	Main Vac valve opened
8/30/2011	10:33:51 AM	Helium MFC set to  0.000000
8/30/2011	10:33:51 AM	H2 MFC set to  0.000000
8/30/2011	10:33:51 AM	BCl3 MFC set to  0.000000
8/30/2011	10:33:51 AM	PHl3 MFC set to  0.000000
8/30/2011	10:33:51 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:33:51 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:33:51 AM	Tube furnace set to 150
8/30/2011	10:33:52 AM	Run finished at 10:33 AM
8/30/2011	10:36:36 AM	Recipe started at 10:36 AM
8/30/2011	10:36:36 AM	Helium valve closed
8/30/2011	10:36:36 AM	H2 valve closed
8/30/2011	10:36:36 AM	BCl3 valve closed
8/30/2011	10:36:36 AM	PH3 valve closed
8/30/2011	10:36:36 AM	SiCl4 pre valve closed
8/30/2011	10:36:36 AM	SiCl4 post valve closed
8/30/2011	10:36:36 AM	Bypass valve closed
8/30/2011	10:36:36 AM	Bubbler valve closed
8/30/2011	10:36:36 AM	Main Vac valve opened
8/30/2011	10:36:36 AM	Helium MFC set to  0.000000
8/30/2011	10:36:36 AM	H2 MFC set to  0.000000
8/30/2011	10:36:36 AM	BCl3 MFC set to  0.000000
8/30/2011	10:36:36 AM	PHl3 MFC set to  0.000000
8/30/2011	10:36:36 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:36:36 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:36:36 AM	Tube furnace set to 150
8/30/2011	10:37:06 AM	H2 valve closed
8/30/2011	10:37:06 AM	BCl3 valve closed
8/30/2011	10:37:06 AM	PH3 valve closed
8/30/2011	10:37:06 AM	SiCl4 pre valve closed
8/30/2011	10:37:06 AM	SiCl4 post valve closed
8/30/2011	10:37:06 AM	Bypass valve closed
8/30/2011	10:37:06 AM	Bubbler valve closed
8/30/2011	10:37:06 AM	Helium valve opened
8/30/2011	10:37:06 AM	Main Vac valve opened
8/30/2011	10:37:06 AM	Helium MFC set to  20.000000
8/30/2011	10:37:06 AM	H2 MFC set to  0.000000
8/30/2011	10:37:06 AM	BCl3 MFC set to  0.000000
8/30/2011	10:37:06 AM	PHl3 MFC set to  0.000000
8/30/2011	10:37:06 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:37:06 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:37:06 AM	Tube furnace set to 150
8/30/2011	10:37:36 AM	Helium valve closed
8/30/2011	10:37:36 AM	H2 valve closed
8/30/2011	10:37:36 AM	BCl3 valve closed
8/30/2011	10:37:36 AM	PH3 valve closed
8/30/2011	10:37:36 AM	SiCl4 pre valve closed
8/30/2011	10:37:36 AM	SiCl4 post valve closed
8/30/2011	10:37:36 AM	Bypass valve closed
8/30/2011	10:37:36 AM	Bubbler valve closed
8/30/2011	10:37:36 AM	Main Vac valve opened
8/30/2011	10:37:36 AM	Helium MFC set to  0.000000
8/30/2011	10:37:36 AM	H2 MFC set to  0.000000
8/30/2011	10:37:36 AM	BCl3 MFC set to  0.000000
8/30/2011	10:37:36 AM	PHl3 MFC set to  0.000000
8/30/2011	10:37:36 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:37:36 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:37:36 AM	Tube furnace set to 150
8/30/2011	10:38:06 AM	H2 valve closed
8/30/2011	10:38:06 AM	BCl3 valve closed
8/30/2011	10:38:06 AM	PH3 valve closed
8/30/2011	10:38:06 AM	SiCl4 pre valve closed
8/30/2011	10:38:06 AM	SiCl4 post valve closed
8/30/2011	10:38:06 AM	Bypass valve closed
8/30/2011	10:38:06 AM	Bubbler valve closed
8/30/2011	10:38:06 AM	Helium valve opened
8/30/2011	10:38:06 AM	Main Vac valve opened
8/30/2011	10:38:06 AM	Helium MFC set to  20.000000
8/30/2011	10:38:06 AM	H2 MFC set to  0.000000
8/30/2011	10:38:06 AM	BCl3 MFC set to  0.000000
8/30/2011	10:38:06 AM	PHl3 MFC set to  0.000000
8/30/2011	10:38:06 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:38:06 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:38:06 AM	Tube furnace set to 150
8/30/2011	10:38:36 AM	Helium valve closed
8/30/2011	10:38:36 AM	H2 valve closed
8/30/2011	10:38:36 AM	BCl3 valve closed
8/30/2011	10:38:36 AM	PH3 valve closed
8/30/2011	10:38:36 AM	SiCl4 pre valve closed
8/30/2011	10:38:36 AM	SiCl4 post valve closed
8/30/2011	10:38:36 AM	Bypass valve closed
8/30/2011	10:38:36 AM	Bubbler valve closed
8/30/2011	10:38:36 AM	Main Vac valve opened
8/30/2011	10:38:36 AM	Helium MFC set to  0.000000
8/30/2011	10:38:36 AM	H2 MFC set to  0.000000
8/30/2011	10:38:36 AM	BCl3 MFC set to  0.000000
8/30/2011	10:38:36 AM	PHl3 MFC set to  0.000000
8/30/2011	10:38:36 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:38:36 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:38:37 AM	Tube furnace set to 150
8/30/2011	10:39:07 AM	H2 valve closed
8/30/2011	10:39:07 AM	BCl3 valve closed
8/30/2011	10:39:07 AM	PH3 valve closed
8/30/2011	10:39:07 AM	SiCl4 pre valve closed
8/30/2011	10:39:07 AM	SiCl4 post valve closed
8/30/2011	10:39:07 AM	Bypass valve closed
8/30/2011	10:39:07 AM	Bubbler valve closed
8/30/2011	10:39:07 AM	Helium valve opened
8/30/2011	10:39:07 AM	Main Vac valve opened
8/30/2011	10:39:07 AM	Helium MFC set to  20.000000
8/30/2011	10:39:07 AM	H2 MFC set to  0.000000
8/30/2011	10:39:07 AM	BCl3 MFC set to  0.000000
8/30/2011	10:39:07 AM	PHl3 MFC set to  0.000000
8/30/2011	10:39:07 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:39:07 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:39:07 AM	Tube furnace set to 150
8/30/2011	10:39:37 AM	Helium valve closed
8/30/2011	10:39:37 AM	H2 valve closed
8/30/2011	10:39:37 AM	BCl3 valve closed
8/30/2011	10:39:37 AM	PH3 valve closed
8/30/2011	10:39:37 AM	SiCl4 pre valve closed
8/30/2011	10:39:37 AM	SiCl4 post valve closed
8/30/2011	10:39:37 AM	Bypass valve closed
8/30/2011	10:39:37 AM	Bubbler valve closed
8/30/2011	10:39:37 AM	Main Vac valve opened
8/30/2011	10:39:37 AM	Helium MFC set to  0.000000
8/30/2011	10:39:37 AM	H2 MFC set to  0.000000
8/30/2011	10:39:37 AM	BCl3 MFC set to  0.000000
8/30/2011	10:39:37 AM	PHl3 MFC set to  0.000000
8/30/2011	10:39:37 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:39:37 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:39:37 AM	Tube furnace set to 150
8/30/2011	10:40:07 AM	H2 valve closed
8/30/2011	10:40:07 AM	BCl3 valve closed
8/30/2011	10:40:07 AM	PH3 valve closed
8/30/2011	10:40:07 AM	SiCl4 pre valve closed
8/30/2011	10:40:07 AM	SiCl4 post valve closed
8/30/2011	10:40:07 AM	Bypass valve closed
8/30/2011	10:40:07 AM	Bubbler valve closed
8/30/2011	10:40:07 AM	Helium valve opened
8/30/2011	10:40:07 AM	Main Vac valve opened
8/30/2011	10:40:07 AM	Helium MFC set to  20.000000
8/30/2011	10:40:07 AM	H2 MFC set to  0.000000
8/30/2011	10:40:07 AM	BCl3 MFC set to  0.000000
8/30/2011	10:40:07 AM	PHl3 MFC set to  0.000000
8/30/2011	10:40:07 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:40:07 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:40:07 AM	Tube furnace set to 150
8/30/2011	10:40:37 AM	Helium valve closed
8/30/2011	10:40:37 AM	H2 valve closed
8/30/2011	10:40:37 AM	BCl3 valve closed
8/30/2011	10:40:37 AM	PH3 valve closed
8/30/2011	10:40:37 AM	SiCl4 pre valve closed
8/30/2011	10:40:37 AM	SiCl4 post valve closed
8/30/2011	10:40:37 AM	Bypass valve closed
8/30/2011	10:40:37 AM	Bubbler valve closed
8/30/2011	10:40:37 AM	Main Vac valve opened
8/30/2011	10:40:37 AM	Helium MFC set to  0.000000
8/30/2011	10:40:37 AM	H2 MFC set to  0.000000
8/30/2011	10:40:37 AM	BCl3 MFC set to  0.000000
8/30/2011	10:40:37 AM	PHl3 MFC set to  0.000000
8/30/2011	10:40:37 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:40:37 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:40:37 AM	Tube furnace set to 150
8/30/2011	10:41:07 AM	H2 valve closed
8/30/2011	10:41:07 AM	BCl3 valve closed
8/30/2011	10:41:07 AM	PH3 valve closed
8/30/2011	10:41:07 AM	SiCl4 pre valve closed
8/30/2011	10:41:07 AM	SiCl4 post valve closed
8/30/2011	10:41:07 AM	Bypass valve closed
8/30/2011	10:41:07 AM	Bubbler valve closed
8/30/2011	10:41:07 AM	Helium valve opened
8/30/2011	10:41:07 AM	Main Vac valve opened
8/30/2011	10:41:07 AM	Helium MFC set to  20.000000
8/30/2011	10:41:07 AM	H2 MFC set to  0.000000
8/30/2011	10:41:07 AM	BCl3 MFC set to  0.000000
8/30/2011	10:41:07 AM	PHl3 MFC set to  0.000000
8/30/2011	10:41:07 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:41:07 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:41:08 AM	Tube furnace set to 150
8/30/2011	10:41:38 AM	Helium valve closed
8/30/2011	10:41:38 AM	H2 valve closed
8/30/2011	10:41:38 AM	BCl3 valve closed
8/30/2011	10:41:38 AM	PH3 valve closed
8/30/2011	10:41:38 AM	SiCl4 pre valve closed
8/30/2011	10:41:38 AM	SiCl4 post valve closed
8/30/2011	10:41:38 AM	Bypass valve closed
8/30/2011	10:41:38 AM	Bubbler valve closed
8/30/2011	10:41:38 AM	Main Vac valve opened
8/30/2011	10:41:38 AM	Helium MFC set to  0.000000
8/30/2011	10:41:38 AM	H2 MFC set to  0.000000
8/30/2011	10:41:38 AM	BCl3 MFC set to  0.000000
8/30/2011	10:41:38 AM	PHl3 MFC set to  0.000000
8/30/2011	10:41:38 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:41:38 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:41:38 AM	Tube furnace set to 150
8/30/2011	10:42:08 AM	H2 valve closed
8/30/2011	10:42:08 AM	BCl3 valve closed
8/30/2011	10:42:08 AM	PH3 valve closed
8/30/2011	10:42:08 AM	SiCl4 pre valve closed
8/30/2011	10:42:08 AM	SiCl4 post valve closed
8/30/2011	10:42:08 AM	Bypass valve closed
8/30/2011	10:42:08 AM	Bubbler valve closed
8/30/2011	10:42:08 AM	Helium valve opened
8/30/2011	10:42:08 AM	Main Vac valve opened
8/30/2011	10:42:08 AM	Helium MFC set to  20.000000
8/30/2011	10:42:08 AM	H2 MFC set to  0.000000
8/30/2011	10:42:08 AM	BCl3 MFC set to  0.000000
8/30/2011	10:42:08 AM	PHl3 MFC set to  0.000000
8/30/2011	10:42:08 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:42:08 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:42:08 AM	Tube furnace set to 150
8/30/2011	10:42:38 AM	Helium valve closed
8/30/2011	10:42:38 AM	H2 valve closed
8/30/2011	10:42:38 AM	BCl3 valve closed
8/30/2011	10:42:38 AM	PH3 valve closed
8/30/2011	10:42:38 AM	SiCl4 pre valve closed
8/30/2011	10:42:38 AM	SiCl4 post valve closed
8/30/2011	10:42:38 AM	Bypass valve closed
8/30/2011	10:42:38 AM	Bubbler valve closed
8/30/2011	10:42:38 AM	Main Vac valve opened
8/30/2011	10:42:38 AM	Helium MFC set to  0.000000
8/30/2011	10:42:38 AM	H2 MFC set to  0.000000
8/30/2011	10:42:38 AM	BCl3 MFC set to  0.000000
8/30/2011	10:42:38 AM	PHl3 MFC set to  0.000000
8/30/2011	10:42:38 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:42:38 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:42:38 AM	Tube furnace set to 150
8/30/2011	10:43:08 AM	H2 valve closed
8/30/2011	10:43:08 AM	BCl3 valve closed
8/30/2011	10:43:08 AM	PH3 valve closed
8/30/2011	10:43:08 AM	SiCl4 pre valve closed
8/30/2011	10:43:08 AM	SiCl4 post valve closed
8/30/2011	10:43:08 AM	Bypass valve closed
8/30/2011	10:43:08 AM	Bubbler valve closed
8/30/2011	10:43:08 AM	Helium valve opened
8/30/2011	10:43:08 AM	Main Vac valve opened
8/30/2011	10:43:08 AM	Helium MFC set to  20.000000
8/30/2011	10:43:08 AM	H2 MFC set to  0.000000
8/30/2011	10:43:08 AM	BCl3 MFC set to  0.000000
8/30/2011	10:43:08 AM	PHl3 MFC set to  0.000000
8/30/2011	10:43:08 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:43:08 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:43:09 AM	Tube furnace set to 150
8/30/2011	10:43:39 AM	Helium valve closed
8/30/2011	10:43:39 AM	H2 valve closed
8/30/2011	10:43:39 AM	BCl3 valve closed
8/30/2011	10:43:39 AM	PH3 valve closed
8/30/2011	10:43:39 AM	SiCl4 pre valve closed
8/30/2011	10:43:39 AM	SiCl4 post valve closed
8/30/2011	10:43:39 AM	Bypass valve closed
8/30/2011	10:43:39 AM	Bubbler valve closed
8/30/2011	10:43:39 AM	Main Vac valve opened
8/30/2011	10:43:39 AM	Helium MFC set to  0.000000
8/30/2011	10:43:39 AM	H2 MFC set to  0.000000
8/30/2011	10:43:39 AM	BCl3 MFC set to  0.000000
8/30/2011	10:43:39 AM	PHl3 MFC set to  0.000000
8/30/2011	10:43:39 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:43:39 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:43:39 AM	Tube furnace set to 150
8/30/2011	10:44:09 AM	H2 valve closed
8/30/2011	10:44:09 AM	BCl3 valve closed
8/30/2011	10:44:09 AM	PH3 valve closed
8/30/2011	10:44:09 AM	SiCl4 pre valve closed
8/30/2011	10:44:09 AM	SiCl4 post valve closed
8/30/2011	10:44:09 AM	Bypass valve closed
8/30/2011	10:44:09 AM	Bubbler valve closed
8/30/2011	10:44:09 AM	Helium valve opened
8/30/2011	10:44:09 AM	Main Vac valve opened
8/30/2011	10:44:09 AM	Helium MFC set to  20.000000
8/30/2011	10:44:09 AM	H2 MFC set to  0.000000
8/30/2011	10:44:09 AM	BCl3 MFC set to  0.000000
8/30/2011	10:44:09 AM	PHl3 MFC set to  0.000000
8/30/2011	10:44:09 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:44:09 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:44:09 AM	Tube furnace set to 150
8/30/2011	10:44:39 AM	Helium valve closed
8/30/2011	10:44:39 AM	H2 valve closed
8/30/2011	10:44:39 AM	BCl3 valve closed
8/30/2011	10:44:39 AM	PH3 valve closed
8/30/2011	10:44:39 AM	SiCl4 pre valve closed
8/30/2011	10:44:39 AM	SiCl4 post valve closed
8/30/2011	10:44:39 AM	Bypass valve closed
8/30/2011	10:44:39 AM	Bubbler valve closed
8/30/2011	10:44:39 AM	Main Vac valve opened
8/30/2011	10:44:39 AM	Helium MFC set to  0.000000
8/30/2011	10:44:39 AM	H2 MFC set to  0.000000
8/30/2011	10:44:39 AM	BCl3 MFC set to  0.000000
8/30/2011	10:44:39 AM	PHl3 MFC set to  0.000000
8/30/2011	10:44:39 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:44:39 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:44:39 AM	Tube furnace set to 150
8/30/2011	10:45:09 AM	H2 valve closed
8/30/2011	10:45:09 AM	BCl3 valve closed
8/30/2011	10:45:09 AM	PH3 valve closed
8/30/2011	10:45:09 AM	SiCl4 pre valve closed
8/30/2011	10:45:09 AM	SiCl4 post valve closed
8/30/2011	10:45:09 AM	Bypass valve closed
8/30/2011	10:45:09 AM	Bubbler valve closed
8/30/2011	10:45:09 AM	Helium valve opened
8/30/2011	10:45:09 AM	Main Vac valve opened
8/30/2011	10:45:09 AM	Helium MFC set to  20.000000
8/30/2011	10:45:09 AM	H2 MFC set to  0.000000
8/30/2011	10:45:09 AM	BCl3 MFC set to  0.000000
8/30/2011	10:45:09 AM	PHl3 MFC set to  0.000000
8/30/2011	10:45:09 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:45:09 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:45:09 AM	Tube furnace set to 150
8/30/2011	10:45:39 AM	Helium valve closed
8/30/2011	10:45:39 AM	H2 valve closed
8/30/2011	10:45:39 AM	BCl3 valve closed
8/30/2011	10:45:39 AM	PH3 valve closed
8/30/2011	10:45:39 AM	SiCl4 pre valve closed
8/30/2011	10:45:39 AM	SiCl4 post valve closed
8/30/2011	10:45:39 AM	Bypass valve closed
8/30/2011	10:45:39 AM	Bubbler valve closed
8/30/2011	10:45:39 AM	Main Vac valve opened
8/30/2011	10:45:39 AM	Helium MFC set to  0.000000
8/30/2011	10:45:39 AM	H2 MFC set to  0.000000
8/30/2011	10:45:39 AM	BCl3 MFC set to  0.000000
8/30/2011	10:45:39 AM	PHl3 MFC set to  0.000000
8/30/2011	10:45:39 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:45:39 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:45:40 AM	Tube furnace set to 150
8/30/2011	10:46:10 AM	H2 valve closed
8/30/2011	10:46:10 AM	BCl3 valve closed
8/30/2011	10:46:10 AM	PH3 valve closed
8/30/2011	10:46:10 AM	SiCl4 pre valve closed
8/30/2011	10:46:10 AM	SiCl4 post valve closed
8/30/2011	10:46:10 AM	Bypass valve closed
8/30/2011	10:46:10 AM	Bubbler valve closed
8/30/2011	10:46:10 AM	Helium valve opened
8/30/2011	10:46:10 AM	Main Vac valve opened
8/30/2011	10:46:10 AM	Helium MFC set to  20.000000
8/30/2011	10:46:10 AM	H2 MFC set to  0.000000
8/30/2011	10:46:10 AM	BCl3 MFC set to  0.000000
8/30/2011	10:46:10 AM	PHl3 MFC set to  0.000000
8/30/2011	10:46:10 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:46:10 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:46:10 AM	Tube furnace set to 150
8/30/2011	10:46:40 AM	Helium valve closed
8/30/2011	10:46:40 AM	H2 valve closed
8/30/2011	10:46:40 AM	BCl3 valve closed
8/30/2011	10:46:40 AM	PH3 valve closed
8/30/2011	10:46:40 AM	SiCl4 pre valve closed
8/30/2011	10:46:40 AM	SiCl4 post valve closed
8/30/2011	10:46:40 AM	Bypass valve closed
8/30/2011	10:46:40 AM	Bubbler valve closed
8/30/2011	10:46:40 AM	Main Vac valve opened
8/30/2011	10:46:40 AM	Helium MFC set to  0.000000
8/30/2011	10:46:40 AM	H2 MFC set to  0.000000
8/30/2011	10:46:40 AM	BCl3 MFC set to  0.000000
8/30/2011	10:46:40 AM	PHl3 MFC set to  0.000000
8/30/2011	10:46:40 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:46:40 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:46:40 AM	Tube furnace set to 150
8/30/2011	10:46:41 AM	Run finished at 10:46 AM
8/30/2011	10:54:40 AM	Main Vac valve closed
8/30/2011	10:54:49 AM	Main Vac valve opened
8/30/2011	10:57:53 AM	Recipe started at 10:57 AM
8/30/2011	10:57:53 AM	Helium valve closed
8/30/2011	10:57:53 AM	H2 valve closed
8/30/2011	10:57:53 AM	BCl3 valve closed
8/30/2011	10:57:53 AM	PH3 valve closed
8/30/2011	10:57:53 AM	SiCl4 pre valve closed
8/30/2011	10:57:53 AM	SiCl4 post valve closed
8/30/2011	10:57:53 AM	Main Vac valve closed
8/30/2011	10:57:53 AM	Bypass valve closed
8/30/2011	10:57:53 AM	Bubbler valve closed
8/30/2011	10:57:53 AM	Helium MFC set to  0.000000
8/30/2011	10:57:53 AM	H2 MFC set to  0.000000
8/30/2011	10:57:53 AM	BCl3 MFC set to  0.000000
8/30/2011	10:57:53 AM	PHl3 MFC set to  0.000000
8/30/2011	10:57:53 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:57:53 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:57:53 AM	Tube furnace set to 0
8/30/2011	10:57:56 AM	Helium valve closed
8/30/2011	10:57:56 AM	BCl3 valve closed
8/30/2011	10:57:56 AM	PH3 valve closed
8/30/2011	10:57:56 AM	SiCl4 pre valve closed
8/30/2011	10:57:56 AM	SiCl4 post valve closed
8/30/2011	10:57:56 AM	Main Vac valve closed
8/30/2011	10:57:56 AM	Bypass valve closed
8/30/2011	10:57:56 AM	Bubbler valve closed
8/30/2011	10:57:56 AM	H2 valve opened
8/30/2011	10:57:56 AM	Helium MFC set to  0.000000
8/30/2011	10:57:56 AM	H2 MFC set to  500.000000
8/30/2011	10:57:56 AM	BCl3 MFC set to  0.000000
8/30/2011	10:57:56 AM	PHl3 MFC set to  0.000000
8/30/2011	10:57:57 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:57:57 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:57:57 AM	Tube furnace set to 0
8/30/2011	10:58:59 AM	Helium valve closed
8/30/2011	10:58:59 AM	BCl3 valve closed
8/30/2011	10:58:59 AM	PH3 valve closed
8/30/2011	10:58:59 AM	SiCl4 pre valve closed
8/30/2011	10:58:59 AM	SiCl4 post valve closed
8/30/2011	10:58:59 AM	Main Vac valve closed
8/30/2011	10:58:59 AM	Bypass valve closed
8/30/2011	10:58:59 AM	H2 valve opened
8/30/2011	10:58:59 AM	Bubbler valve opened
8/30/2011	10:58:59 AM	Helium MFC set to  0.000000
8/30/2011	10:58:59 AM	H2 MFC set to  500.000000
8/30/2011	10:58:59 AM	BCl3 MFC set to  0.000000
8/30/2011	10:58:59 AM	PHl3 MFC set to  0.000000
8/30/2011	10:58:59 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:58:59 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:58:59 AM	Tube furnace set to 0
8/30/2011	10:59:00 AM	Helium valve closed
8/30/2011	10:59:00 AM	BCl3 valve closed
8/30/2011	10:59:00 AM	PH3 valve closed
8/30/2011	10:59:00 AM	SiCl4 pre valve closed
8/30/2011	10:59:00 AM	SiCl4 post valve closed
8/30/2011	10:59:00 AM	Main Vac valve closed
8/30/2011	10:59:00 AM	Bypass valve closed
8/30/2011	10:59:00 AM	H2 valve opened
8/30/2011	10:59:00 AM	Bubbler valve opened
8/30/2011	10:59:00 AM	Helium MFC set to  0.000000
8/30/2011	10:59:00 AM	H2 MFC set to  500.000000
8/30/2011	10:59:00 AM	BCl3 MFC set to  0.000000
8/30/2011	10:59:00 AM	PHl3 MFC set to  0.000000
8/30/2011	10:59:00 AM	SiCl4 MFC set to  0.000000
8/30/2011	10:59:00 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:59:01 AM	Tube furnace set to 1000
8/30/2011	11:19:01 AM	Helium valve closed
8/30/2011	11:19:01 AM	PH3 valve closed
8/30/2011	11:19:01 AM	Main Vac valve closed
8/30/2011	11:19:01 AM	Bypass valve closed
8/30/2011	11:19:01 AM	H2 valve opened
8/30/2011	11:19:01 AM	BCl3 valve opened
8/30/2011	11:19:01 AM	SiCl4 pre valve opened
8/30/2011	11:19:01 AM	SiCl4 post valve opened
8/30/2011	11:19:01 AM	Bubbler valve opened
8/30/2011	11:19:01 AM	Helium MFC set to  0.000000
8/30/2011	11:19:01 AM	H2 MFC set to  500.000000
8/30/2011	11:19:01 AM	BCl3 MFC set to  2.500000
8/30/2011	11:19:01 AM	PHl3 MFC set to  0.000000
8/30/2011	11:19:01 AM	SiCl4 MFC set to  50.000000
8/30/2011	11:19:01 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:19:01 AM	Tube furnace set to 1000
8/30/2011	11:39:01 AM	Helium valve closed
8/30/2011	11:39:01 AM	BCl3 valve closed
8/30/2011	11:39:01 AM	PH3 valve closed
8/30/2011	11:39:01 AM	SiCl4 pre valve closed
8/30/2011	11:39:01 AM	SiCl4 post valve closed
8/30/2011	11:39:01 AM	Main Vac valve closed
8/30/2011	11:39:01 AM	Bypass valve closed
8/30/2011	11:39:01 AM	H2 valve opened
8/30/2011	11:39:01 AM	Bubbler valve opened
8/30/2011	11:39:01 AM	Helium MFC set to  0.000000
8/30/2011	11:39:01 AM	H2 MFC set to  500.000000
8/30/2011	11:39:01 AM	BCl3 MFC set to  0.000000
8/30/2011	11:39:01 AM	PHl3 MFC set to  0.000000
8/30/2011	11:39:01 AM	SiCl4 MFC set to  0.000000
8/30/2011	11:39:01 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:39:01 AM	Tube furnace set to 750
8/30/2011	11:44:01 AM	H2 valve closed
8/30/2011	11:44:01 AM	BCl3 valve closed
8/30/2011	11:44:01 AM	PH3 valve closed
8/30/2011	11:44:01 AM	SiCl4 pre valve closed
8/30/2011	11:44:01 AM	SiCl4 post valve closed
8/30/2011	11:44:01 AM	Main Vac valve closed
8/30/2011	11:44:01 AM	Bypass valve closed
8/30/2011	11:44:01 AM	Helium valve opened
8/30/2011	11:44:01 AM	Bubbler valve opened
8/30/2011	11:44:01 AM	Helium MFC set to  500.000000
8/30/2011	11:44:01 AM	H2 MFC set to  0.000000
8/30/2011	11:44:01 AM	BCl3 MFC set to  0.000000
8/30/2011	11:44:01 AM	PHl3 MFC set to  0.000000
8/30/2011	11:44:01 AM	SiCl4 MFC set to  0.000000
8/30/2011	11:44:01 AM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:44:01 AM	Tube furnace set to 0
8/30/2011	12:04:01 PM	Helium valve closed
8/30/2011	12:04:01 PM	H2 valve closed
8/30/2011	12:04:01 PM	BCl3 valve closed
8/30/2011	12:04:01 PM	PH3 valve closed
8/30/2011	12:04:01 PM	SiCl4 pre valve closed
8/30/2011	12:04:01 PM	SiCl4 post valve closed
8/30/2011	12:04:01 PM	Main Vac valve closed
8/30/2011	12:04:01 PM	Bypass valve closed
8/30/2011	12:04:01 PM	Bubbler valve closed
8/30/2011	12:04:01 PM	Helium MFC set to  0.000000
8/30/2011	12:04:01 PM	H2 MFC set to  0.000000
8/30/2011	12:04:01 PM	BCl3 MFC set to  0.000000
8/30/2011	12:04:01 PM	PHl3 MFC set to  0.000000
8/30/2011	12:04:01 PM	SiCl4 MFC set to  0.000000
8/30/2011	12:04:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	12:04:01 PM	Tube furnace set to 0
8/30/2011	12:04:02 PM	Run finished at 12:04 PM
8/30/2011	1:01:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	1:01:58 PM	Recipe started at 1:01 PM
8/30/2011	1:01:58 PM	Helium valve closed
8/30/2011	1:01:58 PM	H2 valve closed
8/30/2011	1:01:58 PM	BCl3 valve closed
8/30/2011	1:01:59 PM	PH3 valve closed
8/30/2011	1:01:59 PM	SiCl4 pre valve closed
8/30/2011	1:01:59 PM	SiCl4 post valve closed
8/30/2011	1:01:59 PM	Main Vac valve closed
8/30/2011	1:01:59 PM	Bubbler valve closed
8/30/2011	1:01:59 PM	Bypass valve opened
8/30/2011	1:01:59 PM	Helium MFC set to  0.000000
8/30/2011	1:01:59 PM	H2 MFC set to  0.000000
8/30/2011	1:01:59 PM	BCl3 MFC set to  0.000000
8/30/2011	1:01:59 PM	PHl3 MFC set to  0.000000
8/30/2011	1:01:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:01:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:01:59 PM	Tube furnace set to 0
8/30/2011	1:02:06 PM	Run aborted at 1:02 PM
8/30/2011	1:02:06 PM	Helium valve closed
8/30/2011	1:02:06 PM	H2 valve closed
8/30/2011	1:02:06 PM	BCl3 valve closed
8/30/2011	1:02:06 PM	PH3 valve closed
8/30/2011	1:02:06 PM	SiCl4 pre valve closed
8/30/2011	1:02:06 PM	SiCl4 post valve closed
8/30/2011	1:02:06 PM	Bypass valve closed
8/30/2011	1:02:06 PM	Main Vac valve closed
8/30/2011	1:02:06 PM	Bubbler valve closed
8/30/2011	1:02:06 PM	Helium MFC set to  0.000000
8/30/2011	1:02:06 PM	H2 MFC set to  0.000000
8/30/2011	1:02:06 PM	BCl3 MFC set to  0.000000
8/30/2011	1:02:06 PM	PHl3 MFC set to  0.000000
8/30/2011	1:02:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:02:06 PM	Tube furnace set to 0
8/30/2011	1:02:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	1:02:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	1:02:08 PM	Recipe started at 1:02 PM
8/30/2011	1:02:08 PM	Helium valve closed
8/30/2011	1:02:08 PM	H2 valve closed
8/30/2011	1:02:08 PM	BCl3 valve closed
8/30/2011	1:02:08 PM	PH3 valve closed
8/30/2011	1:02:08 PM	SiCl4 pre valve closed
8/30/2011	1:02:08 PM	SiCl4 post valve closed
8/30/2011	1:02:08 PM	Main Vac valve closed
8/30/2011	1:02:08 PM	Bypass valve closed
8/30/2011	1:02:08 PM	Bubbler valve closed
8/30/2011	1:02:08 PM	Helium MFC set to  0.000000
8/30/2011	1:02:08 PM	H2 MFC set to  0.000000
8/30/2011	1:02:08 PM	BCl3 MFC set to  0.000000
8/30/2011	1:02:08 PM	PHl3 MFC set to  0.000000
8/30/2011	1:02:08 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:02:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:02:09 PM	Tube furnace set to 0
8/30/2011	1:02:12 PM	H2 valve closed
8/30/2011	1:02:12 PM	BCl3 valve closed
8/30/2011	1:02:12 PM	PH3 valve closed
8/30/2011	1:02:12 PM	SiCl4 pre valve closed
8/30/2011	1:02:12 PM	SiCl4 post valve closed
8/30/2011	1:02:12 PM	Main Vac valve closed
8/30/2011	1:02:12 PM	Bypass valve closed
8/30/2011	1:02:12 PM	Bubbler valve closed
8/30/2011	1:02:12 PM	Helium valve opened
8/30/2011	1:02:12 PM	Helium MFC set to  500.000000
8/30/2011	1:02:12 PM	H2 MFC set to  0.000000
8/30/2011	1:02:12 PM	BCl3 MFC set to  0.000000
8/30/2011	1:02:12 PM	PHl3 MFC set to  0.000000
8/30/2011	1:02:12 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:02:12 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:02:12 PM	Tube furnace set to 0
8/30/2011	1:03:00 PM	Helium valve closed
8/30/2011	1:03:00 PM	H2 valve closed
8/30/2011	1:03:00 PM	BCl3 valve closed
8/30/2011	1:03:00 PM	PH3 valve closed
8/30/2011	1:03:00 PM	SiCl4 pre valve closed
8/30/2011	1:03:00 PM	SiCl4 post valve closed
8/30/2011	1:03:00 PM	Main Vac valve closed
8/30/2011	1:03:00 PM	Bypass valve closed
8/30/2011	1:03:00 PM	Bubbler valve closed
8/30/2011	1:03:00 PM	Helium MFC set to  0.000000
8/30/2011	1:03:00 PM	H2 MFC set to  0.000000
8/30/2011	1:03:00 PM	BCl3 MFC set to  0.000000
8/30/2011	1:03:00 PM	PHl3 MFC set to  0.000000
8/30/2011	1:03:00 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:03:00 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:03:00 PM	Tube furnace set to 0
8/30/2011	1:03:01 PM	Run finished at 1:03 PM
8/30/2011	1:03:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	1:06:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	1:06:44 PM	Recipe started at 1:06 PM
8/30/2011	1:06:44 PM	Helium valve closed
8/30/2011	1:06:44 PM	H2 valve closed
8/30/2011	1:06:44 PM	BCl3 valve closed
8/30/2011	1:06:44 PM	PH3 valve closed
8/30/2011	1:06:44 PM	SiCl4 pre valve closed
8/30/2011	1:06:44 PM	SiCl4 post valve closed
8/30/2011	1:06:44 PM	Main Vac valve closed
8/30/2011	1:06:44 PM	Bubbler valve closed
8/30/2011	1:06:44 PM	Bypass valve opened
8/30/2011	1:06:44 PM	Helium MFC set to  0.000000
8/30/2011	1:06:44 PM	H2 MFC set to  0.000000
8/30/2011	1:06:44 PM	BCl3 MFC set to  0.000000
8/30/2011	1:06:44 PM	PHl3 MFC set to  0.000000
8/30/2011	1:06:44 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:06:44 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:06:44 PM	Tube furnace set to 0
8/30/2011	1:07:46 PM	Helium valve closed
8/30/2011	1:07:46 PM	H2 valve closed
8/30/2011	1:07:46 PM	BCl3 valve closed
8/30/2011	1:07:46 PM	PH3 valve closed
8/30/2011	1:07:46 PM	SiCl4 pre valve closed
8/30/2011	1:07:46 PM	SiCl4 post valve closed
8/30/2011	1:07:46 PM	Main Vac valve closed
8/30/2011	1:07:46 PM	Bubbler valve closed
8/30/2011	1:07:46 PM	Bypass valve opened
8/30/2011	1:07:47 PM	Helium MFC set to  0.000000
8/30/2011	1:07:47 PM	H2 MFC set to  0.000000
8/30/2011	1:07:47 PM	BCl3 MFC set to  0.000000
8/30/2011	1:07:47 PM	PHl3 MFC set to  0.000000
8/30/2011	1:07:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:07:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:07:47 PM	Tube furnace set to 0
8/30/2011	1:08:47 PM	Helium valve closed
8/30/2011	1:08:47 PM	H2 valve closed
8/30/2011	1:08:47 PM	BCl3 valve closed
8/30/2011	1:08:47 PM	PH3 valve closed
8/30/2011	1:08:47 PM	SiCl4 pre valve closed
8/30/2011	1:08:47 PM	SiCl4 post valve closed
8/30/2011	1:08:47 PM	Bypass valve closed
8/30/2011	1:08:47 PM	Bubbler valve closed
8/30/2011	1:08:47 PM	Main Vac valve opened
8/30/2011	1:08:47 PM	Helium MFC set to  0.000000
8/30/2011	1:08:47 PM	H2 MFC set to  0.000000
8/30/2011	1:08:47 PM	BCl3 MFC set to  0.000000
8/30/2011	1:08:47 PM	PHl3 MFC set to  0.000000
8/30/2011	1:08:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:08:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:08:47 PM	Tube furnace set to 0
8/30/2011	1:08:48 PM	Run finished at 1:08 PM
8/30/2011	1:08:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	1:09:31 PM	Recipe started at 1:09 PM
8/30/2011	1:09:31 PM	Helium valve closed
8/30/2011	1:09:31 PM	H2 valve closed
8/30/2011	1:09:31 PM	BCl3 valve closed
8/30/2011	1:09:31 PM	PH3 valve closed
8/30/2011	1:09:31 PM	SiCl4 pre valve closed
8/30/2011	1:09:31 PM	SiCl4 post valve closed
8/30/2011	1:09:31 PM	Bypass valve closed
8/30/2011	1:09:31 PM	Bubbler valve closed
8/30/2011	1:09:31 PM	Main Vac valve opened
8/30/2011	1:09:31 PM	Helium MFC set to  0.000000
8/30/2011	1:09:31 PM	H2 MFC set to  0.000000
8/30/2011	1:09:31 PM	BCl3 MFC set to  0.000000
8/30/2011	1:09:31 PM	PHl3 MFC set to  0.000000
8/30/2011	1:09:31 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:09:31 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:09:31 PM	Tube furnace set to 150
8/30/2011	1:10:01 PM	H2 valve closed
8/30/2011	1:10:01 PM	BCl3 valve closed
8/30/2011	1:10:01 PM	PH3 valve closed
8/30/2011	1:10:01 PM	SiCl4 pre valve closed
8/30/2011	1:10:01 PM	SiCl4 post valve closed
8/30/2011	1:10:01 PM	Bypass valve closed
8/30/2011	1:10:01 PM	Bubbler valve closed
8/30/2011	1:10:01 PM	Helium valve opened
8/30/2011	1:10:01 PM	Main Vac valve opened
8/30/2011	1:10:01 PM	Helium MFC set to  20.000000
8/30/2011	1:10:01 PM	H2 MFC set to  0.000000
8/30/2011	1:10:01 PM	BCl3 MFC set to  0.000000
8/30/2011	1:10:01 PM	PHl3 MFC set to  0.000000
8/30/2011	1:10:01 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:10:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:10:02 PM	Tube furnace set to 150
8/30/2011	1:10:32 PM	Helium valve closed
8/30/2011	1:10:32 PM	H2 valve closed
8/30/2011	1:10:32 PM	BCl3 valve closed
8/30/2011	1:10:32 PM	PH3 valve closed
8/30/2011	1:10:32 PM	SiCl4 pre valve closed
8/30/2011	1:10:32 PM	SiCl4 post valve closed
8/30/2011	1:10:32 PM	Bypass valve closed
8/30/2011	1:10:32 PM	Bubbler valve closed
8/30/2011	1:10:32 PM	Main Vac valve opened
8/30/2011	1:10:32 PM	Helium MFC set to  0.000000
8/30/2011	1:10:32 PM	H2 MFC set to  0.000000
8/30/2011	1:10:32 PM	BCl3 MFC set to  0.000000
8/30/2011	1:10:32 PM	PHl3 MFC set to  0.000000
8/30/2011	1:10:32 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:10:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:10:32 PM	Tube furnace set to 150
8/30/2011	1:11:02 PM	H2 valve closed
8/30/2011	1:11:02 PM	BCl3 valve closed
8/30/2011	1:11:02 PM	PH3 valve closed
8/30/2011	1:11:02 PM	SiCl4 pre valve closed
8/30/2011	1:11:02 PM	SiCl4 post valve closed
8/30/2011	1:11:02 PM	Bypass valve closed
8/30/2011	1:11:02 PM	Bubbler valve closed
8/30/2011	1:11:02 PM	Helium valve opened
8/30/2011	1:11:02 PM	Main Vac valve opened
8/30/2011	1:11:02 PM	Helium MFC set to  20.000000
8/30/2011	1:11:02 PM	H2 MFC set to  0.000000
8/30/2011	1:11:02 PM	BCl3 MFC set to  0.000000
8/30/2011	1:11:02 PM	PHl3 MFC set to  0.000000
8/30/2011	1:11:02 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:11:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:11:02 PM	Tube furnace set to 150
8/30/2011	1:11:32 PM	Helium valve closed
8/30/2011	1:11:32 PM	H2 valve closed
8/30/2011	1:11:32 PM	BCl3 valve closed
8/30/2011	1:11:32 PM	PH3 valve closed
8/30/2011	1:11:32 PM	SiCl4 pre valve closed
8/30/2011	1:11:32 PM	SiCl4 post valve closed
8/30/2011	1:11:32 PM	Bypass valve closed
8/30/2011	1:11:32 PM	Bubbler valve closed
8/30/2011	1:11:32 PM	Main Vac valve opened
8/30/2011	1:11:32 PM	Helium MFC set to  0.000000
8/30/2011	1:11:32 PM	H2 MFC set to  0.000000
8/30/2011	1:11:32 PM	BCl3 MFC set to  0.000000
8/30/2011	1:11:32 PM	PHl3 MFC set to  0.000000
8/30/2011	1:11:32 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:11:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:11:32 PM	Tube furnace set to 150
8/30/2011	1:12:02 PM	H2 valve closed
8/30/2011	1:12:02 PM	BCl3 valve closed
8/30/2011	1:12:02 PM	PH3 valve closed
8/30/2011	1:12:02 PM	SiCl4 pre valve closed
8/30/2011	1:12:02 PM	SiCl4 post valve closed
8/30/2011	1:12:02 PM	Bypass valve closed
8/30/2011	1:12:02 PM	Bubbler valve closed
8/30/2011	1:12:02 PM	Helium valve opened
8/30/2011	1:12:02 PM	Main Vac valve opened
8/30/2011	1:12:02 PM	Helium MFC set to  20.000000
8/30/2011	1:12:02 PM	H2 MFC set to  0.000000
8/30/2011	1:12:02 PM	BCl3 MFC set to  0.000000
8/30/2011	1:12:02 PM	PHl3 MFC set to  0.000000
8/30/2011	1:12:02 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:12:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:12:02 PM	Tube furnace set to 150
8/30/2011	1:12:32 PM	Helium valve closed
8/30/2011	1:12:32 PM	H2 valve closed
8/30/2011	1:12:32 PM	BCl3 valve closed
8/30/2011	1:12:32 PM	PH3 valve closed
8/30/2011	1:12:32 PM	SiCl4 pre valve closed
8/30/2011	1:12:32 PM	SiCl4 post valve closed
8/30/2011	1:12:32 PM	Bypass valve closed
8/30/2011	1:12:32 PM	Bubbler valve closed
8/30/2011	1:12:32 PM	Main Vac valve opened
8/30/2011	1:12:32 PM	Helium MFC set to  0.000000
8/30/2011	1:12:32 PM	H2 MFC set to  0.000000
8/30/2011	1:12:32 PM	BCl3 MFC set to  0.000000
8/30/2011	1:12:32 PM	PHl3 MFC set to  0.000000
8/30/2011	1:12:32 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:12:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:12:33 PM	Tube furnace set to 150
8/30/2011	1:13:03 PM	H2 valve closed
8/30/2011	1:13:03 PM	BCl3 valve closed
8/30/2011	1:13:03 PM	PH3 valve closed
8/30/2011	1:13:03 PM	SiCl4 pre valve closed
8/30/2011	1:13:03 PM	SiCl4 post valve closed
8/30/2011	1:13:03 PM	Bypass valve closed
8/30/2011	1:13:03 PM	Bubbler valve closed
8/30/2011	1:13:03 PM	Helium valve opened
8/30/2011	1:13:03 PM	Main Vac valve opened
8/30/2011	1:13:03 PM	Helium MFC set to  20.000000
8/30/2011	1:13:03 PM	H2 MFC set to  0.000000
8/30/2011	1:13:03 PM	BCl3 MFC set to  0.000000
8/30/2011	1:13:03 PM	PHl3 MFC set to  0.000000
8/30/2011	1:13:03 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:13:03 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:13:03 PM	Tube furnace set to 150
8/30/2011	1:13:33 PM	Helium valve closed
8/30/2011	1:13:33 PM	H2 valve closed
8/30/2011	1:13:33 PM	BCl3 valve closed
8/30/2011	1:13:33 PM	PH3 valve closed
8/30/2011	1:13:33 PM	SiCl4 pre valve closed
8/30/2011	1:13:33 PM	SiCl4 post valve closed
8/30/2011	1:13:33 PM	Bypass valve closed
8/30/2011	1:13:33 PM	Bubbler valve closed
8/30/2011	1:13:33 PM	Main Vac valve opened
8/30/2011	1:13:33 PM	Helium MFC set to  0.000000
8/30/2011	1:13:33 PM	H2 MFC set to  0.000000
8/30/2011	1:13:33 PM	BCl3 MFC set to  0.000000
8/30/2011	1:13:33 PM	PHl3 MFC set to  0.000000
8/30/2011	1:13:33 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:13:33 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:13:33 PM	Tube furnace set to 150
8/30/2011	1:14:03 PM	H2 valve closed
8/30/2011	1:14:03 PM	BCl3 valve closed
8/30/2011	1:14:03 PM	PH3 valve closed
8/30/2011	1:14:03 PM	SiCl4 pre valve closed
8/30/2011	1:14:03 PM	SiCl4 post valve closed
8/30/2011	1:14:03 PM	Bypass valve closed
8/30/2011	1:14:03 PM	Bubbler valve closed
8/30/2011	1:14:03 PM	Helium valve opened
8/30/2011	1:14:03 PM	Main Vac valve opened
8/30/2011	1:14:03 PM	Helium MFC set to  20.000000
8/30/2011	1:14:03 PM	H2 MFC set to  0.000000
8/30/2011	1:14:03 PM	BCl3 MFC set to  0.000000
8/30/2011	1:14:03 PM	PHl3 MFC set to  0.000000
8/30/2011	1:14:03 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:14:03 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:14:03 PM	Tube furnace set to 150
8/30/2011	1:14:33 PM	Helium valve closed
8/30/2011	1:14:33 PM	H2 valve closed
8/30/2011	1:14:33 PM	BCl3 valve closed
8/30/2011	1:14:33 PM	PH3 valve closed
8/30/2011	1:14:33 PM	SiCl4 pre valve closed
8/30/2011	1:14:33 PM	SiCl4 post valve closed
8/30/2011	1:14:33 PM	Bypass valve closed
8/30/2011	1:14:33 PM	Bubbler valve closed
8/30/2011	1:14:33 PM	Main Vac valve opened
8/30/2011	1:14:33 PM	Helium MFC set to  0.000000
8/30/2011	1:14:33 PM	H2 MFC set to  0.000000
8/30/2011	1:14:33 PM	BCl3 MFC set to  0.000000
8/30/2011	1:14:33 PM	PHl3 MFC set to  0.000000
8/30/2011	1:14:33 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:14:33 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:14:33 PM	Tube furnace set to 150
8/30/2011	1:15:03 PM	H2 valve closed
8/30/2011	1:15:03 PM	BCl3 valve closed
8/30/2011	1:15:03 PM	PH3 valve closed
8/30/2011	1:15:03 PM	SiCl4 pre valve closed
8/30/2011	1:15:03 PM	SiCl4 post valve closed
8/30/2011	1:15:03 PM	Bypass valve closed
8/30/2011	1:15:03 PM	Bubbler valve closed
8/30/2011	1:15:03 PM	Helium valve opened
8/30/2011	1:15:03 PM	Main Vac valve opened
8/30/2011	1:15:03 PM	Helium MFC set to  20.000000
8/30/2011	1:15:03 PM	H2 MFC set to  0.000000
8/30/2011	1:15:03 PM	BCl3 MFC set to  0.000000
8/30/2011	1:15:03 PM	PHl3 MFC set to  0.000000
8/30/2011	1:15:03 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:15:03 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:15:04 PM	Tube furnace set to 150
8/30/2011	1:15:34 PM	Helium valve closed
8/30/2011	1:15:34 PM	H2 valve closed
8/30/2011	1:15:34 PM	BCl3 valve closed
8/30/2011	1:15:34 PM	PH3 valve closed
8/30/2011	1:15:34 PM	SiCl4 pre valve closed
8/30/2011	1:15:34 PM	SiCl4 post valve closed
8/30/2011	1:15:34 PM	Bypass valve closed
8/30/2011	1:15:34 PM	Bubbler valve closed
8/30/2011	1:15:34 PM	Main Vac valve opened
8/30/2011	1:15:34 PM	Helium MFC set to  0.000000
8/30/2011	1:15:34 PM	H2 MFC set to  0.000000
8/30/2011	1:15:34 PM	BCl3 MFC set to  0.000000
8/30/2011	1:15:34 PM	PHl3 MFC set to  0.000000
8/30/2011	1:15:34 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:15:34 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:15:34 PM	Tube furnace set to 150
8/30/2011	1:16:04 PM	H2 valve closed
8/30/2011	1:16:04 PM	BCl3 valve closed
8/30/2011	1:16:04 PM	PH3 valve closed
8/30/2011	1:16:04 PM	SiCl4 pre valve closed
8/30/2011	1:16:04 PM	SiCl4 post valve closed
8/30/2011	1:16:04 PM	Bypass valve closed
8/30/2011	1:16:04 PM	Bubbler valve closed
8/30/2011	1:16:04 PM	Helium valve opened
8/30/2011	1:16:04 PM	Main Vac valve opened
8/30/2011	1:16:04 PM	Helium MFC set to  20.000000
8/30/2011	1:16:04 PM	H2 MFC set to  0.000000
8/30/2011	1:16:04 PM	BCl3 MFC set to  0.000000
8/30/2011	1:16:04 PM	PHl3 MFC set to  0.000000
8/30/2011	1:16:04 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:16:04 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:16:04 PM	Tube furnace set to 150
8/30/2011	1:16:34 PM	Helium valve closed
8/30/2011	1:16:34 PM	H2 valve closed
8/30/2011	1:16:34 PM	BCl3 valve closed
8/30/2011	1:16:34 PM	PH3 valve closed
8/30/2011	1:16:34 PM	SiCl4 pre valve closed
8/30/2011	1:16:34 PM	SiCl4 post valve closed
8/30/2011	1:16:34 PM	Bypass valve closed
8/30/2011	1:16:34 PM	Bubbler valve closed
8/30/2011	1:16:34 PM	Main Vac valve opened
8/30/2011	1:16:34 PM	Helium MFC set to  0.000000
8/30/2011	1:16:34 PM	H2 MFC set to  0.000000
8/30/2011	1:16:34 PM	BCl3 MFC set to  0.000000
8/30/2011	1:16:34 PM	PHl3 MFC set to  0.000000
8/30/2011	1:16:34 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:16:34 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:16:34 PM	Tube furnace set to 150
8/30/2011	1:17:04 PM	H2 valve closed
8/30/2011	1:17:04 PM	BCl3 valve closed
8/30/2011	1:17:04 PM	PH3 valve closed
8/30/2011	1:17:04 PM	SiCl4 pre valve closed
8/30/2011	1:17:04 PM	SiCl4 post valve closed
8/30/2011	1:17:04 PM	Bypass valve closed
8/30/2011	1:17:04 PM	Bubbler valve closed
8/30/2011	1:17:04 PM	Helium valve opened
8/30/2011	1:17:04 PM	Main Vac valve opened
8/30/2011	1:17:04 PM	Helium MFC set to  20.000000
8/30/2011	1:17:04 PM	H2 MFC set to  0.000000
8/30/2011	1:17:04 PM	BCl3 MFC set to  0.000000
8/30/2011	1:17:04 PM	PHl3 MFC set to  0.000000
8/30/2011	1:17:04 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:17:04 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:17:04 PM	Tube furnace set to 150
8/30/2011	1:17:34 PM	Helium valve closed
8/30/2011	1:17:34 PM	H2 valve closed
8/30/2011	1:17:34 PM	BCl3 valve closed
8/30/2011	1:17:34 PM	PH3 valve closed
8/30/2011	1:17:34 PM	SiCl4 pre valve closed
8/30/2011	1:17:34 PM	SiCl4 post valve closed
8/30/2011	1:17:34 PM	Bypass valve closed
8/30/2011	1:17:34 PM	Bubbler valve closed
8/30/2011	1:17:34 PM	Main Vac valve opened
8/30/2011	1:17:34 PM	Helium MFC set to  0.000000
8/30/2011	1:17:34 PM	H2 MFC set to  0.000000
8/30/2011	1:17:34 PM	BCl3 MFC set to  0.000000
8/30/2011	1:17:34 PM	PHl3 MFC set to  0.000000
8/30/2011	1:17:34 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:17:34 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:17:35 PM	Tube furnace set to 150
8/30/2011	1:18:05 PM	H2 valve closed
8/30/2011	1:18:05 PM	BCl3 valve closed
8/30/2011	1:18:05 PM	PH3 valve closed
8/30/2011	1:18:05 PM	SiCl4 pre valve closed
8/30/2011	1:18:05 PM	SiCl4 post valve closed
8/30/2011	1:18:05 PM	Bypass valve closed
8/30/2011	1:18:05 PM	Bubbler valve closed
8/30/2011	1:18:05 PM	Helium valve opened
8/30/2011	1:18:05 PM	Main Vac valve opened
8/30/2011	1:18:05 PM	Helium MFC set to  20.000000
8/30/2011	1:18:05 PM	H2 MFC set to  0.000000
8/30/2011	1:18:05 PM	BCl3 MFC set to  0.000000
8/30/2011	1:18:05 PM	PHl3 MFC set to  0.000000
8/30/2011	1:18:05 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:18:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:18:05 PM	Tube furnace set to 150
8/30/2011	1:18:35 PM	Helium valve closed
8/30/2011	1:18:35 PM	H2 valve closed
8/30/2011	1:18:35 PM	BCl3 valve closed
8/30/2011	1:18:35 PM	PH3 valve closed
8/30/2011	1:18:35 PM	SiCl4 pre valve closed
8/30/2011	1:18:35 PM	SiCl4 post valve closed
8/30/2011	1:18:35 PM	Bypass valve closed
8/30/2011	1:18:35 PM	Bubbler valve closed
8/30/2011	1:18:35 PM	Main Vac valve opened
8/30/2011	1:18:35 PM	Helium MFC set to  0.000000
8/30/2011	1:18:35 PM	H2 MFC set to  0.000000
8/30/2011	1:18:35 PM	BCl3 MFC set to  0.000000
8/30/2011	1:18:35 PM	PHl3 MFC set to  0.000000
8/30/2011	1:18:35 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:18:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:18:35 PM	Tube furnace set to 150
8/30/2011	1:19:05 PM	H2 valve closed
8/30/2011	1:19:05 PM	BCl3 valve closed
8/30/2011	1:19:05 PM	PH3 valve closed
8/30/2011	1:19:05 PM	SiCl4 pre valve closed
8/30/2011	1:19:05 PM	SiCl4 post valve closed
8/30/2011	1:19:05 PM	Bypass valve closed
8/30/2011	1:19:05 PM	Bubbler valve closed
8/30/2011	1:19:05 PM	Helium valve opened
8/30/2011	1:19:05 PM	Main Vac valve opened
8/30/2011	1:19:05 PM	Helium MFC set to  20.000000
8/30/2011	1:19:05 PM	H2 MFC set to  0.000000
8/30/2011	1:19:05 PM	BCl3 MFC set to  0.000000
8/30/2011	1:19:05 PM	PHl3 MFC set to  0.000000
8/30/2011	1:19:05 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:19:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:19:05 PM	Tube furnace set to 150
8/30/2011	1:19:30 PM	Run aborted at 1:19 PM
8/30/2011	1:19:30 PM	Helium valve closed
8/30/2011	1:19:30 PM	H2 valve closed
8/30/2011	1:19:30 PM	BCl3 valve closed
8/30/2011	1:19:30 PM	PH3 valve closed
8/30/2011	1:19:30 PM	SiCl4 pre valve closed
8/30/2011	1:19:30 PM	SiCl4 post valve closed
8/30/2011	1:19:30 PM	Bypass valve closed
8/30/2011	1:19:30 PM	Main Vac valve closed
8/30/2011	1:19:30 PM	Bubbler valve closed
8/30/2011	1:19:30 PM	Helium MFC set to  0.000000
8/30/2011	1:19:30 PM	H2 MFC set to  0.000000
8/30/2011	1:19:30 PM	BCl3 MFC set to  0.000000
8/30/2011	1:19:30 PM	PHl3 MFC set to  0.000000
8/30/2011	1:19:30 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:19:30 PM	Tube furnace set to 0
8/30/2011	1:19:43 PM	Main Vac valve opened
8/30/2011	1:19:58 PM	Recipe started at 1:19 PM
8/30/2011	1:19:58 PM	Helium valve closed
8/30/2011	1:19:58 PM	H2 valve closed
8/30/2011	1:19:58 PM	BCl3 valve closed
8/30/2011	1:19:58 PM	PH3 valve closed
8/30/2011	1:19:58 PM	SiCl4 pre valve closed
8/30/2011	1:19:58 PM	SiCl4 post valve closed
8/30/2011	1:19:58 PM	Bypass valve closed
8/30/2011	1:19:58 PM	Bubbler valve closed
8/30/2011	1:19:58 PM	Main Vac valve opened
8/30/2011	1:19:58 PM	Helium MFC set to  0.000000
8/30/2011	1:19:58 PM	H2 MFC set to  0.000000
8/30/2011	1:19:58 PM	BCl3 MFC set to  0.000000
8/30/2011	1:19:58 PM	PHl3 MFC set to  0.000000
8/30/2011	1:19:58 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:19:58 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:19:58 PM	Tube furnace set to 150
8/30/2011	1:20:28 PM	H2 valve closed
8/30/2011	1:20:28 PM	BCl3 valve closed
8/30/2011	1:20:28 PM	PH3 valve closed
8/30/2011	1:20:28 PM	SiCl4 pre valve closed
8/30/2011	1:20:28 PM	SiCl4 post valve closed
8/30/2011	1:20:28 PM	Bypass valve closed
8/30/2011	1:20:28 PM	Bubbler valve closed
8/30/2011	1:20:28 PM	Helium valve opened
8/30/2011	1:20:28 PM	Main Vac valve opened
8/30/2011	1:20:28 PM	Helium MFC set to  20.000000
8/30/2011	1:20:28 PM	H2 MFC set to  0.000000
8/30/2011	1:20:28 PM	BCl3 MFC set to  0.000000
8/30/2011	1:20:28 PM	PHl3 MFC set to  0.000000
8/30/2011	1:20:28 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:20:28 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:20:28 PM	Tube furnace set to 150
8/30/2011	1:20:58 PM	Helium valve closed
8/30/2011	1:20:58 PM	H2 valve closed
8/30/2011	1:20:58 PM	BCl3 valve closed
8/30/2011	1:20:58 PM	PH3 valve closed
8/30/2011	1:20:58 PM	SiCl4 pre valve closed
8/30/2011	1:20:58 PM	SiCl4 post valve closed
8/30/2011	1:20:58 PM	Bypass valve closed
8/30/2011	1:20:58 PM	Bubbler valve closed
8/30/2011	1:20:58 PM	Main Vac valve opened
8/30/2011	1:20:58 PM	Helium MFC set to  0.000000
8/30/2011	1:20:58 PM	H2 MFC set to  0.000000
8/30/2011	1:20:58 PM	BCl3 MFC set to  0.000000
8/30/2011	1:20:58 PM	PHl3 MFC set to  0.000000
8/30/2011	1:20:58 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:20:58 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:20:59 PM	Tube furnace set to 150
8/30/2011	1:21:29 PM	H2 valve closed
8/30/2011	1:21:29 PM	BCl3 valve closed
8/30/2011	1:21:29 PM	PH3 valve closed
8/30/2011	1:21:29 PM	SiCl4 pre valve closed
8/30/2011	1:21:29 PM	SiCl4 post valve closed
8/30/2011	1:21:29 PM	Bypass valve closed
8/30/2011	1:21:29 PM	Bubbler valve closed
8/30/2011	1:21:29 PM	Helium valve opened
8/30/2011	1:21:29 PM	Main Vac valve opened
8/30/2011	1:21:29 PM	Helium MFC set to  20.000000
8/30/2011	1:21:29 PM	H2 MFC set to  0.000000
8/30/2011	1:21:29 PM	BCl3 MFC set to  0.000000
8/30/2011	1:21:29 PM	PHl3 MFC set to  0.000000
8/30/2011	1:21:29 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:21:29 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:21:29 PM	Tube furnace set to 150
8/30/2011	1:21:59 PM	Helium valve closed
8/30/2011	1:21:59 PM	H2 valve closed
8/30/2011	1:21:59 PM	BCl3 valve closed
8/30/2011	1:21:59 PM	PH3 valve closed
8/30/2011	1:21:59 PM	SiCl4 pre valve closed
8/30/2011	1:21:59 PM	SiCl4 post valve closed
8/30/2011	1:21:59 PM	Bypass valve closed
8/30/2011	1:21:59 PM	Bubbler valve closed
8/30/2011	1:21:59 PM	Main Vac valve opened
8/30/2011	1:21:59 PM	Helium MFC set to  0.000000
8/30/2011	1:21:59 PM	H2 MFC set to  0.000000
8/30/2011	1:21:59 PM	BCl3 MFC set to  0.000000
8/30/2011	1:21:59 PM	PHl3 MFC set to  0.000000
8/30/2011	1:21:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:21:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:21:59 PM	Tube furnace set to 150
8/30/2011	1:22:29 PM	H2 valve closed
8/30/2011	1:22:29 PM	BCl3 valve closed
8/30/2011	1:22:29 PM	PH3 valve closed
8/30/2011	1:22:29 PM	SiCl4 pre valve closed
8/30/2011	1:22:29 PM	SiCl4 post valve closed
8/30/2011	1:22:29 PM	Bypass valve closed
8/30/2011	1:22:29 PM	Bubbler valve closed
8/30/2011	1:22:29 PM	Helium valve opened
8/30/2011	1:22:29 PM	Main Vac valve opened
8/30/2011	1:22:29 PM	Helium MFC set to  20.000000
8/30/2011	1:22:29 PM	H2 MFC set to  0.000000
8/30/2011	1:22:29 PM	BCl3 MFC set to  0.000000
8/30/2011	1:22:29 PM	PHl3 MFC set to  0.000000
8/30/2011	1:22:29 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:22:29 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:22:29 PM	Tube furnace set to 150
8/30/2011	1:22:59 PM	Helium valve closed
8/30/2011	1:22:59 PM	H2 valve closed
8/30/2011	1:22:59 PM	BCl3 valve closed
8/30/2011	1:22:59 PM	PH3 valve closed
8/30/2011	1:22:59 PM	SiCl4 pre valve closed
8/30/2011	1:22:59 PM	SiCl4 post valve closed
8/30/2011	1:22:59 PM	Bypass valve closed
8/30/2011	1:22:59 PM	Bubbler valve closed
8/30/2011	1:22:59 PM	Main Vac valve opened
8/30/2011	1:22:59 PM	Helium MFC set to  0.000000
8/30/2011	1:22:59 PM	H2 MFC set to  0.000000
8/30/2011	1:22:59 PM	BCl3 MFC set to  0.000000
8/30/2011	1:22:59 PM	PHl3 MFC set to  0.000000
8/30/2011	1:22:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:22:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:22:59 PM	Tube furnace set to 150
8/30/2011	1:23:19 PM	Run aborted at 1:23 PM
8/30/2011	1:23:19 PM	Helium valve closed
8/30/2011	1:23:19 PM	H2 valve closed
8/30/2011	1:23:19 PM	BCl3 valve closed
8/30/2011	1:23:19 PM	PH3 valve closed
8/30/2011	1:23:19 PM	SiCl4 pre valve closed
8/30/2011	1:23:19 PM	SiCl4 post valve closed
8/30/2011	1:23:19 PM	Bypass valve closed
8/30/2011	1:23:19 PM	Main Vac valve closed
8/30/2011	1:23:19 PM	Bubbler valve closed
8/30/2011	1:23:19 PM	Helium MFC set to  0.000000
8/30/2011	1:23:19 PM	H2 MFC set to  0.000000
8/30/2011	1:23:19 PM	BCl3 MFC set to  0.000000
8/30/2011	1:23:19 PM	PHl3 MFC set to  0.000000
8/30/2011	1:23:19 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:23:20 PM	Tube furnace set to 0
8/30/2011	1:23:21 PM	Main Vac valve opened
8/30/2011	1:24:35 PM	Recipe started at 1:24 PM
8/30/2011	1:24:35 PM	Helium valve closed
8/30/2011	1:24:35 PM	H2 valve closed
8/30/2011	1:24:35 PM	BCl3 valve closed
8/30/2011	1:24:35 PM	PH3 valve closed
8/30/2011	1:24:35 PM	SiCl4 pre valve closed
8/30/2011	1:24:35 PM	SiCl4 post valve closed
8/30/2011	1:24:35 PM	Main Vac valve closed
8/30/2011	1:24:35 PM	Bypass valve closed
8/30/2011	1:24:35 PM	Bubbler valve closed
8/30/2011	1:24:35 PM	Helium MFC set to  0.000000
8/30/2011	1:24:35 PM	H2 MFC set to  0.000000
8/30/2011	1:24:35 PM	BCl3 MFC set to  0.000000
8/30/2011	1:24:35 PM	PHl3 MFC set to  0.000000
8/30/2011	1:24:35 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:24:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:24:35 PM	Tube furnace set to 0
8/30/2011	1:24:38 PM	Helium valve closed
8/30/2011	1:24:38 PM	BCl3 valve closed
8/30/2011	1:24:38 PM	PH3 valve closed
8/30/2011	1:24:38 PM	SiCl4 pre valve closed
8/30/2011	1:24:38 PM	SiCl4 post valve closed
8/30/2011	1:24:38 PM	Main Vac valve closed
8/30/2011	1:24:38 PM	Bypass valve closed
8/30/2011	1:24:38 PM	Bubbler valve closed
8/30/2011	1:24:38 PM	H2 valve opened
8/30/2011	1:24:38 PM	Helium MFC set to  0.000000
8/30/2011	1:24:38 PM	H2 MFC set to  500.000000
8/30/2011	1:24:38 PM	BCl3 MFC set to  0.000000
8/30/2011	1:24:38 PM	PHl3 MFC set to  0.000000
8/30/2011	1:24:38 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:24:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:24:38 PM	Tube furnace set to 0
8/30/2011	1:25:40 PM	Helium valve closed
8/30/2011	1:25:40 PM	BCl3 valve closed
8/30/2011	1:25:40 PM	PH3 valve closed
8/30/2011	1:25:40 PM	SiCl4 pre valve closed
8/30/2011	1:25:40 PM	SiCl4 post valve closed
8/30/2011	1:25:40 PM	Main Vac valve closed
8/30/2011	1:25:40 PM	Bypass valve closed
8/30/2011	1:25:40 PM	H2 valve opened
8/30/2011	1:25:40 PM	Bubbler valve opened
8/30/2011	1:25:40 PM	Helium MFC set to  0.000000
8/30/2011	1:25:40 PM	H2 MFC set to  500.000000
8/30/2011	1:25:40 PM	BCl3 MFC set to  0.000000
8/30/2011	1:25:40 PM	PHl3 MFC set to  0.000000
8/30/2011	1:25:40 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:25:40 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:25:40 PM	Tube furnace set to 0
8/30/2011	1:25:41 PM	Helium valve closed
8/30/2011	1:25:41 PM	BCl3 valve closed
8/30/2011	1:25:41 PM	PH3 valve closed
8/30/2011	1:25:41 PM	SiCl4 pre valve closed
8/30/2011	1:25:41 PM	SiCl4 post valve closed
8/30/2011	1:25:41 PM	Main Vac valve closed
8/30/2011	1:25:41 PM	Bypass valve closed
8/30/2011	1:25:41 PM	H2 valve opened
8/30/2011	1:25:41 PM	Bubbler valve opened
8/30/2011	1:25:41 PM	Helium MFC set to  0.000000
8/30/2011	1:25:41 PM	H2 MFC set to  500.000000
8/30/2011	1:25:41 PM	BCl3 MFC set to  0.000000
8/30/2011	1:25:41 PM	PHl3 MFC set to  0.000000
8/30/2011	1:25:41 PM	SiCl4 MFC set to  0.000000
8/30/2011	1:25:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:25:41 PM	Tube furnace set to 1000
8/30/2011	1:45:41 PM	Helium valve closed
8/30/2011	1:45:41 PM	PH3 valve closed
8/30/2011	1:45:41 PM	Main Vac valve closed
8/30/2011	1:45:41 PM	Bypass valve closed
8/30/2011	1:45:41 PM	H2 valve opened
8/30/2011	1:45:41 PM	BCl3 valve opened
8/30/2011	1:45:41 PM	SiCl4 pre valve opened
8/30/2011	1:45:41 PM	SiCl4 post valve opened
8/30/2011	1:45:41 PM	Bubbler valve opened
8/30/2011	1:45:41 PM	Helium MFC set to  0.000000
8/30/2011	1:45:41 PM	H2 MFC set to  500.000000
8/30/2011	1:45:41 PM	BCl3 MFC set to  2.500000
8/30/2011	1:45:41 PM	PHl3 MFC set to  0.000000
8/30/2011	1:45:41 PM	SiCl4 MFC set to  50.000000
8/30/2011	1:45:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	1:45:42 PM	Tube furnace set to 1000
8/30/2011	2:05:42 PM	Helium valve closed
8/30/2011	2:05:42 PM	BCl3 valve closed
8/30/2011	2:05:42 PM	PH3 valve closed
8/30/2011	2:05:42 PM	SiCl4 pre valve closed
8/30/2011	2:05:42 PM	SiCl4 post valve closed
8/30/2011	2:05:42 PM	Main Vac valve closed
8/30/2011	2:05:42 PM	Bypass valve closed
8/30/2011	2:05:42 PM	H2 valve opened
8/30/2011	2:05:42 PM	Bubbler valve opened
8/30/2011	2:05:42 PM	Helium MFC set to  0.000000
8/30/2011	2:05:42 PM	H2 MFC set to  500.000000
8/30/2011	2:05:42 PM	BCl3 MFC set to  0.000000
8/30/2011	2:05:42 PM	PHl3 MFC set to  0.000000
8/30/2011	2:05:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:05:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:05:42 PM	Tube furnace set to 750
8/30/2011	2:10:42 PM	H2 valve closed
8/30/2011	2:10:42 PM	BCl3 valve closed
8/30/2011	2:10:42 PM	PH3 valve closed
8/30/2011	2:10:42 PM	SiCl4 pre valve closed
8/30/2011	2:10:42 PM	SiCl4 post valve closed
8/30/2011	2:10:42 PM	Main Vac valve closed
8/30/2011	2:10:42 PM	Bypass valve closed
8/30/2011	2:10:42 PM	Helium valve opened
8/30/2011	2:10:42 PM	Bubbler valve opened
8/30/2011	2:10:42 PM	Helium MFC set to  500.000000
8/30/2011	2:10:42 PM	H2 MFC set to  0.000000
8/30/2011	2:10:42 PM	BCl3 MFC set to  0.000000
8/30/2011	2:10:42 PM	PHl3 MFC set to  0.000000
8/30/2011	2:10:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:10:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:10:42 PM	Tube furnace set to 0
8/30/2011	2:30:42 PM	Helium valve closed
8/30/2011	2:30:42 PM	H2 valve closed
8/30/2011	2:30:42 PM	BCl3 valve closed
8/30/2011	2:30:42 PM	PH3 valve closed
8/30/2011	2:30:42 PM	SiCl4 pre valve closed
8/30/2011	2:30:42 PM	SiCl4 post valve closed
8/30/2011	2:30:42 PM	Main Vac valve closed
8/30/2011	2:30:42 PM	Bypass valve closed
8/30/2011	2:30:42 PM	Bubbler valve closed
8/30/2011	2:30:42 PM	Helium MFC set to  0.000000
8/30/2011	2:30:42 PM	H2 MFC set to  0.000000
8/30/2011	2:30:42 PM	BCl3 MFC set to  0.000000
8/30/2011	2:30:42 PM	PHl3 MFC set to  0.000000
8/30/2011	2:30:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:30:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:30:42 PM	Tube furnace set to 0
8/30/2011	2:30:43 PM	Run finished at 2:30 PM
8/30/2011	2:38:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	2:38:16 PM	Recipe started at 2:38 PM
8/30/2011	2:38:16 PM	Helium valve closed
8/30/2011	2:38:16 PM	H2 valve closed
8/30/2011	2:38:16 PM	BCl3 valve closed
8/30/2011	2:38:16 PM	PH3 valve closed
8/30/2011	2:38:16 PM	SiCl4 pre valve closed
8/30/2011	2:38:16 PM	SiCl4 post valve closed
8/30/2011	2:38:16 PM	Main Vac valve closed
8/30/2011	2:38:16 PM	Bubbler valve closed
8/30/2011	2:38:16 PM	Bypass valve opened
8/30/2011	2:38:16 PM	Helium MFC set to  0.000000
8/30/2011	2:38:16 PM	H2 MFC set to  0.000000
8/30/2011	2:38:16 PM	BCl3 MFC set to  0.000000
8/30/2011	2:38:16 PM	PHl3 MFC set to  0.000000
8/30/2011	2:38:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:38:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:38:16 PM	Tube furnace set to 0
8/30/2011	2:39:24 PM	Helium valve closed
8/30/2011	2:39:24 PM	H2 valve closed
8/30/2011	2:39:24 PM	BCl3 valve closed
8/30/2011	2:39:24 PM	PH3 valve closed
8/30/2011	2:39:24 PM	SiCl4 pre valve closed
8/30/2011	2:39:24 PM	SiCl4 post valve closed
8/30/2011	2:39:24 PM	Main Vac valve closed
8/30/2011	2:39:24 PM	Bubbler valve closed
8/30/2011	2:39:24 PM	Bypass valve opened
8/30/2011	2:39:24 PM	Helium MFC set to  0.000000
8/30/2011	2:39:24 PM	H2 MFC set to  0.000000
8/30/2011	2:39:24 PM	BCl3 MFC set to  0.000000
8/30/2011	2:39:24 PM	PHl3 MFC set to  0.000000
8/30/2011	2:39:24 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:39:24 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:39:24 PM	Tube furnace set to 0
8/30/2011	2:40:24 PM	Helium valve closed
8/30/2011	2:40:24 PM	H2 valve closed
8/30/2011	2:40:24 PM	BCl3 valve closed
8/30/2011	2:40:24 PM	PH3 valve closed
8/30/2011	2:40:24 PM	SiCl4 pre valve closed
8/30/2011	2:40:24 PM	SiCl4 post valve closed
8/30/2011	2:40:24 PM	Bypass valve closed
8/30/2011	2:40:24 PM	Bubbler valve closed
8/30/2011	2:40:24 PM	Main Vac valve opened
8/30/2011	2:40:24 PM	Helium MFC set to  0.000000
8/30/2011	2:40:24 PM	H2 MFC set to  0.000000
8/30/2011	2:40:24 PM	BCl3 MFC set to  0.000000
8/30/2011	2:40:24 PM	PHl3 MFC set to  0.000000
8/30/2011	2:40:24 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:40:24 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:40:24 PM	Tube furnace set to 0
8/30/2011	2:40:25 PM	Run finished at 2:40 PM
8/30/2011	2:40:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	2:40:46 PM	Recipe started at 2:40 PM
8/30/2011	2:40:46 PM	Helium valve closed
8/30/2011	2:40:46 PM	H2 valve closed
8/30/2011	2:40:46 PM	BCl3 valve closed
8/30/2011	2:40:46 PM	PH3 valve closed
8/30/2011	2:40:46 PM	SiCl4 pre valve closed
8/30/2011	2:40:46 PM	SiCl4 post valve closed
8/30/2011	2:40:46 PM	Bypass valve closed
8/30/2011	2:40:46 PM	Bubbler valve closed
8/30/2011	2:40:46 PM	Main Vac valve opened
8/30/2011	2:40:46 PM	Helium MFC set to  0.000000
8/30/2011	2:40:46 PM	H2 MFC set to  0.000000
8/30/2011	2:40:46 PM	BCl3 MFC set to  0.000000
8/30/2011	2:40:46 PM	PHl3 MFC set to  0.000000
8/30/2011	2:40:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:40:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:40:46 PM	Tube furnace set to 150
8/30/2011	2:41:16 PM	H2 valve closed
8/30/2011	2:41:16 PM	BCl3 valve closed
8/30/2011	2:41:16 PM	PH3 valve closed
8/30/2011	2:41:16 PM	SiCl4 pre valve closed
8/30/2011	2:41:16 PM	SiCl4 post valve closed
8/30/2011	2:41:16 PM	Bypass valve closed
8/30/2011	2:41:16 PM	Bubbler valve closed
8/30/2011	2:41:16 PM	Helium valve opened
8/30/2011	2:41:16 PM	Main Vac valve opened
8/30/2011	2:41:16 PM	Helium MFC set to  20.000000
8/30/2011	2:41:16 PM	H2 MFC set to  0.000000
8/30/2011	2:41:16 PM	BCl3 MFC set to  0.000000
8/30/2011	2:41:16 PM	PHl3 MFC set to  0.000000
8/30/2011	2:41:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:41:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:41:16 PM	Tube furnace set to 150
8/30/2011	2:41:46 PM	Helium valve closed
8/30/2011	2:41:46 PM	H2 valve closed
8/30/2011	2:41:46 PM	BCl3 valve closed
8/30/2011	2:41:46 PM	PH3 valve closed
8/30/2011	2:41:46 PM	SiCl4 pre valve closed
8/30/2011	2:41:46 PM	SiCl4 post valve closed
8/30/2011	2:41:46 PM	Bypass valve closed
8/30/2011	2:41:46 PM	Bubbler valve closed
8/30/2011	2:41:46 PM	Main Vac valve opened
8/30/2011	2:41:46 PM	Helium MFC set to  0.000000
8/30/2011	2:41:46 PM	H2 MFC set to  0.000000
8/30/2011	2:41:46 PM	BCl3 MFC set to  0.000000
8/30/2011	2:41:46 PM	PHl3 MFC set to  0.000000
8/30/2011	2:41:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:41:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:41:46 PM	Tube furnace set to 150
8/30/2011	2:42:16 PM	H2 valve closed
8/30/2011	2:42:16 PM	BCl3 valve closed
8/30/2011	2:42:16 PM	PH3 valve closed
8/30/2011	2:42:16 PM	SiCl4 pre valve closed
8/30/2011	2:42:16 PM	SiCl4 post valve closed
8/30/2011	2:42:16 PM	Bypass valve closed
8/30/2011	2:42:16 PM	Bubbler valve closed
8/30/2011	2:42:16 PM	Helium valve opened
8/30/2011	2:42:16 PM	Main Vac valve opened
8/30/2011	2:42:16 PM	Helium MFC set to  20.000000
8/30/2011	2:42:16 PM	H2 MFC set to  0.000000
8/30/2011	2:42:16 PM	BCl3 MFC set to  0.000000
8/30/2011	2:42:16 PM	PHl3 MFC set to  0.000000
8/30/2011	2:42:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:42:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:42:17 PM	Tube furnace set to 150
8/30/2011	2:42:47 PM	Helium valve closed
8/30/2011	2:42:47 PM	H2 valve closed
8/30/2011	2:42:47 PM	BCl3 valve closed
8/30/2011	2:42:47 PM	PH3 valve closed
8/30/2011	2:42:47 PM	SiCl4 pre valve closed
8/30/2011	2:42:47 PM	SiCl4 post valve closed
8/30/2011	2:42:47 PM	Bypass valve closed
8/30/2011	2:42:47 PM	Bubbler valve closed
8/30/2011	2:42:47 PM	Main Vac valve opened
8/30/2011	2:42:47 PM	Helium MFC set to  0.000000
8/30/2011	2:42:47 PM	H2 MFC set to  0.000000
8/30/2011	2:42:47 PM	BCl3 MFC set to  0.000000
8/30/2011	2:42:47 PM	PHl3 MFC set to  0.000000
8/30/2011	2:42:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:42:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:42:47 PM	Tube furnace set to 150
8/30/2011	2:43:17 PM	H2 valve closed
8/30/2011	2:43:17 PM	BCl3 valve closed
8/30/2011	2:43:17 PM	PH3 valve closed
8/30/2011	2:43:17 PM	SiCl4 pre valve closed
8/30/2011	2:43:17 PM	SiCl4 post valve closed
8/30/2011	2:43:17 PM	Bypass valve closed
8/30/2011	2:43:17 PM	Bubbler valve closed
8/30/2011	2:43:17 PM	Helium valve opened
8/30/2011	2:43:17 PM	Main Vac valve opened
8/30/2011	2:43:17 PM	Helium MFC set to  20.000000
8/30/2011	2:43:17 PM	H2 MFC set to  0.000000
8/30/2011	2:43:17 PM	BCl3 MFC set to  0.000000
8/30/2011	2:43:17 PM	PHl3 MFC set to  0.000000
8/30/2011	2:43:17 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:43:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:43:17 PM	Tube furnace set to 150
8/30/2011	2:43:47 PM	Helium valve closed
8/30/2011	2:43:47 PM	H2 valve closed
8/30/2011	2:43:47 PM	BCl3 valve closed
8/30/2011	2:43:47 PM	PH3 valve closed
8/30/2011	2:43:47 PM	SiCl4 pre valve closed
8/30/2011	2:43:47 PM	SiCl4 post valve closed
8/30/2011	2:43:47 PM	Bypass valve closed
8/30/2011	2:43:47 PM	Bubbler valve closed
8/30/2011	2:43:47 PM	Main Vac valve opened
8/30/2011	2:43:47 PM	Helium MFC set to  0.000000
8/30/2011	2:43:47 PM	H2 MFC set to  0.000000
8/30/2011	2:43:47 PM	BCl3 MFC set to  0.000000
8/30/2011	2:43:47 PM	PHl3 MFC set to  0.000000
8/30/2011	2:43:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:43:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:43:47 PM	Tube furnace set to 150
8/30/2011	2:44:17 PM	H2 valve closed
8/30/2011	2:44:17 PM	BCl3 valve closed
8/30/2011	2:44:17 PM	PH3 valve closed
8/30/2011	2:44:17 PM	SiCl4 pre valve closed
8/30/2011	2:44:17 PM	SiCl4 post valve closed
8/30/2011	2:44:17 PM	Bypass valve closed
8/30/2011	2:44:17 PM	Bubbler valve closed
8/30/2011	2:44:17 PM	Helium valve opened
8/30/2011	2:44:17 PM	Main Vac valve opened
8/30/2011	2:44:17 PM	Helium MFC set to  20.000000
8/30/2011	2:44:17 PM	H2 MFC set to  0.000000
8/30/2011	2:44:17 PM	BCl3 MFC set to  0.000000
8/30/2011	2:44:17 PM	PHl3 MFC set to  0.000000
8/30/2011	2:44:17 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:44:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:44:17 PM	Tube furnace set to 150
8/30/2011	2:44:47 PM	Helium valve closed
8/30/2011	2:44:47 PM	H2 valve closed
8/30/2011	2:44:47 PM	BCl3 valve closed
8/30/2011	2:44:47 PM	PH3 valve closed
8/30/2011	2:44:47 PM	SiCl4 pre valve closed
8/30/2011	2:44:47 PM	SiCl4 post valve closed
8/30/2011	2:44:47 PM	Bypass valve closed
8/30/2011	2:44:47 PM	Bubbler valve closed
8/30/2011	2:44:47 PM	Main Vac valve opened
8/30/2011	2:44:47 PM	Helium MFC set to  0.000000
8/30/2011	2:44:47 PM	H2 MFC set to  0.000000
8/30/2011	2:44:47 PM	BCl3 MFC set to  0.000000
8/30/2011	2:44:47 PM	PHl3 MFC set to  0.000000
8/30/2011	2:44:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:44:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:44:48 PM	Tube furnace set to 150
8/30/2011	2:45:18 PM	H2 valve closed
8/30/2011	2:45:18 PM	BCl3 valve closed
8/30/2011	2:45:18 PM	PH3 valve closed
8/30/2011	2:45:18 PM	SiCl4 pre valve closed
8/30/2011	2:45:18 PM	SiCl4 post valve closed
8/30/2011	2:45:18 PM	Bypass valve closed
8/30/2011	2:45:18 PM	Bubbler valve closed
8/30/2011	2:45:18 PM	Helium valve opened
8/30/2011	2:45:18 PM	Main Vac valve opened
8/30/2011	2:45:18 PM	Helium MFC set to  20.000000
8/30/2011	2:45:18 PM	H2 MFC set to  0.000000
8/30/2011	2:45:18 PM	BCl3 MFC set to  0.000000
8/30/2011	2:45:18 PM	PHl3 MFC set to  0.000000
8/30/2011	2:45:18 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:45:18 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:45:18 PM	Tube furnace set to 150
8/30/2011	2:45:48 PM	Helium valve closed
8/30/2011	2:45:48 PM	H2 valve closed
8/30/2011	2:45:48 PM	BCl3 valve closed
8/30/2011	2:45:48 PM	PH3 valve closed
8/30/2011	2:45:48 PM	SiCl4 pre valve closed
8/30/2011	2:45:48 PM	SiCl4 post valve closed
8/30/2011	2:45:48 PM	Bypass valve closed
8/30/2011	2:45:48 PM	Bubbler valve closed
8/30/2011	2:45:48 PM	Main Vac valve opened
8/30/2011	2:45:48 PM	Helium MFC set to  0.000000
8/30/2011	2:45:48 PM	H2 MFC set to  0.000000
8/30/2011	2:45:48 PM	BCl3 MFC set to  0.000000
8/30/2011	2:45:48 PM	PHl3 MFC set to  0.000000
8/30/2011	2:45:48 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:45:48 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:45:48 PM	Tube furnace set to 150
8/30/2011	2:46:18 PM	H2 valve closed
8/30/2011	2:46:18 PM	BCl3 valve closed
8/30/2011	2:46:18 PM	PH3 valve closed
8/30/2011	2:46:18 PM	SiCl4 pre valve closed
8/30/2011	2:46:18 PM	SiCl4 post valve closed
8/30/2011	2:46:18 PM	Bypass valve closed
8/30/2011	2:46:18 PM	Bubbler valve closed
8/30/2011	2:46:18 PM	Helium valve opened
8/30/2011	2:46:18 PM	Main Vac valve opened
8/30/2011	2:46:18 PM	Helium MFC set to  20.000000
8/30/2011	2:46:18 PM	H2 MFC set to  0.000000
8/30/2011	2:46:18 PM	BCl3 MFC set to  0.000000
8/30/2011	2:46:18 PM	PHl3 MFC set to  0.000000
8/30/2011	2:46:18 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:46:18 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:46:18 PM	Tube furnace set to 150
8/30/2011	2:46:48 PM	Helium valve closed
8/30/2011	2:46:48 PM	H2 valve closed
8/30/2011	2:46:48 PM	BCl3 valve closed
8/30/2011	2:46:48 PM	PH3 valve closed
8/30/2011	2:46:48 PM	SiCl4 pre valve closed
8/30/2011	2:46:48 PM	SiCl4 post valve closed
8/30/2011	2:46:48 PM	Bypass valve closed
8/30/2011	2:46:48 PM	Bubbler valve closed
8/30/2011	2:46:48 PM	Main Vac valve opened
8/30/2011	2:46:48 PM	Helium MFC set to  0.000000
8/30/2011	2:46:48 PM	H2 MFC set to  0.000000
8/30/2011	2:46:48 PM	BCl3 MFC set to  0.000000
8/30/2011	2:46:48 PM	PHl3 MFC set to  0.000000
8/30/2011	2:46:48 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:46:48 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:46:48 PM	Tube furnace set to 150
8/30/2011	2:47:07 PM	Run aborted at 2:47 PM
8/30/2011	2:47:07 PM	Helium valve closed
8/30/2011	2:47:07 PM	H2 valve closed
8/30/2011	2:47:07 PM	BCl3 valve closed
8/30/2011	2:47:07 PM	PH3 valve closed
8/30/2011	2:47:07 PM	SiCl4 pre valve closed
8/30/2011	2:47:07 PM	SiCl4 post valve closed
8/30/2011	2:47:07 PM	Bypass valve closed
8/30/2011	2:47:07 PM	Main Vac valve closed
8/30/2011	2:47:07 PM	Bubbler valve closed
8/30/2011	2:47:07 PM	Helium MFC set to  0.000000
8/30/2011	2:47:07 PM	H2 MFC set to  0.000000
8/30/2011	2:47:07 PM	BCl3 MFC set to  0.000000
8/30/2011	2:47:07 PM	PHl3 MFC set to  0.000000
8/30/2011	2:47:07 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:47:07 PM	Tube furnace set to 0
8/30/2011	2:47:08 PM	Main Vac valve opened
8/30/2011	2:47:24 PM	Recipe started at 2:47 PM
8/30/2011	2:47:24 PM	Helium valve closed
8/30/2011	2:47:24 PM	H2 valve closed
8/30/2011	2:47:24 PM	BCl3 valve closed
8/30/2011	2:47:24 PM	PH3 valve closed
8/30/2011	2:47:24 PM	SiCl4 pre valve closed
8/30/2011	2:47:24 PM	SiCl4 post valve closed
8/30/2011	2:47:24 PM	Bypass valve closed
8/30/2011	2:47:24 PM	Bubbler valve closed
8/30/2011	2:47:24 PM	Main Vac valve opened
8/30/2011	2:47:24 PM	Helium MFC set to  0.000000
8/30/2011	2:47:24 PM	H2 MFC set to  0.000000
8/30/2011	2:47:24 PM	BCl3 MFC set to  0.000000
8/30/2011	2:47:24 PM	PHl3 MFC set to  0.000000
8/30/2011	2:47:24 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:47:24 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:47:24 PM	Tube furnace set to 150
8/30/2011	2:47:54 PM	H2 valve closed
8/30/2011	2:47:54 PM	BCl3 valve closed
8/30/2011	2:47:54 PM	PH3 valve closed
8/30/2011	2:47:54 PM	SiCl4 pre valve closed
8/30/2011	2:47:54 PM	SiCl4 post valve closed
8/30/2011	2:47:54 PM	Bypass valve closed
8/30/2011	2:47:54 PM	Bubbler valve closed
8/30/2011	2:47:54 PM	Helium valve opened
8/30/2011	2:47:54 PM	Main Vac valve opened
8/30/2011	2:47:54 PM	Helium MFC set to  20.000000
8/30/2011	2:47:54 PM	H2 MFC set to  0.000000
8/30/2011	2:47:54 PM	BCl3 MFC set to  0.000000
8/30/2011	2:47:54 PM	PHl3 MFC set to  0.000000
8/30/2011	2:47:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:47:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:47:54 PM	Tube furnace set to 150
8/30/2011	2:48:24 PM	Helium valve closed
8/30/2011	2:48:24 PM	H2 valve closed
8/30/2011	2:48:24 PM	BCl3 valve closed
8/30/2011	2:48:24 PM	PH3 valve closed
8/30/2011	2:48:24 PM	SiCl4 pre valve closed
8/30/2011	2:48:24 PM	SiCl4 post valve closed
8/30/2011	2:48:24 PM	Bypass valve closed
8/30/2011	2:48:24 PM	Bubbler valve closed
8/30/2011	2:48:24 PM	Main Vac valve opened
8/30/2011	2:48:24 PM	Helium MFC set to  0.000000
8/30/2011	2:48:24 PM	H2 MFC set to  0.000000
8/30/2011	2:48:24 PM	BCl3 MFC set to  0.000000
8/30/2011	2:48:24 PM	PHl3 MFC set to  0.000000
8/30/2011	2:48:24 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:48:24 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:48:24 PM	Tube furnace set to 150
8/30/2011	2:48:54 PM	H2 valve closed
8/30/2011	2:48:54 PM	BCl3 valve closed
8/30/2011	2:48:54 PM	PH3 valve closed
8/30/2011	2:48:54 PM	SiCl4 pre valve closed
8/30/2011	2:48:54 PM	SiCl4 post valve closed
8/30/2011	2:48:54 PM	Bypass valve closed
8/30/2011	2:48:54 PM	Bubbler valve closed
8/30/2011	2:48:54 PM	Helium valve opened
8/30/2011	2:48:54 PM	Main Vac valve opened
8/30/2011	2:48:54 PM	Helium MFC set to  20.000000
8/30/2011	2:48:54 PM	H2 MFC set to  0.000000
8/30/2011	2:48:54 PM	BCl3 MFC set to  0.000000
8/30/2011	2:48:54 PM	PHl3 MFC set to  0.000000
8/30/2011	2:48:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:48:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:48:54 PM	Tube furnace set to 150
8/30/2011	2:49:24 PM	Helium valve closed
8/30/2011	2:49:24 PM	H2 valve closed
8/30/2011	2:49:24 PM	BCl3 valve closed
8/30/2011	2:49:24 PM	PH3 valve closed
8/30/2011	2:49:24 PM	SiCl4 pre valve closed
8/30/2011	2:49:24 PM	SiCl4 post valve closed
8/30/2011	2:49:24 PM	Bypass valve closed
8/30/2011	2:49:24 PM	Bubbler valve closed
8/30/2011	2:49:24 PM	Main Vac valve opened
8/30/2011	2:49:24 PM	Helium MFC set to  0.000000
8/30/2011	2:49:24 PM	H2 MFC set to  0.000000
8/30/2011	2:49:24 PM	BCl3 MFC set to  0.000000
8/30/2011	2:49:24 PM	PHl3 MFC set to  0.000000
8/30/2011	2:49:24 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:49:24 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:49:25 PM	Tube furnace set to 150
8/30/2011	2:49:55 PM	H2 valve closed
8/30/2011	2:49:55 PM	BCl3 valve closed
8/30/2011	2:49:55 PM	PH3 valve closed
8/30/2011	2:49:55 PM	SiCl4 pre valve closed
8/30/2011	2:49:55 PM	SiCl4 post valve closed
8/30/2011	2:49:55 PM	Bypass valve closed
8/30/2011	2:49:55 PM	Bubbler valve closed
8/30/2011	2:49:55 PM	Helium valve opened
8/30/2011	2:49:55 PM	Main Vac valve opened
8/30/2011	2:49:55 PM	Helium MFC set to  20.000000
8/30/2011	2:49:55 PM	H2 MFC set to  0.000000
8/30/2011	2:49:55 PM	BCl3 MFC set to  0.000000
8/30/2011	2:49:55 PM	PHl3 MFC set to  0.000000
8/30/2011	2:49:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:49:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:49:55 PM	Tube furnace set to 150
8/30/2011	2:50:25 PM	Helium valve closed
8/30/2011	2:50:25 PM	H2 valve closed
8/30/2011	2:50:25 PM	BCl3 valve closed
8/30/2011	2:50:25 PM	PH3 valve closed
8/30/2011	2:50:25 PM	SiCl4 pre valve closed
8/30/2011	2:50:25 PM	SiCl4 post valve closed
8/30/2011	2:50:25 PM	Bypass valve closed
8/30/2011	2:50:25 PM	Bubbler valve closed
8/30/2011	2:50:25 PM	Main Vac valve opened
8/30/2011	2:50:25 PM	Helium MFC set to  0.000000
8/30/2011	2:50:25 PM	H2 MFC set to  0.000000
8/30/2011	2:50:25 PM	BCl3 MFC set to  0.000000
8/30/2011	2:50:25 PM	PHl3 MFC set to  0.000000
8/30/2011	2:50:25 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:50:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:50:25 PM	Tube furnace set to 150
8/30/2011	2:50:55 PM	H2 valve closed
8/30/2011	2:50:55 PM	BCl3 valve closed
8/30/2011	2:50:55 PM	PH3 valve closed
8/30/2011	2:50:55 PM	SiCl4 pre valve closed
8/30/2011	2:50:55 PM	SiCl4 post valve closed
8/30/2011	2:50:55 PM	Bypass valve closed
8/30/2011	2:50:55 PM	Bubbler valve closed
8/30/2011	2:50:55 PM	Helium valve opened
8/30/2011	2:50:55 PM	Main Vac valve opened
8/30/2011	2:50:55 PM	Helium MFC set to  20.000000
8/30/2011	2:50:55 PM	H2 MFC set to  0.000000
8/30/2011	2:50:55 PM	BCl3 MFC set to  0.000000
8/30/2011	2:50:55 PM	PHl3 MFC set to  0.000000
8/30/2011	2:50:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:50:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:50:55 PM	Tube furnace set to 150
8/30/2011	2:51:25 PM	Helium valve closed
8/30/2011	2:51:25 PM	H2 valve closed
8/30/2011	2:51:25 PM	BCl3 valve closed
8/30/2011	2:51:25 PM	PH3 valve closed
8/30/2011	2:51:25 PM	SiCl4 pre valve closed
8/30/2011	2:51:25 PM	SiCl4 post valve closed
8/30/2011	2:51:25 PM	Bypass valve closed
8/30/2011	2:51:25 PM	Bubbler valve closed
8/30/2011	2:51:25 PM	Main Vac valve opened
8/30/2011	2:51:25 PM	Helium MFC set to  0.000000
8/30/2011	2:51:25 PM	H2 MFC set to  0.000000
8/30/2011	2:51:25 PM	BCl3 MFC set to  0.000000
8/30/2011	2:51:25 PM	PHl3 MFC set to  0.000000
8/30/2011	2:51:25 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:51:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:51:25 PM	Tube furnace set to 150
8/30/2011	2:51:55 PM	H2 valve closed
8/30/2011	2:51:55 PM	BCl3 valve closed
8/30/2011	2:51:55 PM	PH3 valve closed
8/30/2011	2:51:55 PM	SiCl4 pre valve closed
8/30/2011	2:51:55 PM	SiCl4 post valve closed
8/30/2011	2:51:55 PM	Bypass valve closed
8/30/2011	2:51:55 PM	Bubbler valve closed
8/30/2011	2:51:55 PM	Helium valve opened
8/30/2011	2:51:55 PM	Main Vac valve opened
8/30/2011	2:51:55 PM	Helium MFC set to  20.000000
8/30/2011	2:51:55 PM	H2 MFC set to  0.000000
8/30/2011	2:51:55 PM	BCl3 MFC set to  0.000000
8/30/2011	2:51:55 PM	PHl3 MFC set to  0.000000
8/30/2011	2:51:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:51:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:51:55 PM	Tube furnace set to 150
8/30/2011	2:52:26 PM	Helium valve closed
8/30/2011	2:52:26 PM	H2 valve closed
8/30/2011	2:52:26 PM	BCl3 valve closed
8/30/2011	2:52:26 PM	PH3 valve closed
8/30/2011	2:52:26 PM	SiCl4 pre valve closed
8/30/2011	2:52:26 PM	SiCl4 post valve closed
8/30/2011	2:52:26 PM	Bypass valve closed
8/30/2011	2:52:26 PM	Bubbler valve closed
8/30/2011	2:52:26 PM	Main Vac valve opened
8/30/2011	2:52:26 PM	Helium MFC set to  0.000000
8/30/2011	2:52:26 PM	H2 MFC set to  0.000000
8/30/2011	2:52:26 PM	BCl3 MFC set to  0.000000
8/30/2011	2:52:26 PM	PHl3 MFC set to  0.000000
8/30/2011	2:52:26 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:52:26 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:52:26 PM	Tube furnace set to 150
8/30/2011	2:52:56 PM	H2 valve closed
8/30/2011	2:52:56 PM	BCl3 valve closed
8/30/2011	2:52:56 PM	PH3 valve closed
8/30/2011	2:52:56 PM	SiCl4 pre valve closed
8/30/2011	2:52:56 PM	SiCl4 post valve closed
8/30/2011	2:52:56 PM	Bypass valve closed
8/30/2011	2:52:56 PM	Bubbler valve closed
8/30/2011	2:52:56 PM	Helium valve opened
8/30/2011	2:52:56 PM	Main Vac valve opened
8/30/2011	2:52:56 PM	Helium MFC set to  20.000000
8/30/2011	2:52:56 PM	H2 MFC set to  0.000000
8/30/2011	2:52:56 PM	BCl3 MFC set to  0.000000
8/30/2011	2:52:56 PM	PHl3 MFC set to  0.000000
8/30/2011	2:52:56 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:52:56 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:52:56 PM	Tube furnace set to 150
8/30/2011	2:53:26 PM	Helium valve closed
8/30/2011	2:53:26 PM	H2 valve closed
8/30/2011	2:53:26 PM	BCl3 valve closed
8/30/2011	2:53:26 PM	PH3 valve closed
8/30/2011	2:53:26 PM	SiCl4 pre valve closed
8/30/2011	2:53:26 PM	SiCl4 post valve closed
8/30/2011	2:53:26 PM	Bypass valve closed
8/30/2011	2:53:26 PM	Bubbler valve closed
8/30/2011	2:53:26 PM	Main Vac valve opened
8/30/2011	2:53:26 PM	Helium MFC set to  0.000000
8/30/2011	2:53:26 PM	H2 MFC set to  0.000000
8/30/2011	2:53:26 PM	BCl3 MFC set to  0.000000
8/30/2011	2:53:26 PM	PHl3 MFC set to  0.000000
8/30/2011	2:53:26 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:53:26 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:53:26 PM	Tube furnace set to 150
8/30/2011	2:53:56 PM	H2 valve closed
8/30/2011	2:53:56 PM	BCl3 valve closed
8/30/2011	2:53:56 PM	PH3 valve closed
8/30/2011	2:53:56 PM	SiCl4 pre valve closed
8/30/2011	2:53:56 PM	SiCl4 post valve closed
8/30/2011	2:53:56 PM	Bypass valve closed
8/30/2011	2:53:56 PM	Bubbler valve closed
8/30/2011	2:53:56 PM	Helium valve opened
8/30/2011	2:53:56 PM	Main Vac valve opened
8/30/2011	2:53:56 PM	Helium MFC set to  20.000000
8/30/2011	2:53:56 PM	H2 MFC set to  0.000000
8/30/2011	2:53:56 PM	BCl3 MFC set to  0.000000
8/30/2011	2:53:56 PM	PHl3 MFC set to  0.000000
8/30/2011	2:53:56 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:53:56 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:53:56 PM	Tube furnace set to 150
8/30/2011	2:54:26 PM	Helium valve closed
8/30/2011	2:54:26 PM	H2 valve closed
8/30/2011	2:54:26 PM	BCl3 valve closed
8/30/2011	2:54:26 PM	PH3 valve closed
8/30/2011	2:54:26 PM	SiCl4 pre valve closed
8/30/2011	2:54:26 PM	SiCl4 post valve closed
8/30/2011	2:54:26 PM	Bypass valve closed
8/30/2011	2:54:26 PM	Bubbler valve closed
8/30/2011	2:54:26 PM	Main Vac valve opened
8/30/2011	2:54:26 PM	Helium MFC set to  0.000000
8/30/2011	2:54:26 PM	H2 MFC set to  0.000000
8/30/2011	2:54:26 PM	BCl3 MFC set to  0.000000
8/30/2011	2:54:26 PM	PHl3 MFC set to  0.000000
8/30/2011	2:54:26 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:54:26 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:54:26 PM	Tube furnace set to 150
8/30/2011	2:54:56 PM	H2 valve closed
8/30/2011	2:54:56 PM	BCl3 valve closed
8/30/2011	2:54:57 PM	PH3 valve closed
8/30/2011	2:54:57 PM	SiCl4 pre valve closed
8/30/2011	2:54:57 PM	SiCl4 post valve closed
8/30/2011	2:54:57 PM	Bypass valve closed
8/30/2011	2:54:57 PM	Bubbler valve closed
8/30/2011	2:54:57 PM	Helium valve opened
8/30/2011	2:54:57 PM	Main Vac valve opened
8/30/2011	2:54:57 PM	Helium MFC set to  20.000000
8/30/2011	2:54:57 PM	H2 MFC set to  0.000000
8/30/2011	2:54:57 PM	BCl3 MFC set to  0.000000
8/30/2011	2:54:57 PM	PHl3 MFC set to  0.000000
8/30/2011	2:54:57 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:54:57 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:54:57 PM	Tube furnace set to 150
8/30/2011	2:55:27 PM	Helium valve closed
8/30/2011	2:55:27 PM	H2 valve closed
8/30/2011	2:55:27 PM	BCl3 valve closed
8/30/2011	2:55:27 PM	PH3 valve closed
8/30/2011	2:55:27 PM	SiCl4 pre valve closed
8/30/2011	2:55:27 PM	SiCl4 post valve closed
8/30/2011	2:55:27 PM	Bypass valve closed
8/30/2011	2:55:27 PM	Bubbler valve closed
8/30/2011	2:55:27 PM	Main Vac valve opened
8/30/2011	2:55:27 PM	Helium MFC set to  0.000000
8/30/2011	2:55:27 PM	H2 MFC set to  0.000000
8/30/2011	2:55:27 PM	BCl3 MFC set to  0.000000
8/30/2011	2:55:27 PM	PHl3 MFC set to  0.000000
8/30/2011	2:55:27 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:55:27 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:55:27 PM	Tube furnace set to 150
8/30/2011	2:55:57 PM	H2 valve closed
8/30/2011	2:55:57 PM	BCl3 valve closed
8/30/2011	2:55:57 PM	PH3 valve closed
8/30/2011	2:55:57 PM	SiCl4 pre valve closed
8/30/2011	2:55:57 PM	SiCl4 post valve closed
8/30/2011	2:55:57 PM	Bypass valve closed
8/30/2011	2:55:57 PM	Bubbler valve closed
8/30/2011	2:55:57 PM	Helium valve opened
8/30/2011	2:55:57 PM	Main Vac valve opened
8/30/2011	2:55:57 PM	Helium MFC set to  20.000000
8/30/2011	2:55:57 PM	H2 MFC set to  0.000000
8/30/2011	2:55:57 PM	BCl3 MFC set to  0.000000
8/30/2011	2:55:57 PM	PHl3 MFC set to  0.000000
8/30/2011	2:55:57 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:55:57 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:55:57 PM	Tube furnace set to 150
8/30/2011	2:56:27 PM	Helium valve closed
8/30/2011	2:56:27 PM	H2 valve closed
8/30/2011	2:56:27 PM	BCl3 valve closed
8/30/2011	2:56:27 PM	PH3 valve closed
8/30/2011	2:56:27 PM	SiCl4 pre valve closed
8/30/2011	2:56:27 PM	SiCl4 post valve closed
8/30/2011	2:56:27 PM	Bypass valve closed
8/30/2011	2:56:27 PM	Bubbler valve closed
8/30/2011	2:56:27 PM	Main Vac valve opened
8/30/2011	2:56:27 PM	Helium MFC set to  0.000000
8/30/2011	2:56:27 PM	H2 MFC set to  0.000000
8/30/2011	2:56:27 PM	BCl3 MFC set to  0.000000
8/30/2011	2:56:27 PM	PHl3 MFC set to  0.000000
8/30/2011	2:56:27 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:56:27 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:56:27 PM	Tube furnace set to 150
8/30/2011	2:56:57 PM	H2 valve closed
8/30/2011	2:56:57 PM	BCl3 valve closed
8/30/2011	2:56:57 PM	PH3 valve closed
8/30/2011	2:56:57 PM	SiCl4 pre valve closed
8/30/2011	2:56:57 PM	SiCl4 post valve closed
8/30/2011	2:56:57 PM	Bypass valve closed
8/30/2011	2:56:57 PM	Bubbler valve closed
8/30/2011	2:56:57 PM	Helium valve opened
8/30/2011	2:56:57 PM	Main Vac valve opened
8/30/2011	2:56:57 PM	Helium MFC set to  20.000000
8/30/2011	2:56:57 PM	H2 MFC set to  0.000000
8/30/2011	2:56:57 PM	BCl3 MFC set to  0.000000
8/30/2011	2:56:57 PM	PHl3 MFC set to  0.000000
8/30/2011	2:56:57 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:56:57 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:56:57 PM	Tube furnace set to 150
8/30/2011	2:57:27 PM	Helium valve closed
8/30/2011	2:57:27 PM	H2 valve closed
8/30/2011	2:57:27 PM	BCl3 valve closed
8/30/2011	2:57:27 PM	PH3 valve closed
8/30/2011	2:57:28 PM	SiCl4 pre valve closed
8/30/2011	2:57:28 PM	SiCl4 post valve closed
8/30/2011	2:57:28 PM	Bypass valve closed
8/30/2011	2:57:28 PM	Bubbler valve closed
8/30/2011	2:57:28 PM	Main Vac valve opened
8/30/2011	2:57:28 PM	Helium MFC set to  0.000000
8/30/2011	2:57:28 PM	H2 MFC set to  0.000000
8/30/2011	2:57:28 PM	BCl3 MFC set to  0.000000
8/30/2011	2:57:28 PM	PHl3 MFC set to  0.000000
8/30/2011	2:57:28 PM	SiCl4 MFC set to  0.000000
8/30/2011	2:57:28 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	2:57:28 PM	Tube furnace set to 150
8/30/2011	2:57:29 PM	Run finished at 2:57 PM
8/30/2011	3:10:55 PM	Recipe started at 3:10 PM
8/30/2011	3:10:55 PM	Helium valve closed
8/30/2011	3:10:55 PM	H2 valve closed
8/30/2011	3:10:55 PM	BCl3 valve closed
8/30/2011	3:10:55 PM	PH3 valve closed
8/30/2011	3:10:55 PM	SiCl4 pre valve closed
8/30/2011	3:10:55 PM	SiCl4 post valve closed
8/30/2011	3:10:55 PM	Main Vac valve closed
8/30/2011	3:10:55 PM	Bypass valve closed
8/30/2011	3:10:55 PM	Bubbler valve closed
8/30/2011	3:10:55 PM	Helium MFC set to  0.000000
8/30/2011	3:10:55 PM	H2 MFC set to  0.000000
8/30/2011	3:10:55 PM	BCl3 MFC set to  0.000000
8/30/2011	3:10:55 PM	PHl3 MFC set to  0.000000
8/30/2011	3:10:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	3:10:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	3:10:55 PM	Tube furnace set to 0
8/30/2011	3:10:58 PM	Helium valve closed
8/30/2011	3:10:58 PM	BCl3 valve closed
8/30/2011	3:10:58 PM	PH3 valve closed
8/30/2011	3:10:58 PM	SiCl4 pre valve closed
8/30/2011	3:10:58 PM	SiCl4 post valve closed
8/30/2011	3:10:58 PM	Main Vac valve closed
8/30/2011	3:10:58 PM	Bypass valve closed
8/30/2011	3:10:58 PM	Bubbler valve closed
8/30/2011	3:10:58 PM	H2 valve opened
8/30/2011	3:10:58 PM	Helium MFC set to  0.000000
8/30/2011	3:10:58 PM	H2 MFC set to  500.000000
8/30/2011	3:10:58 PM	BCl3 MFC set to  0.000000
8/30/2011	3:10:58 PM	PHl3 MFC set to  0.000000
8/30/2011	3:10:58 PM	SiCl4 MFC set to  0.000000
8/30/2011	3:10:58 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	3:10:58 PM	Tube furnace set to 0
8/30/2011	3:12:00 PM	Helium valve closed
8/30/2011	3:12:00 PM	BCl3 valve closed
8/30/2011	3:12:00 PM	PH3 valve closed
8/30/2011	3:12:00 PM	SiCl4 pre valve closed
8/30/2011	3:12:00 PM	SiCl4 post valve closed
8/30/2011	3:12:00 PM	Main Vac valve closed
8/30/2011	3:12:00 PM	Bypass valve closed
8/30/2011	3:12:00 PM	H2 valve opened
8/30/2011	3:12:00 PM	Bubbler valve opened
8/30/2011	3:12:00 PM	Helium MFC set to  0.000000
8/30/2011	3:12:00 PM	H2 MFC set to  500.000000
8/30/2011	3:12:00 PM	BCl3 MFC set to  0.000000
8/30/2011	3:12:00 PM	PHl3 MFC set to  0.000000
8/30/2011	3:12:00 PM	SiCl4 MFC set to  0.000000
8/30/2011	3:12:00 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	3:12:00 PM	Tube furnace set to 0
8/30/2011	3:12:01 PM	Helium valve closed
8/30/2011	3:12:01 PM	BCl3 valve closed
8/30/2011	3:12:01 PM	PH3 valve closed
8/30/2011	3:12:01 PM	SiCl4 pre valve closed
8/30/2011	3:12:01 PM	SiCl4 post valve closed
8/30/2011	3:12:01 PM	Main Vac valve closed
8/30/2011	3:12:01 PM	Bypass valve closed
8/30/2011	3:12:01 PM	H2 valve opened
8/30/2011	3:12:01 PM	Bubbler valve opened
8/30/2011	3:12:01 PM	Helium MFC set to  0.000000
8/30/2011	3:12:01 PM	H2 MFC set to  500.000000
8/30/2011	3:12:01 PM	BCl3 MFC set to  0.000000
8/30/2011	3:12:01 PM	PHl3 MFC set to  0.000000
8/30/2011	3:12:01 PM	SiCl4 MFC set to  0.000000
8/30/2011	3:12:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	3:12:01 PM	Tube furnace set to 1000
8/30/2011	3:32:01 PM	Helium valve closed
8/30/2011	3:32:01 PM	PH3 valve closed
8/30/2011	3:32:01 PM	Main Vac valve closed
8/30/2011	3:32:01 PM	Bypass valve closed
8/30/2011	3:32:01 PM	H2 valve opened
8/30/2011	3:32:01 PM	BCl3 valve opened
8/30/2011	3:32:01 PM	SiCl4 pre valve opened
8/30/2011	3:32:01 PM	SiCl4 post valve opened
8/30/2011	3:32:01 PM	Bubbler valve opened
8/30/2011	3:32:01 PM	Helium MFC set to  0.000000
8/30/2011	3:32:01 PM	H2 MFC set to  500.000000
8/30/2011	3:32:01 PM	BCl3 MFC set to  2.500000
8/30/2011	3:32:01 PM	PHl3 MFC set to  0.000000
8/30/2011	3:32:01 PM	SiCl4 MFC set to  50.000000
8/30/2011	3:32:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	3:32:02 PM	Tube furnace set to 1000
8/30/2011	3:52:01 PM	Helium valve closed
8/30/2011	3:52:01 PM	BCl3 valve closed
8/30/2011	3:52:01 PM	PH3 valve closed
8/30/2011	3:52:01 PM	SiCl4 pre valve closed
8/30/2011	3:52:01 PM	SiCl4 post valve closed
8/30/2011	3:52:01 PM	Main Vac valve closed
8/30/2011	3:52:01 PM	Bypass valve closed
8/30/2011	3:52:02 PM	H2 valve opened
8/30/2011	3:52:02 PM	Bubbler valve opened
8/30/2011	3:52:02 PM	Helium MFC set to  0.000000
8/30/2011	3:52:02 PM	H2 MFC set to  500.000000
8/30/2011	3:52:02 PM	BCl3 MFC set to  0.000000
8/30/2011	3:52:02 PM	PHl3 MFC set to  0.000000
8/30/2011	3:52:02 PM	SiCl4 MFC set to  0.000000
8/30/2011	3:52:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	3:52:02 PM	Tube furnace set to 750
8/30/2011	3:57:02 PM	H2 valve closed
8/30/2011	3:57:02 PM	BCl3 valve closed
8/30/2011	3:57:02 PM	PH3 valve closed
8/30/2011	3:57:02 PM	SiCl4 pre valve closed
8/30/2011	3:57:02 PM	SiCl4 post valve closed
8/30/2011	3:57:02 PM	Main Vac valve closed
8/30/2011	3:57:02 PM	Bypass valve closed
8/30/2011	3:57:02 PM	Helium valve opened
8/30/2011	3:57:02 PM	Bubbler valve opened
8/30/2011	3:57:02 PM	Helium MFC set to  500.000000
8/30/2011	3:57:02 PM	H2 MFC set to  0.000000
8/30/2011	3:57:02 PM	BCl3 MFC set to  0.000000
8/30/2011	3:57:02 PM	PHl3 MFC set to  0.000000
8/30/2011	3:57:02 PM	SiCl4 MFC set to  0.000000
8/30/2011	3:57:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	3:57:02 PM	Tube furnace set to 0
8/30/2011	4:17:02 PM	Helium valve closed
8/30/2011	4:17:02 PM	H2 valve closed
8/30/2011	4:17:02 PM	BCl3 valve closed
8/30/2011	4:17:02 PM	PH3 valve closed
8/30/2011	4:17:02 PM	SiCl4 pre valve closed
8/30/2011	4:17:02 PM	SiCl4 post valve closed
8/30/2011	4:17:02 PM	Main Vac valve closed
8/30/2011	4:17:02 PM	Bypass valve closed
8/30/2011	4:17:02 PM	Bubbler valve closed
8/30/2011	4:17:02 PM	Helium MFC set to  0.000000
8/30/2011	4:17:02 PM	H2 MFC set to  0.000000
8/30/2011	4:17:02 PM	BCl3 MFC set to  0.000000
8/30/2011	4:17:02 PM	PHl3 MFC set to  0.000000
8/30/2011	4:17:02 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:17:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:17:02 PM	Tube furnace set to 0
8/30/2011	4:17:03 PM	Run finished at 4:17 PM
8/30/2011	4:28:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	4:28:45 PM	Recipe started at 4:28 PM
8/30/2011	4:28:45 PM	Helium valve closed
8/30/2011	4:28:45 PM	H2 valve closed
8/30/2011	4:28:45 PM	BCl3 valve closed
8/30/2011	4:28:45 PM	PH3 valve closed
8/30/2011	4:28:45 PM	SiCl4 pre valve closed
8/30/2011	4:28:45 PM	SiCl4 post valve closed
8/30/2011	4:28:45 PM	Main Vac valve closed
8/30/2011	4:28:45 PM	Bypass valve closed
8/30/2011	4:28:45 PM	Bubbler valve closed
8/30/2011	4:28:45 PM	Helium MFC set to  0.000000
8/30/2011	4:28:45 PM	H2 MFC set to  0.000000
8/30/2011	4:28:45 PM	BCl3 MFC set to  0.000000
8/30/2011	4:28:45 PM	PHl3 MFC set to  0.000000
8/30/2011	4:28:45 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:28:45 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:28:45 PM	Tube furnace set to 0
8/30/2011	4:28:48 PM	H2 valve closed
8/30/2011	4:28:48 PM	BCl3 valve closed
8/30/2011	4:28:48 PM	PH3 valve closed
8/30/2011	4:28:48 PM	SiCl4 pre valve closed
8/30/2011	4:28:48 PM	SiCl4 post valve closed
8/30/2011	4:28:48 PM	Main Vac valve closed
8/30/2011	4:28:48 PM	Bypass valve closed
8/30/2011	4:28:48 PM	Bubbler valve closed
8/30/2011	4:28:48 PM	Helium valve opened
8/30/2011	4:28:48 PM	Helium MFC set to  500.000000
8/30/2011	4:28:48 PM	H2 MFC set to  0.000000
8/30/2011	4:28:48 PM	BCl3 MFC set to  0.000000
8/30/2011	4:28:48 PM	PHl3 MFC set to  0.000000
8/30/2011	4:28:48 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:28:48 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:28:48 PM	Tube furnace set to 0
8/30/2011	4:28:52 PM	Helium valve closed
8/30/2011	4:28:52 PM	H2 valve closed
8/30/2011	4:28:52 PM	BCl3 valve closed
8/30/2011	4:28:52 PM	PH3 valve closed
8/30/2011	4:28:52 PM	SiCl4 pre valve closed
8/30/2011	4:28:52 PM	SiCl4 post valve closed
8/30/2011	4:28:52 PM	Main Vac valve closed
8/30/2011	4:28:52 PM	Bypass valve closed
8/30/2011	4:28:52 PM	Bubbler valve closed
8/30/2011	4:28:52 PM	Helium MFC set to  0.000000
8/30/2011	4:28:52 PM	H2 MFC set to  0.000000
8/30/2011	4:28:52 PM	BCl3 MFC set to  0.000000
8/30/2011	4:28:52 PM	PHl3 MFC set to  0.000000
8/30/2011	4:28:52 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:28:52 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:28:52 PM	Tube furnace set to 0
8/30/2011	4:28:53 PM	Run finished at 4:28 PM
8/30/2011	4:28:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	4:37:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	4:37:50 PM	Recipe started at 4:37 PM
8/30/2011	4:37:50 PM	Helium valve closed
8/30/2011	4:37:50 PM	H2 valve closed
8/30/2011	4:37:50 PM	BCl3 valve closed
8/30/2011	4:37:50 PM	PH3 valve closed
8/30/2011	4:37:50 PM	SiCl4 pre valve closed
8/30/2011	4:37:50 PM	SiCl4 post valve closed
8/30/2011	4:37:50 PM	Main Vac valve closed
8/30/2011	4:37:50 PM	Bubbler valve closed
8/30/2011	4:37:50 PM	Bypass valve opened
8/30/2011	4:37:50 PM	Helium MFC set to  0.000000
8/30/2011	4:37:50 PM	H2 MFC set to  0.000000
8/30/2011	4:37:50 PM	BCl3 MFC set to  0.000000
8/30/2011	4:37:50 PM	PHl3 MFC set to  0.000000
8/30/2011	4:37:50 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:37:50 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:37:50 PM	Tube furnace set to 0
8/30/2011	4:38:59 PM	Helium valve closed
8/30/2011	4:38:59 PM	H2 valve closed
8/30/2011	4:38:59 PM	BCl3 valve closed
8/30/2011	4:38:59 PM	PH3 valve closed
8/30/2011	4:38:59 PM	SiCl4 pre valve closed
8/30/2011	4:38:59 PM	SiCl4 post valve closed
8/30/2011	4:38:59 PM	Main Vac valve closed
8/30/2011	4:38:59 PM	Bubbler valve closed
8/30/2011	4:38:59 PM	Bypass valve opened
8/30/2011	4:38:59 PM	Helium MFC set to  0.000000
8/30/2011	4:38:59 PM	H2 MFC set to  0.000000
8/30/2011	4:38:59 PM	BCl3 MFC set to  0.000000
8/30/2011	4:38:59 PM	PHl3 MFC set to  0.000000
8/30/2011	4:38:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:38:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:38:59 PM	Tube furnace set to 0
8/30/2011	4:39:59 PM	Helium valve closed
8/30/2011	4:39:59 PM	H2 valve closed
8/30/2011	4:39:59 PM	BCl3 valve closed
8/30/2011	4:39:59 PM	PH3 valve closed
8/30/2011	4:39:59 PM	SiCl4 pre valve closed
8/30/2011	4:39:59 PM	SiCl4 post valve closed
8/30/2011	4:39:59 PM	Bypass valve closed
8/30/2011	4:39:59 PM	Bubbler valve closed
8/30/2011	4:39:59 PM	Main Vac valve opened
8/30/2011	4:39:59 PM	Helium MFC set to  0.000000
8/30/2011	4:39:59 PM	H2 MFC set to  0.000000
8/30/2011	4:40:00 PM	BCl3 MFC set to  0.000000
8/30/2011	4:40:00 PM	PHl3 MFC set to  0.000000
8/30/2011	4:40:00 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:40:00 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:40:00 PM	Tube furnace set to 0
8/30/2011	4:40:01 PM	Run finished at 4:40 PM
8/30/2011	4:40:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	4:40:13 PM	Recipe started at 4:40 PM
8/30/2011	4:40:13 PM	Helium valve closed
8/30/2011	4:40:13 PM	H2 valve closed
8/30/2011	4:40:13 PM	BCl3 valve closed
8/30/2011	4:40:13 PM	PH3 valve closed
8/30/2011	4:40:13 PM	SiCl4 pre valve closed
8/30/2011	4:40:13 PM	SiCl4 post valve closed
8/30/2011	4:40:13 PM	Bypass valve closed
8/30/2011	4:40:13 PM	Bubbler valve closed
8/30/2011	4:40:13 PM	Main Vac valve opened
8/30/2011	4:40:13 PM	Helium MFC set to  0.000000
8/30/2011	4:40:13 PM	H2 MFC set to  0.000000
8/30/2011	4:40:13 PM	BCl3 MFC set to  0.000000
8/30/2011	4:40:13 PM	PHl3 MFC set to  0.000000
8/30/2011	4:40:13 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:40:13 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:40:13 PM	Tube furnace set to 150
8/30/2011	4:40:44 PM	H2 valve closed
8/30/2011	4:40:44 PM	BCl3 valve closed
8/30/2011	4:40:44 PM	PH3 valve closed
8/30/2011	4:40:44 PM	SiCl4 pre valve closed
8/30/2011	4:40:44 PM	SiCl4 post valve closed
8/30/2011	4:40:44 PM	Bypass valve closed
8/30/2011	4:40:44 PM	Bubbler valve closed
8/30/2011	4:40:44 PM	Helium valve opened
8/30/2011	4:40:44 PM	Main Vac valve opened
8/30/2011	4:40:44 PM	Helium MFC set to  20.000000
8/30/2011	4:40:44 PM	H2 MFC set to  0.000000
8/30/2011	4:40:44 PM	BCl3 MFC set to  0.000000
8/30/2011	4:40:44 PM	PHl3 MFC set to  0.000000
8/30/2011	4:40:44 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:40:44 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:40:44 PM	Tube furnace set to 150
8/30/2011	4:41:14 PM	Helium valve closed
8/30/2011	4:41:14 PM	H2 valve closed
8/30/2011	4:41:14 PM	BCl3 valve closed
8/30/2011	4:41:14 PM	PH3 valve closed
8/30/2011	4:41:14 PM	SiCl4 pre valve closed
8/30/2011	4:41:14 PM	SiCl4 post valve closed
8/30/2011	4:41:14 PM	Bypass valve closed
8/30/2011	4:41:14 PM	Bubbler valve closed
8/30/2011	4:41:14 PM	Main Vac valve opened
8/30/2011	4:41:14 PM	Helium MFC set to  0.000000
8/30/2011	4:41:14 PM	H2 MFC set to  0.000000
8/30/2011	4:41:14 PM	BCl3 MFC set to  0.000000
8/30/2011	4:41:14 PM	PHl3 MFC set to  0.000000
8/30/2011	4:41:14 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:41:14 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:41:14 PM	Tube furnace set to 150
8/30/2011	4:41:44 PM	H2 valve closed
8/30/2011	4:41:44 PM	BCl3 valve closed
8/30/2011	4:41:44 PM	PH3 valve closed
8/30/2011	4:41:44 PM	SiCl4 pre valve closed
8/30/2011	4:41:44 PM	SiCl4 post valve closed
8/30/2011	4:41:44 PM	Bypass valve closed
8/30/2011	4:41:44 PM	Bubbler valve closed
8/30/2011	4:41:44 PM	Helium valve opened
8/30/2011	4:41:44 PM	Main Vac valve opened
8/30/2011	4:41:44 PM	Helium MFC set to  20.000000
8/30/2011	4:41:44 PM	H2 MFC set to  0.000000
8/30/2011	4:41:44 PM	BCl3 MFC set to  0.000000
8/30/2011	4:41:44 PM	PHl3 MFC set to  0.000000
8/30/2011	4:41:44 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:41:44 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:41:44 PM	Tube furnace set to 150
8/30/2011	4:42:14 PM	Helium valve closed
8/30/2011	4:42:14 PM	H2 valve closed
8/30/2011	4:42:14 PM	BCl3 valve closed
8/30/2011	4:42:14 PM	PH3 valve closed
8/30/2011	4:42:14 PM	SiCl4 pre valve closed
8/30/2011	4:42:14 PM	SiCl4 post valve closed
8/30/2011	4:42:14 PM	Bypass valve closed
8/30/2011	4:42:14 PM	Bubbler valve closed
8/30/2011	4:42:14 PM	Main Vac valve opened
8/30/2011	4:42:14 PM	Helium MFC set to  0.000000
8/30/2011	4:42:14 PM	H2 MFC set to  0.000000
8/30/2011	4:42:14 PM	BCl3 MFC set to  0.000000
8/30/2011	4:42:14 PM	PHl3 MFC set to  0.000000
8/30/2011	4:42:14 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:42:14 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:42:14 PM	Tube furnace set to 150
8/30/2011	4:42:44 PM	H2 valve closed
8/30/2011	4:42:44 PM	BCl3 valve closed
8/30/2011	4:42:44 PM	PH3 valve closed
8/30/2011	4:42:44 PM	SiCl4 pre valve closed
8/30/2011	4:42:44 PM	SiCl4 post valve closed
8/30/2011	4:42:44 PM	Bypass valve closed
8/30/2011	4:42:44 PM	Bubbler valve closed
8/30/2011	4:42:44 PM	Helium valve opened
8/30/2011	4:42:44 PM	Main Vac valve opened
8/30/2011	4:42:44 PM	Helium MFC set to  20.000000
8/30/2011	4:42:44 PM	H2 MFC set to  0.000000
8/30/2011	4:42:44 PM	BCl3 MFC set to  0.000000
8/30/2011	4:42:44 PM	PHl3 MFC set to  0.000000
8/30/2011	4:42:44 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:42:44 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:42:44 PM	Tube furnace set to 150
8/30/2011	4:43:14 PM	Helium valve closed
8/30/2011	4:43:14 PM	H2 valve closed
8/30/2011	4:43:15 PM	BCl3 valve closed
8/30/2011	4:43:15 PM	PH3 valve closed
8/30/2011	4:43:15 PM	SiCl4 pre valve closed
8/30/2011	4:43:15 PM	SiCl4 post valve closed
8/30/2011	4:43:15 PM	Bypass valve closed
8/30/2011	4:43:15 PM	Bubbler valve closed
8/30/2011	4:43:15 PM	Main Vac valve opened
8/30/2011	4:43:15 PM	Helium MFC set to  0.000000
8/30/2011	4:43:15 PM	H2 MFC set to  0.000000
8/30/2011	4:43:15 PM	BCl3 MFC set to  0.000000
8/30/2011	4:43:15 PM	PHl3 MFC set to  0.000000
8/30/2011	4:43:15 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:43:15 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:43:15 PM	Tube furnace set to 150
8/30/2011	4:43:45 PM	H2 valve closed
8/30/2011	4:43:45 PM	BCl3 valve closed
8/30/2011	4:43:45 PM	PH3 valve closed
8/30/2011	4:43:45 PM	SiCl4 pre valve closed
8/30/2011	4:43:45 PM	SiCl4 post valve closed
8/30/2011	4:43:45 PM	Bypass valve closed
8/30/2011	4:43:45 PM	Bubbler valve closed
8/30/2011	4:43:45 PM	Helium valve opened
8/30/2011	4:43:45 PM	Main Vac valve opened
8/30/2011	4:43:45 PM	Helium MFC set to  20.000000
8/30/2011	4:43:45 PM	H2 MFC set to  0.000000
8/30/2011	4:43:45 PM	BCl3 MFC set to  0.000000
8/30/2011	4:43:45 PM	PHl3 MFC set to  0.000000
8/30/2011	4:43:45 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:43:45 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:43:45 PM	Tube furnace set to 150
8/30/2011	4:44:15 PM	Helium valve closed
8/30/2011	4:44:15 PM	H2 valve closed
8/30/2011	4:44:15 PM	BCl3 valve closed
8/30/2011	4:44:15 PM	PH3 valve closed
8/30/2011	4:44:15 PM	SiCl4 pre valve closed
8/30/2011	4:44:15 PM	SiCl4 post valve closed
8/30/2011	4:44:15 PM	Bypass valve closed
8/30/2011	4:44:15 PM	Bubbler valve closed
8/30/2011	4:44:15 PM	Main Vac valve opened
8/30/2011	4:44:15 PM	Helium MFC set to  0.000000
8/30/2011	4:44:15 PM	H2 MFC set to  0.000000
8/30/2011	4:44:15 PM	BCl3 MFC set to  0.000000
8/30/2011	4:44:15 PM	PHl3 MFC set to  0.000000
8/30/2011	4:44:15 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:44:15 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:44:15 PM	Tube furnace set to 150
8/30/2011	4:44:45 PM	H2 valve closed
8/30/2011	4:44:45 PM	BCl3 valve closed
8/30/2011	4:44:45 PM	PH3 valve closed
8/30/2011	4:44:45 PM	SiCl4 pre valve closed
8/30/2011	4:44:45 PM	SiCl4 post valve closed
8/30/2011	4:44:45 PM	Bypass valve closed
8/30/2011	4:44:45 PM	Bubbler valve closed
8/30/2011	4:44:45 PM	Helium valve opened
8/30/2011	4:44:45 PM	Main Vac valve opened
8/30/2011	4:44:45 PM	Helium MFC set to  20.000000
8/30/2011	4:44:45 PM	H2 MFC set to  0.000000
8/30/2011	4:44:45 PM	BCl3 MFC set to  0.000000
8/30/2011	4:44:45 PM	PHl3 MFC set to  0.000000
8/30/2011	4:44:45 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:44:45 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:44:45 PM	Tube furnace set to 150
8/30/2011	4:45:15 PM	Helium valve closed
8/30/2011	4:45:15 PM	H2 valve closed
8/30/2011	4:45:15 PM	BCl3 valve closed
8/30/2011	4:45:15 PM	PH3 valve closed
8/30/2011	4:45:15 PM	SiCl4 pre valve closed
8/30/2011	4:45:15 PM	SiCl4 post valve closed
8/30/2011	4:45:15 PM	Bypass valve closed
8/30/2011	4:45:15 PM	Bubbler valve closed
8/30/2011	4:45:15 PM	Main Vac valve opened
8/30/2011	4:45:15 PM	Helium MFC set to  0.000000
8/30/2011	4:45:15 PM	H2 MFC set to  0.000000
8/30/2011	4:45:15 PM	BCl3 MFC set to  0.000000
8/30/2011	4:45:15 PM	PHl3 MFC set to  0.000000
8/30/2011	4:45:15 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:45:15 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:45:15 PM	Tube furnace set to 150
8/30/2011	4:45:45 PM	H2 valve closed
8/30/2011	4:45:45 PM	BCl3 valve closed
8/30/2011	4:45:45 PM	PH3 valve closed
8/30/2011	4:45:45 PM	SiCl4 pre valve closed
8/30/2011	4:45:45 PM	SiCl4 post valve closed
8/30/2011	4:45:45 PM	Bypass valve closed
8/30/2011	4:45:45 PM	Bubbler valve closed
8/30/2011	4:45:46 PM	Helium valve opened
8/30/2011	4:45:46 PM	Main Vac valve opened
8/30/2011	4:45:46 PM	Helium MFC set to  20.000000
8/30/2011	4:45:46 PM	H2 MFC set to  0.000000
8/30/2011	4:45:46 PM	BCl3 MFC set to  0.000000
8/30/2011	4:45:46 PM	PHl3 MFC set to  0.000000
8/30/2011	4:45:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:45:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:45:46 PM	Tube furnace set to 150
8/30/2011	4:46:16 PM	Helium valve closed
8/30/2011	4:46:16 PM	H2 valve closed
8/30/2011	4:46:16 PM	BCl3 valve closed
8/30/2011	4:46:16 PM	PH3 valve closed
8/30/2011	4:46:16 PM	SiCl4 pre valve closed
8/30/2011	4:46:16 PM	SiCl4 post valve closed
8/30/2011	4:46:16 PM	Bypass valve closed
8/30/2011	4:46:16 PM	Bubbler valve closed
8/30/2011	4:46:16 PM	Main Vac valve opened
8/30/2011	4:46:16 PM	Helium MFC set to  0.000000
8/30/2011	4:46:16 PM	H2 MFC set to  0.000000
8/30/2011	4:46:16 PM	BCl3 MFC set to  0.000000
8/30/2011	4:46:16 PM	PHl3 MFC set to  0.000000
8/30/2011	4:46:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:46:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:46:16 PM	Tube furnace set to 150
8/30/2011	4:46:46 PM	H2 valve closed
8/30/2011	4:46:46 PM	BCl3 valve closed
8/30/2011	4:46:46 PM	PH3 valve closed
8/30/2011	4:46:46 PM	SiCl4 pre valve closed
8/30/2011	4:46:46 PM	SiCl4 post valve closed
8/30/2011	4:46:46 PM	Bypass valve closed
8/30/2011	4:46:46 PM	Bubbler valve closed
8/30/2011	4:46:46 PM	Helium valve opened
8/30/2011	4:46:46 PM	Main Vac valve opened
8/30/2011	4:46:46 PM	Helium MFC set to  20.000000
8/30/2011	4:46:46 PM	H2 MFC set to  0.000000
8/30/2011	4:46:46 PM	BCl3 MFC set to  0.000000
8/30/2011	4:46:46 PM	PHl3 MFC set to  0.000000
8/30/2011	4:46:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:46:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:46:46 PM	Tube furnace set to 150
8/30/2011	4:47:16 PM	Helium valve closed
8/30/2011	4:47:16 PM	H2 valve closed
8/30/2011	4:47:16 PM	BCl3 valve closed
8/30/2011	4:47:16 PM	PH3 valve closed
8/30/2011	4:47:16 PM	SiCl4 pre valve closed
8/30/2011	4:47:16 PM	SiCl4 post valve closed
8/30/2011	4:47:16 PM	Bypass valve closed
8/30/2011	4:47:16 PM	Bubbler valve closed
8/30/2011	4:47:16 PM	Main Vac valve opened
8/30/2011	4:47:16 PM	Helium MFC set to  0.000000
8/30/2011	4:47:16 PM	H2 MFC set to  0.000000
8/30/2011	4:47:16 PM	BCl3 MFC set to  0.000000
8/30/2011	4:47:16 PM	PHl3 MFC set to  0.000000
8/30/2011	4:47:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:47:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:47:16 PM	Tube furnace set to 150
8/30/2011	4:47:46 PM	H2 valve closed
8/30/2011	4:47:46 PM	BCl3 valve closed
8/30/2011	4:47:46 PM	PH3 valve closed
8/30/2011	4:47:46 PM	SiCl4 pre valve closed
8/30/2011	4:47:46 PM	SiCl4 post valve closed
8/30/2011	4:47:46 PM	Bypass valve closed
8/30/2011	4:47:46 PM	Bubbler valve closed
8/30/2011	4:47:46 PM	Helium valve opened
8/30/2011	4:47:46 PM	Main Vac valve opened
8/30/2011	4:47:46 PM	Helium MFC set to  20.000000
8/30/2011	4:47:46 PM	H2 MFC set to  0.000000
8/30/2011	4:47:46 PM	BCl3 MFC set to  0.000000
8/30/2011	4:47:46 PM	PHl3 MFC set to  0.000000
8/30/2011	4:47:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:47:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:47:47 PM	Tube furnace set to 150
8/30/2011	4:48:17 PM	Helium valve closed
8/30/2011	4:48:17 PM	H2 valve closed
8/30/2011	4:48:17 PM	BCl3 valve closed
8/30/2011	4:48:17 PM	PH3 valve closed
8/30/2011	4:48:17 PM	SiCl4 pre valve closed
8/30/2011	4:48:17 PM	SiCl4 post valve closed
8/30/2011	4:48:17 PM	Bypass valve closed
8/30/2011	4:48:17 PM	Bubbler valve closed
8/30/2011	4:48:17 PM	Main Vac valve opened
8/30/2011	4:48:17 PM	Helium MFC set to  0.000000
8/30/2011	4:48:17 PM	H2 MFC set to  0.000000
8/30/2011	4:48:17 PM	BCl3 MFC set to  0.000000
8/30/2011	4:48:17 PM	PHl3 MFC set to  0.000000
8/30/2011	4:48:17 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:48:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:48:17 PM	Tube furnace set to 150
8/30/2011	4:48:47 PM	H2 valve closed
8/30/2011	4:48:47 PM	BCl3 valve closed
8/30/2011	4:48:47 PM	PH3 valve closed
8/30/2011	4:48:47 PM	SiCl4 pre valve closed
8/30/2011	4:48:47 PM	SiCl4 post valve closed
8/30/2011	4:48:47 PM	Bypass valve closed
8/30/2011	4:48:47 PM	Bubbler valve closed
8/30/2011	4:48:47 PM	Helium valve opened
8/30/2011	4:48:47 PM	Main Vac valve opened
8/30/2011	4:48:47 PM	Helium MFC set to  20.000000
8/30/2011	4:48:47 PM	H2 MFC set to  0.000000
8/30/2011	4:48:47 PM	BCl3 MFC set to  0.000000
8/30/2011	4:48:47 PM	PHl3 MFC set to  0.000000
8/30/2011	4:48:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:48:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:48:47 PM	Tube furnace set to 150
8/30/2011	4:49:17 PM	Helium valve closed
8/30/2011	4:49:17 PM	H2 valve closed
8/30/2011	4:49:17 PM	BCl3 valve closed
8/30/2011	4:49:17 PM	PH3 valve closed
8/30/2011	4:49:17 PM	SiCl4 pre valve closed
8/30/2011	4:49:17 PM	SiCl4 post valve closed
8/30/2011	4:49:17 PM	Bypass valve closed
8/30/2011	4:49:17 PM	Bubbler valve closed
8/30/2011	4:49:17 PM	Main Vac valve opened
8/30/2011	4:49:17 PM	Helium MFC set to  0.000000
8/30/2011	4:49:17 PM	H2 MFC set to  0.000000
8/30/2011	4:49:17 PM	BCl3 MFC set to  0.000000
8/30/2011	4:49:17 PM	PHl3 MFC set to  0.000000
8/30/2011	4:49:17 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:49:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:49:17 PM	Tube furnace set to 150
8/30/2011	4:49:47 PM	H2 valve closed
8/30/2011	4:49:47 PM	BCl3 valve closed
8/30/2011	4:49:47 PM	PH3 valve closed
8/30/2011	4:49:47 PM	SiCl4 pre valve closed
8/30/2011	4:49:47 PM	SiCl4 post valve closed
8/30/2011	4:49:47 PM	Bypass valve closed
8/30/2011	4:49:47 PM	Bubbler valve closed
8/30/2011	4:49:47 PM	Helium valve opened
8/30/2011	4:49:47 PM	Main Vac valve opened
8/30/2011	4:49:47 PM	Helium MFC set to  20.000000
8/30/2011	4:49:47 PM	H2 MFC set to  0.000000
8/30/2011	4:49:47 PM	BCl3 MFC set to  0.000000
8/30/2011	4:49:47 PM	PHl3 MFC set to  0.000000
8/30/2011	4:49:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:49:47 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:49:47 PM	Tube furnace set to 150
8/30/2011	4:50:17 PM	Helium valve closed
8/30/2011	4:50:17 PM	H2 valve closed
8/30/2011	4:50:17 PM	BCl3 valve closed
8/30/2011	4:50:17 PM	PH3 valve closed
8/30/2011	4:50:17 PM	SiCl4 pre valve closed
8/30/2011	4:50:17 PM	SiCl4 post valve closed
8/30/2011	4:50:17 PM	Bypass valve closed
8/30/2011	4:50:17 PM	Bubbler valve closed
8/30/2011	4:50:17 PM	Main Vac valve opened
8/30/2011	4:50:17 PM	Helium MFC set to  0.000000
8/30/2011	4:50:17 PM	H2 MFC set to  0.000000
8/30/2011	4:50:17 PM	BCl3 MFC set to  0.000000
8/30/2011	4:50:17 PM	PHl3 MFC set to  0.000000
8/30/2011	4:50:17 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:50:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:50:18 PM	Tube furnace set to 150
8/30/2011	4:50:19 PM	Run finished at 4:50 PM
8/30/2011	4:52:40 PM	Recipe started at 4:52 PM
8/30/2011	4:52:40 PM	Helium valve closed
8/30/2011	4:52:40 PM	H2 valve closed
8/30/2011	4:52:40 PM	BCl3 valve closed
8/30/2011	4:52:41 PM	PH3 valve closed
8/30/2011	4:52:41 PM	SiCl4 pre valve closed
8/30/2011	4:52:41 PM	SiCl4 post valve closed
8/30/2011	4:52:41 PM	Bypass valve closed
8/30/2011	4:52:41 PM	Bubbler valve closed
8/30/2011	4:52:41 PM	Main Vac valve opened
8/30/2011	4:52:41 PM	Helium MFC set to  0.000000
8/30/2011	4:52:41 PM	H2 MFC set to  0.000000
8/30/2011	4:52:41 PM	BCl3 MFC set to  0.000000
8/30/2011	4:52:41 PM	PHl3 MFC set to  0.000000
8/30/2011	4:52:41 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:52:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:52:41 PM	Tube furnace set to 150
8/30/2011	4:53:11 PM	H2 valve closed
8/30/2011	4:53:11 PM	BCl3 valve closed
8/30/2011	4:53:11 PM	PH3 valve closed
8/30/2011	4:53:11 PM	SiCl4 pre valve closed
8/30/2011	4:53:11 PM	SiCl4 post valve closed
8/30/2011	4:53:11 PM	Bypass valve closed
8/30/2011	4:53:11 PM	Bubbler valve closed
8/30/2011	4:53:11 PM	Helium valve opened
8/30/2011	4:53:11 PM	Main Vac valve opened
8/30/2011	4:53:11 PM	Helium MFC set to  20.000000
8/30/2011	4:53:11 PM	H2 MFC set to  0.000000
8/30/2011	4:53:11 PM	BCl3 MFC set to  0.000000
8/30/2011	4:53:11 PM	PHl3 MFC set to  0.000000
8/30/2011	4:53:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:53:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:53:11 PM	Tube furnace set to 150
8/30/2011	4:53:41 PM	Helium valve closed
8/30/2011	4:53:41 PM	H2 valve closed
8/30/2011	4:53:41 PM	BCl3 valve closed
8/30/2011	4:53:41 PM	PH3 valve closed
8/30/2011	4:53:41 PM	SiCl4 pre valve closed
8/30/2011	4:53:41 PM	SiCl4 post valve closed
8/30/2011	4:53:41 PM	Bypass valve closed
8/30/2011	4:53:41 PM	Bubbler valve closed
8/30/2011	4:53:41 PM	Main Vac valve opened
8/30/2011	4:53:41 PM	Helium MFC set to  0.000000
8/30/2011	4:53:41 PM	H2 MFC set to  0.000000
8/30/2011	4:53:41 PM	BCl3 MFC set to  0.000000
8/30/2011	4:53:41 PM	PHl3 MFC set to  0.000000
8/30/2011	4:53:41 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:53:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:53:41 PM	Tube furnace set to 150
8/30/2011	4:54:11 PM	H2 valve closed
8/30/2011	4:54:11 PM	BCl3 valve closed
8/30/2011	4:54:11 PM	PH3 valve closed
8/30/2011	4:54:11 PM	SiCl4 pre valve closed
8/30/2011	4:54:11 PM	SiCl4 post valve closed
8/30/2011	4:54:11 PM	Bypass valve closed
8/30/2011	4:54:11 PM	Bubbler valve closed
8/30/2011	4:54:11 PM	Helium valve opened
8/30/2011	4:54:11 PM	Main Vac valve opened
8/30/2011	4:54:11 PM	Helium MFC set to  20.000000
8/30/2011	4:54:11 PM	H2 MFC set to  0.000000
8/30/2011	4:54:11 PM	BCl3 MFC set to  0.000000
8/30/2011	4:54:11 PM	PHl3 MFC set to  0.000000
8/30/2011	4:54:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:54:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:54:11 PM	Tube furnace set to 150
8/30/2011	4:54:41 PM	Helium valve closed
8/30/2011	4:54:41 PM	H2 valve closed
8/30/2011	4:54:41 PM	BCl3 valve closed
8/30/2011	4:54:41 PM	PH3 valve closed
8/30/2011	4:54:41 PM	SiCl4 pre valve closed
8/30/2011	4:54:41 PM	SiCl4 post valve closed
8/30/2011	4:54:41 PM	Bypass valve closed
8/30/2011	4:54:41 PM	Bubbler valve closed
8/30/2011	4:54:41 PM	Main Vac valve opened
8/30/2011	4:54:41 PM	Helium MFC set to  0.000000
8/30/2011	4:54:41 PM	H2 MFC set to  0.000000
8/30/2011	4:54:41 PM	BCl3 MFC set to  0.000000
8/30/2011	4:54:41 PM	PHl3 MFC set to  0.000000
8/30/2011	4:54:41 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:54:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:54:41 PM	Tube furnace set to 150
8/30/2011	4:55:11 PM	H2 valve closed
8/30/2011	4:55:11 PM	BCl3 valve closed
8/30/2011	4:55:11 PM	PH3 valve closed
8/30/2011	4:55:11 PM	SiCl4 pre valve closed
8/30/2011	4:55:11 PM	SiCl4 post valve closed
8/30/2011	4:55:11 PM	Bypass valve closed
8/30/2011	4:55:11 PM	Bubbler valve closed
8/30/2011	4:55:12 PM	Helium valve opened
8/30/2011	4:55:12 PM	Main Vac valve opened
8/30/2011	4:55:12 PM	Helium MFC set to  20.000000
8/30/2011	4:55:12 PM	H2 MFC set to  0.000000
8/30/2011	4:55:12 PM	BCl3 MFC set to  0.000000
8/30/2011	4:55:12 PM	PHl3 MFC set to  0.000000
8/30/2011	4:55:12 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:55:12 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:55:12 PM	Tube furnace set to 150
8/30/2011	4:55:42 PM	Helium valve closed
8/30/2011	4:55:42 PM	H2 valve closed
8/30/2011	4:55:42 PM	BCl3 valve closed
8/30/2011	4:55:42 PM	PH3 valve closed
8/30/2011	4:55:42 PM	SiCl4 pre valve closed
8/30/2011	4:55:42 PM	SiCl4 post valve closed
8/30/2011	4:55:42 PM	Bypass valve closed
8/30/2011	4:55:42 PM	Bubbler valve closed
8/30/2011	4:55:42 PM	Main Vac valve opened
8/30/2011	4:55:42 PM	Helium MFC set to  0.000000
8/30/2011	4:55:42 PM	H2 MFC set to  0.000000
8/30/2011	4:55:42 PM	BCl3 MFC set to  0.000000
8/30/2011	4:55:42 PM	PHl3 MFC set to  0.000000
8/30/2011	4:55:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:55:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:55:42 PM	Tube furnace set to 150
8/30/2011	4:56:12 PM	H2 valve closed
8/30/2011	4:56:12 PM	BCl3 valve closed
8/30/2011	4:56:12 PM	PH3 valve closed
8/30/2011	4:56:12 PM	SiCl4 pre valve closed
8/30/2011	4:56:12 PM	SiCl4 post valve closed
8/30/2011	4:56:12 PM	Bypass valve closed
8/30/2011	4:56:12 PM	Bubbler valve closed
8/30/2011	4:56:12 PM	Helium valve opened
8/30/2011	4:56:12 PM	Main Vac valve opened
8/30/2011	4:56:12 PM	Helium MFC set to  20.000000
8/30/2011	4:56:12 PM	H2 MFC set to  0.000000
8/30/2011	4:56:12 PM	BCl3 MFC set to  0.000000
8/30/2011	4:56:12 PM	PHl3 MFC set to  0.000000
8/30/2011	4:56:12 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:56:12 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:56:12 PM	Tube furnace set to 150
8/30/2011	4:56:42 PM	Helium valve closed
8/30/2011	4:56:42 PM	H2 valve closed
8/30/2011	4:56:42 PM	BCl3 valve closed
8/30/2011	4:56:42 PM	PH3 valve closed
8/30/2011	4:56:42 PM	SiCl4 pre valve closed
8/30/2011	4:56:42 PM	SiCl4 post valve closed
8/30/2011	4:56:42 PM	Bypass valve closed
8/30/2011	4:56:42 PM	Bubbler valve closed
8/30/2011	4:56:42 PM	Main Vac valve opened
8/30/2011	4:56:42 PM	Helium MFC set to  0.000000
8/30/2011	4:56:42 PM	H2 MFC set to  0.000000
8/30/2011	4:56:42 PM	BCl3 MFC set to  0.000000
8/30/2011	4:56:42 PM	PHl3 MFC set to  0.000000
8/30/2011	4:56:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:56:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:56:42 PM	Tube furnace set to 150
8/30/2011	4:57:12 PM	H2 valve closed
8/30/2011	4:57:12 PM	BCl3 valve closed
8/30/2011	4:57:12 PM	PH3 valve closed
8/30/2011	4:57:12 PM	SiCl4 pre valve closed
8/30/2011	4:57:12 PM	SiCl4 post valve closed
8/30/2011	4:57:12 PM	Bypass valve closed
8/30/2011	4:57:12 PM	Bubbler valve closed
8/30/2011	4:57:12 PM	Helium valve opened
8/30/2011	4:57:12 PM	Main Vac valve opened
8/30/2011	4:57:12 PM	Helium MFC set to  20.000000
8/30/2011	4:57:12 PM	H2 MFC set to  0.000000
8/30/2011	4:57:12 PM	BCl3 MFC set to  0.000000
8/30/2011	4:57:12 PM	PHl3 MFC set to  0.000000
8/30/2011	4:57:12 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:57:12 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:57:12 PM	Tube furnace set to 150
8/30/2011	4:57:42 PM	Helium valve closed
8/30/2011	4:57:42 PM	H2 valve closed
8/30/2011	4:57:42 PM	BCl3 valve closed
8/30/2011	4:57:42 PM	PH3 valve closed
8/30/2011	4:57:42 PM	SiCl4 pre valve closed
8/30/2011	4:57:42 PM	SiCl4 post valve closed
8/30/2011	4:57:42 PM	Bypass valve closed
8/30/2011	4:57:42 PM	Bubbler valve closed
8/30/2011	4:57:42 PM	Main Vac valve opened
8/30/2011	4:57:42 PM	Helium MFC set to  0.000000
8/30/2011	4:57:42 PM	H2 MFC set to  0.000000
8/30/2011	4:57:42 PM	BCl3 MFC set to  0.000000
8/30/2011	4:57:42 PM	PHl3 MFC set to  0.000000
8/30/2011	4:57:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:57:43 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:57:43 PM	Tube furnace set to 150
8/30/2011	4:58:13 PM	H2 valve closed
8/30/2011	4:58:13 PM	BCl3 valve closed
8/30/2011	4:58:13 PM	PH3 valve closed
8/30/2011	4:58:13 PM	SiCl4 pre valve closed
8/30/2011	4:58:13 PM	SiCl4 post valve closed
8/30/2011	4:58:13 PM	Bypass valve closed
8/30/2011	4:58:13 PM	Bubbler valve closed
8/30/2011	4:58:13 PM	Helium valve opened
8/30/2011	4:58:13 PM	Main Vac valve opened
8/30/2011	4:58:13 PM	Helium MFC set to  20.000000
8/30/2011	4:58:13 PM	H2 MFC set to  0.000000
8/30/2011	4:58:13 PM	BCl3 MFC set to  0.000000
8/30/2011	4:58:13 PM	PHl3 MFC set to  0.000000
8/30/2011	4:58:13 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:58:13 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:58:13 PM	Tube furnace set to 150
8/30/2011	4:58:43 PM	Helium valve closed
8/30/2011	4:58:43 PM	H2 valve closed
8/30/2011	4:58:43 PM	BCl3 valve closed
8/30/2011	4:58:43 PM	PH3 valve closed
8/30/2011	4:58:43 PM	SiCl4 pre valve closed
8/30/2011	4:58:43 PM	SiCl4 post valve closed
8/30/2011	4:58:43 PM	Bypass valve closed
8/30/2011	4:58:43 PM	Bubbler valve closed
8/30/2011	4:58:43 PM	Main Vac valve opened
8/30/2011	4:58:43 PM	Helium MFC set to  0.000000
8/30/2011	4:58:43 PM	H2 MFC set to  0.000000
8/30/2011	4:58:43 PM	BCl3 MFC set to  0.000000
8/30/2011	4:58:43 PM	PHl3 MFC set to  0.000000
8/30/2011	4:58:43 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:58:43 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:58:43 PM	Tube furnace set to 150
8/30/2011	4:59:13 PM	H2 valve closed
8/30/2011	4:59:13 PM	BCl3 valve closed
8/30/2011	4:59:13 PM	PH3 valve closed
8/30/2011	4:59:13 PM	SiCl4 pre valve closed
8/30/2011	4:59:13 PM	SiCl4 post valve closed
8/30/2011	4:59:13 PM	Bypass valve closed
8/30/2011	4:59:13 PM	Bubbler valve closed
8/30/2011	4:59:13 PM	Helium valve opened
8/30/2011	4:59:13 PM	Main Vac valve opened
8/30/2011	4:59:13 PM	Helium MFC set to  20.000000
8/30/2011	4:59:13 PM	H2 MFC set to  0.000000
8/30/2011	4:59:13 PM	BCl3 MFC set to  0.000000
8/30/2011	4:59:13 PM	PHl3 MFC set to  0.000000
8/30/2011	4:59:13 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:59:13 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:59:13 PM	Tube furnace set to 150
8/30/2011	4:59:43 PM	Helium valve closed
8/30/2011	4:59:43 PM	H2 valve closed
8/30/2011	4:59:43 PM	BCl3 valve closed
8/30/2011	4:59:43 PM	PH3 valve closed
8/30/2011	4:59:43 PM	SiCl4 pre valve closed
8/30/2011	4:59:43 PM	SiCl4 post valve closed
8/30/2011	4:59:43 PM	Bypass valve closed
8/30/2011	4:59:43 PM	Bubbler valve closed
8/30/2011	4:59:43 PM	Main Vac valve opened
8/30/2011	4:59:43 PM	Helium MFC set to  0.000000
8/30/2011	4:59:43 PM	H2 MFC set to  0.000000
8/30/2011	4:59:43 PM	BCl3 MFC set to  0.000000
8/30/2011	4:59:43 PM	PHl3 MFC set to  0.000000
8/30/2011	4:59:43 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:59:43 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	4:59:43 PM	Tube furnace set to 150
8/30/2011	4:59:50 PM	Run aborted at 4:59 PM
8/30/2011	4:59:50 PM	Helium valve closed
8/30/2011	4:59:50 PM	H2 valve closed
8/30/2011	4:59:50 PM	BCl3 valve closed
8/30/2011	4:59:50 PM	PH3 valve closed
8/30/2011	4:59:50 PM	SiCl4 pre valve closed
8/30/2011	4:59:50 PM	SiCl4 post valve closed
8/30/2011	4:59:50 PM	Bypass valve closed
8/30/2011	4:59:50 PM	Main Vac valve closed
8/30/2011	4:59:50 PM	Bubbler valve closed
8/30/2011	4:59:50 PM	Helium MFC set to  0.000000
8/30/2011	4:59:50 PM	H2 MFC set to  0.000000
8/30/2011	4:59:50 PM	BCl3 MFC set to  0.000000
8/30/2011	4:59:50 PM	PHl3 MFC set to  0.000000
8/30/2011	4:59:50 PM	SiCl4 MFC set to  0.000000
8/30/2011	4:59:50 PM	Tube furnace set to 0
8/30/2011	4:59:51 PM	Main Vac valve opened
8/30/2011	5:00:25 PM	Recipe started at 5:00 PM
8/30/2011	5:00:25 PM	Helium valve closed
8/30/2011	5:00:25 PM	H2 valve closed
8/30/2011	5:00:25 PM	BCl3 valve closed
8/30/2011	5:00:25 PM	PH3 valve closed
8/30/2011	5:00:25 PM	SiCl4 pre valve closed
8/30/2011	5:00:25 PM	SiCl4 post valve closed
8/30/2011	5:00:25 PM	Main Vac valve closed
8/30/2011	5:00:25 PM	Bypass valve closed
8/30/2011	5:00:25 PM	Bubbler valve closed
8/30/2011	5:00:25 PM	Helium MFC set to  0.000000
8/30/2011	5:00:25 PM	H2 MFC set to  0.000000
8/30/2011	5:00:25 PM	BCl3 MFC set to  0.000000
8/30/2011	5:00:25 PM	PHl3 MFC set to  0.000000
8/30/2011	5:00:25 PM	SiCl4 MFC set to  0.000000
8/30/2011	5:00:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	5:00:25 PM	Tube furnace set to 0
8/30/2011	5:00:28 PM	Helium valve closed
8/30/2011	5:00:28 PM	BCl3 valve closed
8/30/2011	5:00:28 PM	PH3 valve closed
8/30/2011	5:00:28 PM	SiCl4 pre valve closed
8/30/2011	5:00:28 PM	SiCl4 post valve closed
8/30/2011	5:00:28 PM	Main Vac valve closed
8/30/2011	5:00:28 PM	Bypass valve closed
8/30/2011	5:00:28 PM	Bubbler valve closed
8/30/2011	5:00:28 PM	H2 valve opened
8/30/2011	5:00:28 PM	Helium MFC set to  0.000000
8/30/2011	5:00:28 PM	H2 MFC set to  500.000000
8/30/2011	5:00:28 PM	BCl3 MFC set to  0.000000
8/30/2011	5:00:28 PM	PHl3 MFC set to  0.000000
8/30/2011	5:00:28 PM	SiCl4 MFC set to  0.000000
8/30/2011	5:00:28 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	5:00:28 PM	Tube furnace set to 0
8/30/2011	5:01:31 PM	Helium valve closed
8/30/2011	5:01:31 PM	BCl3 valve closed
8/30/2011	5:01:31 PM	PH3 valve closed
8/30/2011	5:01:31 PM	SiCl4 pre valve closed
8/30/2011	5:01:31 PM	SiCl4 post valve closed
8/30/2011	5:01:31 PM	Main Vac valve closed
8/30/2011	5:01:31 PM	Bypass valve closed
8/30/2011	5:01:31 PM	H2 valve opened
8/30/2011	5:01:31 PM	Bubbler valve opened
8/30/2011	5:01:31 PM	Helium MFC set to  0.000000
8/30/2011	5:01:31 PM	H2 MFC set to  500.000000
8/30/2011	5:01:31 PM	BCl3 MFC set to  0.000000
8/30/2011	5:01:31 PM	PHl3 MFC set to  0.000000
8/30/2011	5:01:31 PM	SiCl4 MFC set to  0.000000
8/30/2011	5:01:31 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	5:01:31 PM	Tube furnace set to 0
8/30/2011	5:01:32 PM	Helium valve closed
8/30/2011	5:01:32 PM	BCl3 valve closed
8/30/2011	5:01:32 PM	PH3 valve closed
8/30/2011	5:01:32 PM	SiCl4 pre valve closed
8/30/2011	5:01:32 PM	SiCl4 post valve closed
8/30/2011	5:01:32 PM	Main Vac valve closed
8/30/2011	5:01:32 PM	Bypass valve closed
8/30/2011	5:01:32 PM	H2 valve opened
8/30/2011	5:01:32 PM	Bubbler valve opened
8/30/2011	5:01:32 PM	Helium MFC set to  0.000000
8/30/2011	5:01:32 PM	H2 MFC set to  500.000000
8/30/2011	5:01:32 PM	BCl3 MFC set to  0.000000
8/30/2011	5:01:32 PM	PHl3 MFC set to  0.000000
8/30/2011	5:01:32 PM	SiCl4 MFC set to  0.000000
8/30/2011	5:01:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	5:01:32 PM	Tube furnace set to 1000
8/30/2011	5:21:32 PM	Helium valve closed
8/30/2011	5:21:32 PM	PH3 valve closed
8/30/2011	5:21:32 PM	Main Vac valve closed
8/30/2011	5:21:32 PM	Bypass valve closed
8/30/2011	5:21:32 PM	H2 valve opened
8/30/2011	5:21:32 PM	BCl3 valve opened
8/30/2011	5:21:32 PM	SiCl4 pre valve opened
8/30/2011	5:21:32 PM	SiCl4 post valve opened
8/30/2011	5:21:32 PM	Bubbler valve opened
8/30/2011	5:21:32 PM	Helium MFC set to  0.000000
8/30/2011	5:21:32 PM	H2 MFC set to  500.000000
8/30/2011	5:21:32 PM	BCl3 MFC set to  2.500000
8/30/2011	5:21:32 PM	PHl3 MFC set to  0.000000
8/30/2011	5:21:32 PM	SiCl4 MFC set to  50.000000
8/30/2011	5:21:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	5:21:32 PM	Tube furnace set to 1000
8/30/2011	5:41:32 PM	Helium valve closed
8/30/2011	5:41:32 PM	BCl3 valve closed
8/30/2011	5:41:32 PM	PH3 valve closed
8/30/2011	5:41:32 PM	SiCl4 pre valve closed
8/30/2011	5:41:32 PM	SiCl4 post valve closed
8/30/2011	5:41:32 PM	Main Vac valve closed
8/30/2011	5:41:32 PM	Bypass valve closed
8/30/2011	5:41:32 PM	H2 valve opened
8/30/2011	5:41:32 PM	Bubbler valve opened
8/30/2011	5:41:32 PM	Helium MFC set to  0.000000
8/30/2011	5:41:32 PM	H2 MFC set to  500.000000
8/30/2011	5:41:32 PM	BCl3 MFC set to  0.000000
8/30/2011	5:41:32 PM	PHl3 MFC set to  0.000000
8/30/2011	5:41:32 PM	SiCl4 MFC set to  0.000000
8/30/2011	5:41:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	5:41:32 PM	Tube furnace set to 750
8/30/2011	5:46:32 PM	H2 valve closed
8/30/2011	5:46:32 PM	BCl3 valve closed
8/30/2011	5:46:32 PM	PH3 valve closed
8/30/2011	5:46:32 PM	SiCl4 pre valve closed
8/30/2011	5:46:32 PM	SiCl4 post valve closed
8/30/2011	5:46:32 PM	Main Vac valve closed
8/30/2011	5:46:32 PM	Bypass valve closed
8/30/2011	5:46:32 PM	Helium valve opened
8/30/2011	5:46:32 PM	Bubbler valve opened
8/30/2011	5:46:32 PM	Helium MFC set to  500.000000
8/30/2011	5:46:32 PM	H2 MFC set to  0.000000
8/30/2011	5:46:32 PM	BCl3 MFC set to  0.000000
8/30/2011	5:46:32 PM	PHl3 MFC set to  0.000000
8/30/2011	5:46:32 PM	SiCl4 MFC set to  0.000000
8/30/2011	5:46:32 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	5:46:33 PM	Tube furnace set to 0
8/30/2011	6:05:46 PM	Helium valve closed
8/30/2011	6:05:46 PM	H2 valve closed
8/30/2011	6:05:46 PM	BCl3 valve closed
8/30/2011	6:05:46 PM	PH3 valve closed
8/30/2011	6:05:46 PM	SiCl4 pre valve closed
8/30/2011	6:05:46 PM	SiCl4 post valve closed
8/30/2011	6:05:46 PM	Main Vac valve closed
8/30/2011	6:05:46 PM	Bubbler valve closed
8/30/2011	6:05:46 PM	Bypass valve closed
8/30/2011	6:05:46 PM	Helium MFC set to  0.000000
8/30/2011	6:05:46 PM	H2 MFC set to  0.000000
8/30/2011	6:05:46 PM	BCl3 MFC set to  0.000000
8/30/2011	6:05:46 PM	PHl3 MFC set to  0.000000
8/30/2011	6:05:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:05:46 PM	Bypass solenoid MFC set to  760.000000
8/30/2011	6:05:46 PM	Tube furnace set to 0
8/30/2011	6:05:46 PM	Baratron reads 743.359977 Torr and NaOH valve is open.  Emergency exit.
8/30/2011	6:05:53 PM	Run aborted at 6:05 PM
8/30/2011	6:11:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	6:11:37 PM	Recipe started at 6:11 PM
8/30/2011	6:11:37 PM	Helium valve closed
8/30/2011	6:11:37 PM	H2 valve closed
8/30/2011	6:11:37 PM	BCl3 valve closed
8/30/2011	6:11:37 PM	PH3 valve closed
8/30/2011	6:11:37 PM	SiCl4 pre valve closed
8/30/2011	6:11:37 PM	SiCl4 post valve closed
8/30/2011	6:11:37 PM	Main Vac valve closed
8/30/2011	6:11:37 PM	Bubbler valve closed
8/30/2011	6:11:37 PM	Bypass valve opened
8/30/2011	6:11:37 PM	Helium MFC set to  0.000000
8/30/2011	6:11:37 PM	H2 MFC set to  0.000000
8/30/2011	6:11:37 PM	BCl3 MFC set to  0.000000
8/30/2011	6:11:37 PM	PHl3 MFC set to  0.000000
8/30/2011	6:11:37 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:11:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:11:37 PM	Tube furnace set to 0
8/30/2011	6:12:43 PM	Helium valve closed
8/30/2011	6:12:43 PM	H2 valve closed
8/30/2011	6:12:43 PM	BCl3 valve closed
8/30/2011	6:12:43 PM	PH3 valve closed
8/30/2011	6:12:43 PM	SiCl4 pre valve closed
8/30/2011	6:12:43 PM	SiCl4 post valve closed
8/30/2011	6:12:43 PM	Main Vac valve closed
8/30/2011	6:12:43 PM	Bubbler valve closed
8/30/2011	6:12:43 PM	Bypass valve opened
8/30/2011	6:12:43 PM	Helium MFC set to  0.000000
8/30/2011	6:12:43 PM	H2 MFC set to  0.000000
8/30/2011	6:12:43 PM	BCl3 MFC set to  0.000000
8/30/2011	6:12:43 PM	PHl3 MFC set to  0.000000
8/30/2011	6:12:43 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:12:43 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:12:43 PM	Tube furnace set to 0
8/30/2011	6:13:26 PM	Run aborted at 6:13 PM
8/30/2011	6:13:26 PM	Helium valve closed
8/30/2011	6:13:26 PM	H2 valve closed
8/30/2011	6:13:26 PM	BCl3 valve closed
8/30/2011	6:13:26 PM	PH3 valve closed
8/30/2011	6:13:26 PM	SiCl4 pre valve closed
8/30/2011	6:13:26 PM	SiCl4 post valve closed
8/30/2011	6:13:26 PM	Bypass valve closed
8/30/2011	6:13:26 PM	Main Vac valve closed
8/30/2011	6:13:26 PM	Bubbler valve closed
8/30/2011	6:13:26 PM	Helium MFC set to  0.000000
8/30/2011	6:13:26 PM	H2 MFC set to  0.000000
8/30/2011	6:13:26 PM	BCl3 MFC set to  0.000000
8/30/2011	6:13:26 PM	PHl3 MFC set to  0.000000
8/30/2011	6:13:26 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:13:26 PM	Tube furnace set to 0
8/30/2011	6:13:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	6:13:27 PM	Main Vac valve opened
8/30/2011	6:15:54 PM	Recipe started at 6:15 PM
8/30/2011	6:15:54 PM	Helium valve closed
8/30/2011	6:15:54 PM	H2 valve closed
8/30/2011	6:15:54 PM	BCl3 valve closed
8/30/2011	6:15:54 PM	PH3 valve closed
8/30/2011	6:15:54 PM	SiCl4 pre valve closed
8/30/2011	6:15:54 PM	SiCl4 post valve closed
8/30/2011	6:15:54 PM	Bypass valve closed
8/30/2011	6:15:54 PM	Bubbler valve closed
8/30/2011	6:15:54 PM	Main Vac valve opened
8/30/2011	6:15:54 PM	Helium MFC set to  0.000000
8/30/2011	6:15:54 PM	H2 MFC set to  0.000000
8/30/2011	6:15:54 PM	BCl3 MFC set to  0.000000
8/30/2011	6:15:54 PM	PHl3 MFC set to  0.000000
8/30/2011	6:15:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:15:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:15:54 PM	Tube furnace set to 150
8/30/2011	6:16:24 PM	H2 valve closed
8/30/2011	6:16:24 PM	BCl3 valve closed
8/30/2011	6:16:24 PM	PH3 valve closed
8/30/2011	6:16:24 PM	SiCl4 pre valve closed
8/30/2011	6:16:24 PM	SiCl4 post valve closed
8/30/2011	6:16:24 PM	Bypass valve closed
8/30/2011	6:16:24 PM	Bubbler valve closed
8/30/2011	6:16:24 PM	Helium valve opened
8/30/2011	6:16:24 PM	Main Vac valve opened
8/30/2011	6:16:24 PM	Helium MFC set to  20.000000
8/30/2011	6:16:24 PM	H2 MFC set to  0.000000
8/30/2011	6:16:24 PM	BCl3 MFC set to  0.000000
8/30/2011	6:16:24 PM	PHl3 MFC set to  0.000000
8/30/2011	6:16:24 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:16:24 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:16:24 PM	Tube furnace set to 150
8/30/2011	6:16:54 PM	Helium valve closed
8/30/2011	6:16:54 PM	H2 valve closed
8/30/2011	6:16:54 PM	BCl3 valve closed
8/30/2011	6:16:54 PM	PH3 valve closed
8/30/2011	6:16:54 PM	SiCl4 pre valve closed
8/30/2011	6:16:54 PM	SiCl4 post valve closed
8/30/2011	6:16:54 PM	Bypass valve closed
8/30/2011	6:16:54 PM	Bubbler valve closed
8/30/2011	6:16:54 PM	Main Vac valve opened
8/30/2011	6:16:54 PM	Helium MFC set to  0.000000
8/30/2011	6:16:54 PM	H2 MFC set to  0.000000
8/30/2011	6:16:54 PM	BCl3 MFC set to  0.000000
8/30/2011	6:16:54 PM	PHl3 MFC set to  0.000000
8/30/2011	6:16:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:16:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:16:54 PM	Tube furnace set to 150
8/30/2011	6:17:24 PM	H2 valve closed
8/30/2011	6:17:24 PM	BCl3 valve closed
8/30/2011	6:17:24 PM	PH3 valve closed
8/30/2011	6:17:24 PM	SiCl4 pre valve closed
8/30/2011	6:17:24 PM	SiCl4 post valve closed
8/30/2011	6:17:24 PM	Bypass valve closed
8/30/2011	6:17:24 PM	Bubbler valve closed
8/30/2011	6:17:24 PM	Helium valve opened
8/30/2011	6:17:24 PM	Main Vac valve opened
8/30/2011	6:17:24 PM	Helium MFC set to  20.000000
8/30/2011	6:17:24 PM	H2 MFC set to  0.000000
8/30/2011	6:17:24 PM	BCl3 MFC set to  0.000000
8/30/2011	6:17:24 PM	PHl3 MFC set to  0.000000
8/30/2011	6:17:24 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:17:24 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:17:24 PM	Tube furnace set to 150
8/30/2011	6:17:54 PM	Helium valve closed
8/30/2011	6:17:54 PM	H2 valve closed
8/30/2011	6:17:54 PM	BCl3 valve closed
8/30/2011	6:17:54 PM	PH3 valve closed
8/30/2011	6:17:54 PM	SiCl4 pre valve closed
8/30/2011	6:17:54 PM	SiCl4 post valve closed
8/30/2011	6:17:54 PM	Bypass valve closed
8/30/2011	6:17:54 PM	Bubbler valve closed
8/30/2011	6:17:54 PM	Main Vac valve opened
8/30/2011	6:17:54 PM	Helium MFC set to  0.000000
8/30/2011	6:17:54 PM	H2 MFC set to  0.000000
8/30/2011	6:17:54 PM	BCl3 MFC set to  0.000000
8/30/2011	6:17:54 PM	PHl3 MFC set to  0.000000
8/30/2011	6:17:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:17:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:17:55 PM	Tube furnace set to 150
8/30/2011	6:18:25 PM	H2 valve closed
8/30/2011	6:18:25 PM	BCl3 valve closed
8/30/2011	6:18:25 PM	PH3 valve closed
8/30/2011	6:18:25 PM	SiCl4 pre valve closed
8/30/2011	6:18:25 PM	SiCl4 post valve closed
8/30/2011	6:18:25 PM	Bypass valve closed
8/30/2011	6:18:25 PM	Bubbler valve closed
8/30/2011	6:18:25 PM	Helium valve opened
8/30/2011	6:18:25 PM	Main Vac valve opened
8/30/2011	6:18:25 PM	Helium MFC set to  20.000000
8/30/2011	6:18:25 PM	H2 MFC set to  0.000000
8/30/2011	6:18:25 PM	BCl3 MFC set to  0.000000
8/30/2011	6:18:25 PM	PHl3 MFC set to  0.000000
8/30/2011	6:18:25 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:18:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:18:25 PM	Tube furnace set to 150
8/30/2011	6:18:55 PM	Helium valve closed
8/30/2011	6:18:55 PM	H2 valve closed
8/30/2011	6:18:55 PM	BCl3 valve closed
8/30/2011	6:18:55 PM	PH3 valve closed
8/30/2011	6:18:55 PM	SiCl4 pre valve closed
8/30/2011	6:18:55 PM	SiCl4 post valve closed
8/30/2011	6:18:55 PM	Bypass valve closed
8/30/2011	6:18:55 PM	Bubbler valve closed
8/30/2011	6:18:55 PM	Main Vac valve opened
8/30/2011	6:18:55 PM	Helium MFC set to  0.000000
8/30/2011	6:18:55 PM	H2 MFC set to  0.000000
8/30/2011	6:18:55 PM	BCl3 MFC set to  0.000000
8/30/2011	6:18:55 PM	PHl3 MFC set to  0.000000
8/30/2011	6:18:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:18:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:18:55 PM	Tube furnace set to 150
8/30/2011	6:19:25 PM	H2 valve closed
8/30/2011	6:19:25 PM	BCl3 valve closed
8/30/2011	6:19:25 PM	PH3 valve closed
8/30/2011	6:19:25 PM	SiCl4 pre valve closed
8/30/2011	6:19:25 PM	SiCl4 post valve closed
8/30/2011	6:19:25 PM	Bypass valve closed
8/30/2011	6:19:25 PM	Bubbler valve closed
8/30/2011	6:19:25 PM	Helium valve opened
8/30/2011	6:19:25 PM	Main Vac valve opened
8/30/2011	6:19:25 PM	Helium MFC set to  20.000000
8/30/2011	6:19:25 PM	H2 MFC set to  0.000000
8/30/2011	6:19:25 PM	BCl3 MFC set to  0.000000
8/30/2011	6:19:25 PM	PHl3 MFC set to  0.000000
8/30/2011	6:19:25 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:19:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:19:25 PM	Tube furnace set to 150
8/30/2011	6:19:55 PM	Helium valve closed
8/30/2011	6:19:55 PM	H2 valve closed
8/30/2011	6:19:55 PM	BCl3 valve closed
8/30/2011	6:19:55 PM	PH3 valve closed
8/30/2011	6:19:55 PM	SiCl4 pre valve closed
8/30/2011	6:19:55 PM	SiCl4 post valve closed
8/30/2011	6:19:55 PM	Bypass valve closed
8/30/2011	6:19:55 PM	Bubbler valve closed
8/30/2011	6:19:55 PM	Main Vac valve opened
8/30/2011	6:19:55 PM	Helium MFC set to  0.000000
8/30/2011	6:19:55 PM	H2 MFC set to  0.000000
8/30/2011	6:19:55 PM	BCl3 MFC set to  0.000000
8/30/2011	6:19:55 PM	PHl3 MFC set to  0.000000
8/30/2011	6:19:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:19:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:19:55 PM	Tube furnace set to 150
8/30/2011	6:20:25 PM	H2 valve closed
8/30/2011	6:20:25 PM	BCl3 valve closed
8/30/2011	6:20:25 PM	PH3 valve closed
8/30/2011	6:20:25 PM	SiCl4 pre valve closed
8/30/2011	6:20:25 PM	SiCl4 post valve closed
8/30/2011	6:20:25 PM	Bypass valve closed
8/30/2011	6:20:25 PM	Bubbler valve closed
8/30/2011	6:20:25 PM	Helium valve opened
8/30/2011	6:20:25 PM	Main Vac valve opened
8/30/2011	6:20:25 PM	Helium MFC set to  20.000000
8/30/2011	6:20:25 PM	H2 MFC set to  0.000000
8/30/2011	6:20:25 PM	BCl3 MFC set to  0.000000
8/30/2011	6:20:25 PM	PHl3 MFC set to  0.000000
8/30/2011	6:20:25 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:20:25 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:20:26 PM	Tube furnace set to 150
8/30/2011	6:20:56 PM	Helium valve closed
8/30/2011	6:20:56 PM	H2 valve closed
8/30/2011	6:20:56 PM	BCl3 valve closed
8/30/2011	6:20:56 PM	PH3 valve closed
8/30/2011	6:20:56 PM	SiCl4 pre valve closed
8/30/2011	6:20:56 PM	SiCl4 post valve closed
8/30/2011	6:20:56 PM	Bypass valve closed
8/30/2011	6:20:56 PM	Bubbler valve closed
8/30/2011	6:20:56 PM	Main Vac valve opened
8/30/2011	6:20:56 PM	Helium MFC set to  0.000000
8/30/2011	6:20:56 PM	H2 MFC set to  0.000000
8/30/2011	6:20:56 PM	BCl3 MFC set to  0.000000
8/30/2011	6:20:56 PM	PHl3 MFC set to  0.000000
8/30/2011	6:20:56 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:20:56 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:20:56 PM	Tube furnace set to 150
8/30/2011	6:21:26 PM	H2 valve closed
8/30/2011	6:21:26 PM	BCl3 valve closed
8/30/2011	6:21:26 PM	PH3 valve closed
8/30/2011	6:21:26 PM	SiCl4 pre valve closed
8/30/2011	6:21:26 PM	SiCl4 post valve closed
8/30/2011	6:21:26 PM	Bypass valve closed
8/30/2011	6:21:26 PM	Bubbler valve closed
8/30/2011	6:21:26 PM	Helium valve opened
8/30/2011	6:21:26 PM	Main Vac valve opened
8/30/2011	6:21:26 PM	Helium MFC set to  20.000000
8/30/2011	6:21:26 PM	H2 MFC set to  0.000000
8/30/2011	6:21:26 PM	BCl3 MFC set to  0.000000
8/30/2011	6:21:26 PM	PHl3 MFC set to  0.000000
8/30/2011	6:21:26 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:21:26 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:21:26 PM	Tube furnace set to 150
8/30/2011	6:21:56 PM	Helium valve closed
8/30/2011	6:21:56 PM	H2 valve closed
8/30/2011	6:21:56 PM	BCl3 valve closed
8/30/2011	6:21:56 PM	PH3 valve closed
8/30/2011	6:21:56 PM	SiCl4 pre valve closed
8/30/2011	6:21:56 PM	SiCl4 post valve closed
8/30/2011	6:21:56 PM	Bypass valve closed
8/30/2011	6:21:56 PM	Bubbler valve closed
8/30/2011	6:21:56 PM	Main Vac valve opened
8/30/2011	6:21:56 PM	Helium MFC set to  0.000000
8/30/2011	6:21:56 PM	H2 MFC set to  0.000000
8/30/2011	6:21:56 PM	BCl3 MFC set to  0.000000
8/30/2011	6:21:56 PM	PHl3 MFC set to  0.000000
8/30/2011	6:21:56 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:21:56 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:21:56 PM	Tube furnace set to 150
8/30/2011	6:22:26 PM	H2 valve closed
8/30/2011	6:22:26 PM	BCl3 valve closed
8/30/2011	6:22:26 PM	PH3 valve closed
8/30/2011	6:22:26 PM	SiCl4 pre valve closed
8/30/2011	6:22:26 PM	SiCl4 post valve closed
8/30/2011	6:22:26 PM	Bypass valve closed
8/30/2011	6:22:26 PM	Bubbler valve closed
8/30/2011	6:22:26 PM	Helium valve opened
8/30/2011	6:22:26 PM	Main Vac valve opened
8/30/2011	6:22:26 PM	Helium MFC set to  20.000000
8/30/2011	6:22:26 PM	H2 MFC set to  0.000000
8/30/2011	6:22:26 PM	BCl3 MFC set to  0.000000
8/30/2011	6:22:26 PM	PHl3 MFC set to  0.000000
8/30/2011	6:22:26 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:22:26 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:22:26 PM	Tube furnace set to 150
8/30/2011	6:22:56 PM	Helium valve closed
8/30/2011	6:22:56 PM	H2 valve closed
8/30/2011	6:22:56 PM	BCl3 valve closed
8/30/2011	6:22:56 PM	PH3 valve closed
8/30/2011	6:22:56 PM	SiCl4 pre valve closed
8/30/2011	6:22:56 PM	SiCl4 post valve closed
8/30/2011	6:22:56 PM	Bypass valve closed
8/30/2011	6:22:56 PM	Bubbler valve closed
8/30/2011	6:22:56 PM	Main Vac valve opened
8/30/2011	6:22:56 PM	Helium MFC set to  0.000000
8/30/2011	6:22:56 PM	H2 MFC set to  0.000000
8/30/2011	6:22:56 PM	BCl3 MFC set to  0.000000
8/30/2011	6:22:56 PM	PHl3 MFC set to  0.000000
8/30/2011	6:22:56 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:22:56 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:22:57 PM	Tube furnace set to 150
8/30/2011	6:23:27 PM	H2 valve closed
8/30/2011	6:23:27 PM	BCl3 valve closed
8/30/2011	6:23:27 PM	PH3 valve closed
8/30/2011	6:23:27 PM	SiCl4 pre valve closed
8/30/2011	6:23:27 PM	SiCl4 post valve closed
8/30/2011	6:23:27 PM	Bypass valve closed
8/30/2011	6:23:27 PM	Bubbler valve closed
8/30/2011	6:23:27 PM	Helium valve opened
8/30/2011	6:23:27 PM	Main Vac valve opened
8/30/2011	6:23:27 PM	Helium MFC set to  20.000000
8/30/2011	6:23:27 PM	H2 MFC set to  0.000000
8/30/2011	6:23:27 PM	BCl3 MFC set to  0.000000
8/30/2011	6:23:27 PM	PHl3 MFC set to  0.000000
8/30/2011	6:23:27 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:23:27 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:23:27 PM	Tube furnace set to 150
8/30/2011	6:23:57 PM	Helium valve closed
8/30/2011	6:23:57 PM	H2 valve closed
8/30/2011	6:23:57 PM	BCl3 valve closed
8/30/2011	6:23:57 PM	PH3 valve closed
8/30/2011	6:23:57 PM	SiCl4 pre valve closed
8/30/2011	6:23:57 PM	SiCl4 post valve closed
8/30/2011	6:23:57 PM	Bypass valve closed
8/30/2011	6:23:57 PM	Bubbler valve closed
8/30/2011	6:23:57 PM	Main Vac valve opened
8/30/2011	6:23:57 PM	Helium MFC set to  0.000000
8/30/2011	6:23:57 PM	H2 MFC set to  0.000000
8/30/2011	6:23:57 PM	BCl3 MFC set to  0.000000
8/30/2011	6:23:57 PM	PHl3 MFC set to  0.000000
8/30/2011	6:23:57 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:23:57 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:23:57 PM	Tube furnace set to 150
8/30/2011	6:24:27 PM	H2 valve closed
8/30/2011	6:24:27 PM	BCl3 valve closed
8/30/2011	6:24:27 PM	PH3 valve closed
8/30/2011	6:24:27 PM	SiCl4 pre valve closed
8/30/2011	6:24:27 PM	SiCl4 post valve closed
8/30/2011	6:24:27 PM	Bypass valve closed
8/30/2011	6:24:27 PM	Bubbler valve closed
8/30/2011	6:24:27 PM	Helium valve opened
8/30/2011	6:24:27 PM	Main Vac valve opened
8/30/2011	6:24:27 PM	Helium MFC set to  20.000000
8/30/2011	6:24:27 PM	H2 MFC set to  0.000000
8/30/2011	6:24:27 PM	BCl3 MFC set to  0.000000
8/30/2011	6:24:27 PM	PHl3 MFC set to  0.000000
8/30/2011	6:24:27 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:24:27 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:24:27 PM	Tube furnace set to 150
8/30/2011	6:24:57 PM	Helium valve closed
8/30/2011	6:24:57 PM	H2 valve closed
8/30/2011	6:24:57 PM	BCl3 valve closed
8/30/2011	6:24:57 PM	PH3 valve closed
8/30/2011	6:24:57 PM	SiCl4 pre valve closed
8/30/2011	6:24:57 PM	SiCl4 post valve closed
8/30/2011	6:24:57 PM	Bypass valve closed
8/30/2011	6:24:57 PM	Bubbler valve closed
8/30/2011	6:24:57 PM	Main Vac valve opened
8/30/2011	6:24:57 PM	Helium MFC set to  0.000000
8/30/2011	6:24:57 PM	H2 MFC set to  0.000000
8/30/2011	6:24:57 PM	BCl3 MFC set to  0.000000
8/30/2011	6:24:57 PM	PHl3 MFC set to  0.000000
8/30/2011	6:24:57 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:24:57 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:24:57 PM	Tube furnace set to 150
8/30/2011	6:25:27 PM	H2 valve closed
8/30/2011	6:25:27 PM	BCl3 valve closed
8/30/2011	6:25:27 PM	PH3 valve closed
8/30/2011	6:25:27 PM	SiCl4 pre valve closed
8/30/2011	6:25:27 PM	SiCl4 post valve closed
8/30/2011	6:25:27 PM	Bypass valve closed
8/30/2011	6:25:27 PM	Bubbler valve closed
8/30/2011	6:25:27 PM	Helium valve opened
8/30/2011	6:25:27 PM	Main Vac valve opened
8/30/2011	6:25:27 PM	Helium MFC set to  20.000000
8/30/2011	6:25:27 PM	H2 MFC set to  0.000000
8/30/2011	6:25:27 PM	BCl3 MFC set to  0.000000
8/30/2011	6:25:27 PM	PHl3 MFC set to  0.000000
8/30/2011	6:25:27 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:25:27 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:25:28 PM	Tube furnace set to 150
8/30/2011	6:25:58 PM	Helium valve closed
8/30/2011	6:25:58 PM	H2 valve closed
8/30/2011	6:25:58 PM	BCl3 valve closed
8/30/2011	6:25:58 PM	PH3 valve closed
8/30/2011	6:25:58 PM	SiCl4 pre valve closed
8/30/2011	6:25:58 PM	SiCl4 post valve closed
8/30/2011	6:25:58 PM	Bypass valve closed
8/30/2011	6:25:58 PM	Bubbler valve closed
8/30/2011	6:25:58 PM	Main Vac valve opened
8/30/2011	6:25:58 PM	Helium MFC set to  0.000000
8/30/2011	6:25:58 PM	H2 MFC set to  0.000000
8/30/2011	6:25:58 PM	BCl3 MFC set to  0.000000
8/30/2011	6:25:58 PM	PHl3 MFC set to  0.000000
8/30/2011	6:25:58 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:25:58 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:25:58 PM	Tube furnace set to 150
8/30/2011	6:25:59 PM	Run finished at 6:25 PM
8/30/2011	6:32:11 PM	Recipe started at 6:32 PM
8/30/2011	6:32:11 PM	Helium valve closed
8/30/2011	6:32:11 PM	H2 valve closed
8/30/2011	6:32:11 PM	BCl3 valve closed
8/30/2011	6:32:11 PM	PH3 valve closed
8/30/2011	6:32:11 PM	SiCl4 pre valve closed
8/30/2011	6:32:11 PM	SiCl4 post valve closed
8/30/2011	6:32:11 PM	Main Vac valve closed
8/30/2011	6:32:11 PM	Bypass valve closed
8/30/2011	6:32:11 PM	Bubbler valve closed
8/30/2011	6:32:11 PM	Helium MFC set to  0.000000
8/30/2011	6:32:11 PM	H2 MFC set to  0.000000
8/30/2011	6:32:11 PM	BCl3 MFC set to  0.000000
8/30/2011	6:32:11 PM	PHl3 MFC set to  0.000000
8/30/2011	6:32:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:32:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:32:11 PM	Tube furnace set to 0
8/30/2011	6:32:14 PM	Helium valve closed
8/30/2011	6:32:14 PM	BCl3 valve closed
8/30/2011	6:32:14 PM	PH3 valve closed
8/30/2011	6:32:14 PM	SiCl4 pre valve closed
8/30/2011	6:32:14 PM	SiCl4 post valve closed
8/30/2011	6:32:14 PM	Main Vac valve closed
8/30/2011	6:32:14 PM	Bypass valve closed
8/30/2011	6:32:14 PM	Bubbler valve closed
8/30/2011	6:32:14 PM	H2 valve opened
8/30/2011	6:32:14 PM	Helium MFC set to  0.000000
8/30/2011	6:32:14 PM	H2 MFC set to  500.000000
8/30/2011	6:32:14 PM	BCl3 MFC set to  0.000000
8/30/2011	6:32:14 PM	PHl3 MFC set to  0.000000
8/30/2011	6:32:14 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:32:14 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:32:14 PM	Tube furnace set to 0
8/30/2011	6:33:16 PM	Helium valve closed
8/30/2011	6:33:16 PM	BCl3 valve closed
8/30/2011	6:33:16 PM	PH3 valve closed
8/30/2011	6:33:16 PM	SiCl4 pre valve closed
8/30/2011	6:33:16 PM	SiCl4 post valve closed
8/30/2011	6:33:16 PM	Main Vac valve closed
8/30/2011	6:33:16 PM	Bypass valve closed
8/30/2011	6:33:16 PM	H2 valve opened
8/30/2011	6:33:16 PM	Bubbler valve opened
8/30/2011	6:33:16 PM	Helium MFC set to  0.000000
8/30/2011	6:33:16 PM	H2 MFC set to  500.000000
8/30/2011	6:33:16 PM	BCl3 MFC set to  0.000000
8/30/2011	6:33:16 PM	PHl3 MFC set to  0.000000
8/30/2011	6:33:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:33:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:33:16 PM	Tube furnace set to 0
8/30/2011	6:33:17 PM	Helium valve closed
8/30/2011	6:33:17 PM	BCl3 valve closed
8/30/2011	6:33:17 PM	PH3 valve closed
8/30/2011	6:33:17 PM	SiCl4 pre valve closed
8/30/2011	6:33:17 PM	SiCl4 post valve closed
8/30/2011	6:33:17 PM	Main Vac valve closed
8/30/2011	6:33:17 PM	Bypass valve closed
8/30/2011	6:33:17 PM	H2 valve opened
8/30/2011	6:33:17 PM	Bubbler valve opened
8/30/2011	6:33:17 PM	Helium MFC set to  0.000000
8/30/2011	6:33:17 PM	H2 MFC set to  500.000000
8/30/2011	6:33:17 PM	BCl3 MFC set to  0.000000
8/30/2011	6:33:17 PM	PHl3 MFC set to  0.000000
8/30/2011	6:33:17 PM	SiCl4 MFC set to  0.000000
8/30/2011	6:33:17 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:33:18 PM	Tube furnace set to 1000
8/30/2011	6:53:18 PM	Helium valve closed
8/30/2011	6:53:18 PM	PH3 valve closed
8/30/2011	6:53:18 PM	Main Vac valve closed
8/30/2011	6:53:18 PM	Bypass valve closed
8/30/2011	6:53:18 PM	H2 valve opened
8/30/2011	6:53:18 PM	BCl3 valve opened
8/30/2011	6:53:18 PM	SiCl4 pre valve opened
8/30/2011	6:53:18 PM	SiCl4 post valve opened
8/30/2011	6:53:18 PM	Bubbler valve opened
8/30/2011	6:53:18 PM	Helium MFC set to  0.000000
8/30/2011	6:53:18 PM	H2 MFC set to  500.000000
8/30/2011	6:53:18 PM	BCl3 MFC set to  2.500000
8/30/2011	6:53:18 PM	PHl3 MFC set to  0.000000
8/30/2011	6:53:18 PM	SiCl4 MFC set to  50.000000
8/30/2011	6:53:18 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	6:53:18 PM	Tube furnace set to 1000
8/30/2011	7:23:18 PM	Helium valve closed
8/30/2011	7:23:18 PM	BCl3 valve closed
8/30/2011	7:23:18 PM	PH3 valve closed
8/30/2011	7:23:18 PM	SiCl4 pre valve closed
8/30/2011	7:23:18 PM	SiCl4 post valve closed
8/30/2011	7:23:18 PM	Main Vac valve closed
8/30/2011	7:23:18 PM	Bypass valve closed
8/30/2011	7:23:18 PM	H2 valve opened
8/30/2011	7:23:18 PM	Bubbler valve opened
8/30/2011	7:23:18 PM	Helium MFC set to  0.000000
8/30/2011	7:23:18 PM	H2 MFC set to  500.000000
8/30/2011	7:23:18 PM	BCl3 MFC set to  0.000000
8/30/2011	7:23:18 PM	PHl3 MFC set to  0.000000
8/30/2011	7:23:18 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:23:18 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:23:18 PM	Tube furnace set to 750
8/30/2011	7:28:18 PM	H2 valve closed
8/30/2011	7:28:18 PM	BCl3 valve closed
8/30/2011	7:28:18 PM	PH3 valve closed
8/30/2011	7:28:18 PM	SiCl4 pre valve closed
8/30/2011	7:28:18 PM	SiCl4 post valve closed
8/30/2011	7:28:18 PM	Main Vac valve closed
8/30/2011	7:28:18 PM	Bypass valve closed
8/30/2011	7:28:18 PM	Helium valve opened
8/30/2011	7:28:18 PM	Bubbler valve opened
8/30/2011	7:28:18 PM	Helium MFC set to  500.000000
8/30/2011	7:28:18 PM	H2 MFC set to  0.000000
8/30/2011	7:28:18 PM	BCl3 MFC set to  0.000000
8/30/2011	7:28:18 PM	PHl3 MFC set to  0.000000
8/30/2011	7:28:18 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:28:18 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:28:18 PM	Tube furnace set to 0
8/30/2011	7:47:32 PM	Run aborted at 7:47 PM
8/30/2011	7:47:32 PM	Helium valve closed
8/30/2011	7:47:32 PM	H2 valve closed
8/30/2011	7:47:32 PM	BCl3 valve closed
8/30/2011	7:47:32 PM	PH3 valve closed
8/30/2011	7:47:32 PM	SiCl4 pre valve closed
8/30/2011	7:47:32 PM	SiCl4 post valve closed
8/30/2011	7:47:32 PM	Bypass valve closed
8/30/2011	7:47:32 PM	Main Vac valve closed
8/30/2011	7:47:32 PM	Bubbler valve closed
8/30/2011	7:47:32 PM	Helium MFC set to  0.000000
8/30/2011	7:47:32 PM	H2 MFC set to  0.000000
8/30/2011	7:47:32 PM	BCl3 MFC set to  0.000000
8/30/2011	7:47:32 PM	PHl3 MFC set to  0.000000
8/30/2011	7:47:32 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:47:32 PM	Tube furnace set to 0
8/30/2011	7:47:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	7:47:34 PM	Recipe started at 7:47 PM
8/30/2011	7:47:34 PM	Helium valve closed
8/30/2011	7:47:34 PM	H2 valve closed
8/30/2011	7:47:34 PM	BCl3 valve closed
8/30/2011	7:47:34 PM	PH3 valve closed
8/30/2011	7:47:34 PM	SiCl4 pre valve closed
8/30/2011	7:47:34 PM	SiCl4 post valve closed
8/30/2011	7:47:34 PM	Main Vac valve closed
8/30/2011	7:47:34 PM	Bypass valve closed
8/30/2011	7:47:34 PM	Bubbler valve closed
8/30/2011	7:47:34 PM	Helium MFC set to  0.000000
8/30/2011	7:47:34 PM	H2 MFC set to  0.000000
8/30/2011	7:47:34 PM	BCl3 MFC set to  0.000000
8/30/2011	7:47:34 PM	PHl3 MFC set to  0.000000
8/30/2011	7:47:34 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:47:34 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:47:35 PM	Tube furnace set to 0
8/30/2011	7:47:38 PM	H2 valve closed
8/30/2011	7:47:38 PM	BCl3 valve closed
8/30/2011	7:47:38 PM	PH3 valve closed
8/30/2011	7:47:38 PM	SiCl4 pre valve closed
8/30/2011	7:47:38 PM	SiCl4 post valve closed
8/30/2011	7:47:38 PM	Main Vac valve closed
8/30/2011	7:47:38 PM	Bypass valve closed
8/30/2011	7:47:38 PM	Bubbler valve closed
8/30/2011	7:47:38 PM	Helium valve opened
8/30/2011	7:47:38 PM	Helium MFC set to  500.000000
8/30/2011	7:47:38 PM	H2 MFC set to  0.000000
8/30/2011	7:47:38 PM	BCl3 MFC set to  0.000000
8/30/2011	7:47:38 PM	PHl3 MFC set to  0.000000
8/30/2011	7:47:38 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:47:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:47:38 PM	Tube furnace set to 0
8/30/2011	7:47:38 PM	Helium valve closed
8/30/2011	7:47:38 PM	H2 valve closed
8/30/2011	7:47:38 PM	BCl3 valve closed
8/30/2011	7:47:38 PM	PH3 valve closed
8/30/2011	7:47:38 PM	SiCl4 pre valve closed
8/30/2011	7:47:38 PM	SiCl4 post valve closed
8/30/2011	7:47:38 PM	Main Vac valve closed
8/30/2011	7:47:38 PM	Bypass valve closed
8/30/2011	7:47:38 PM	Bubbler valve closed
8/30/2011	7:47:38 PM	Helium MFC set to  0.000000
8/30/2011	7:47:38 PM	H2 MFC set to  0.000000
8/30/2011	7:47:38 PM	BCl3 MFC set to  0.000000
8/30/2011	7:47:38 PM	PHl3 MFC set to  0.000000
8/30/2011	7:47:38 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:47:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:47:38 PM	Tube furnace set to 0
8/30/2011	7:47:39 PM	Run finished at 7:47 PM
8/30/2011	7:47:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2011	7:53:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	7:53:06 PM	Recipe started at 7:53 PM
8/30/2011	7:53:06 PM	Helium valve closed
8/30/2011	7:53:06 PM	H2 valve closed
8/30/2011	7:53:06 PM	BCl3 valve closed
8/30/2011	7:53:06 PM	PH3 valve closed
8/30/2011	7:53:06 PM	SiCl4 pre valve closed
8/30/2011	7:53:06 PM	SiCl4 post valve closed
8/30/2011	7:53:06 PM	Main Vac valve closed
8/30/2011	7:53:06 PM	Bubbler valve closed
8/30/2011	7:53:06 PM	Bypass valve opened
8/30/2011	7:53:06 PM	Helium MFC set to  0.000000
8/30/2011	7:53:06 PM	H2 MFC set to  0.000000
8/30/2011	7:53:06 PM	BCl3 MFC set to  0.000000
8/30/2011	7:53:06 PM	PHl3 MFC set to  0.000000
8/30/2011	7:53:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:53:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:53:06 PM	Tube furnace set to 0
8/30/2011	7:54:11 PM	Helium valve closed
8/30/2011	7:54:11 PM	H2 valve closed
8/30/2011	7:54:11 PM	BCl3 valve closed
8/30/2011	7:54:11 PM	PH3 valve closed
8/30/2011	7:54:11 PM	SiCl4 pre valve closed
8/30/2011	7:54:11 PM	SiCl4 post valve closed
8/30/2011	7:54:11 PM	Main Vac valve closed
8/30/2011	7:54:11 PM	Bubbler valve closed
8/30/2011	7:54:11 PM	Bypass valve opened
8/30/2011	7:54:11 PM	Helium MFC set to  0.000000
8/30/2011	7:54:11 PM	H2 MFC set to  0.000000
8/30/2011	7:54:11 PM	BCl3 MFC set to  0.000000
8/30/2011	7:54:11 PM	PHl3 MFC set to  0.000000
8/30/2011	7:54:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:54:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:54:11 PM	Tube furnace set to 0
8/30/2011	7:55:11 PM	Helium valve closed
8/30/2011	7:55:11 PM	H2 valve closed
8/30/2011	7:55:11 PM	BCl3 valve closed
8/30/2011	7:55:11 PM	PH3 valve closed
8/30/2011	7:55:11 PM	SiCl4 pre valve closed
8/30/2011	7:55:11 PM	SiCl4 post valve closed
8/30/2011	7:55:11 PM	Bypass valve closed
8/30/2011	7:55:11 PM	Bubbler valve closed
8/30/2011	7:55:11 PM	Main Vac valve opened
8/30/2011	7:55:11 PM	Helium MFC set to  0.000000
8/30/2011	7:55:11 PM	H2 MFC set to  0.000000
8/30/2011	7:55:11 PM	BCl3 MFC set to  0.000000
8/30/2011	7:55:11 PM	PHl3 MFC set to  0.000000
8/30/2011	7:55:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:55:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:55:12 PM	Tube furnace set to 0
8/30/2011	7:55:13 PM	Run finished at 7:55 PM
8/30/2011	7:55:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	7:55:48 PM	Recipe started at 7:55 PM
8/30/2011	7:55:48 PM	Helium valve closed
8/30/2011	7:55:48 PM	H2 valve closed
8/30/2011	7:55:48 PM	BCl3 valve closed
8/30/2011	7:55:48 PM	PH3 valve closed
8/30/2011	7:55:48 PM	SiCl4 pre valve closed
8/30/2011	7:55:48 PM	SiCl4 post valve closed
8/30/2011	7:55:48 PM	Bypass valve closed
8/30/2011	7:55:48 PM	Bubbler valve closed
8/30/2011	7:55:48 PM	Main Vac valve opened
8/30/2011	7:55:48 PM	Helium MFC set to  0.000000
8/30/2011	7:55:48 PM	H2 MFC set to  0.000000
8/30/2011	7:55:48 PM	BCl3 MFC set to  0.000000
8/30/2011	7:55:48 PM	PHl3 MFC set to  0.000000
8/30/2011	7:55:48 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:55:48 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:55:48 PM	Tube furnace set to 150
8/30/2011	7:56:19 PM	H2 valve closed
8/30/2011	7:56:19 PM	BCl3 valve closed
8/30/2011	7:56:19 PM	PH3 valve closed
8/30/2011	7:56:19 PM	SiCl4 pre valve closed
8/30/2011	7:56:19 PM	SiCl4 post valve closed
8/30/2011	7:56:19 PM	Bypass valve closed
8/30/2011	7:56:19 PM	Bubbler valve closed
8/30/2011	7:56:19 PM	Helium valve opened
8/30/2011	7:56:19 PM	Main Vac valve opened
8/30/2011	7:56:19 PM	Helium MFC set to  20.000000
8/30/2011	7:56:19 PM	H2 MFC set to  0.000000
8/30/2011	7:56:19 PM	BCl3 MFC set to  0.000000
8/30/2011	7:56:19 PM	PHl3 MFC set to  0.000000
8/30/2011	7:56:19 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:56:19 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:56:19 PM	Tube furnace set to 150
8/30/2011	7:56:49 PM	Helium valve closed
8/30/2011	7:56:49 PM	H2 valve closed
8/30/2011	7:56:49 PM	BCl3 valve closed
8/30/2011	7:56:49 PM	PH3 valve closed
8/30/2011	7:56:49 PM	SiCl4 pre valve closed
8/30/2011	7:56:49 PM	SiCl4 post valve closed
8/30/2011	7:56:49 PM	Bypass valve closed
8/30/2011	7:56:49 PM	Bubbler valve closed
8/30/2011	7:56:49 PM	Main Vac valve opened
8/30/2011	7:56:49 PM	Helium MFC set to  0.000000
8/30/2011	7:56:49 PM	H2 MFC set to  0.000000
8/30/2011	7:56:49 PM	BCl3 MFC set to  0.000000
8/30/2011	7:56:49 PM	PHl3 MFC set to  0.000000
8/30/2011	7:56:49 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:56:49 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:56:49 PM	Tube furnace set to 150
8/30/2011	7:57:19 PM	H2 valve closed
8/30/2011	7:57:19 PM	BCl3 valve closed
8/30/2011	7:57:19 PM	PH3 valve closed
8/30/2011	7:57:19 PM	SiCl4 pre valve closed
8/30/2011	7:57:19 PM	SiCl4 post valve closed
8/30/2011	7:57:19 PM	Bypass valve closed
8/30/2011	7:57:19 PM	Bubbler valve closed
8/30/2011	7:57:19 PM	Helium valve opened
8/30/2011	7:57:19 PM	Main Vac valve opened
8/30/2011	7:57:19 PM	Helium MFC set to  20.000000
8/30/2011	7:57:19 PM	H2 MFC set to  0.000000
8/30/2011	7:57:19 PM	BCl3 MFC set to  0.000000
8/30/2011	7:57:19 PM	PHl3 MFC set to  0.000000
8/30/2011	7:57:19 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:57:19 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:57:19 PM	Tube furnace set to 150
8/30/2011	7:57:49 PM	Helium valve closed
8/30/2011	7:57:49 PM	H2 valve closed
8/30/2011	7:57:49 PM	BCl3 valve closed
8/30/2011	7:57:49 PM	PH3 valve closed
8/30/2011	7:57:49 PM	SiCl4 pre valve closed
8/30/2011	7:57:49 PM	SiCl4 post valve closed
8/30/2011	7:57:49 PM	Bypass valve closed
8/30/2011	7:57:49 PM	Bubbler valve closed
8/30/2011	7:57:49 PM	Main Vac valve opened
8/30/2011	7:57:49 PM	Helium MFC set to  0.000000
8/30/2011	7:57:49 PM	H2 MFC set to  0.000000
8/30/2011	7:57:49 PM	BCl3 MFC set to  0.000000
8/30/2011	7:57:49 PM	PHl3 MFC set to  0.000000
8/30/2011	7:57:49 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:57:49 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:57:49 PM	Tube furnace set to 150
8/30/2011	7:58:19 PM	H2 valve closed
8/30/2011	7:58:19 PM	BCl3 valve closed
8/30/2011	7:58:19 PM	PH3 valve closed
8/30/2011	7:58:19 PM	SiCl4 pre valve closed
8/30/2011	7:58:19 PM	SiCl4 post valve closed
8/30/2011	7:58:19 PM	Bypass valve closed
8/30/2011	7:58:19 PM	Bubbler valve closed
8/30/2011	7:58:19 PM	Helium valve opened
8/30/2011	7:58:19 PM	Main Vac valve opened
8/30/2011	7:58:19 PM	Helium MFC set to  20.000000
8/30/2011	7:58:19 PM	H2 MFC set to  0.000000
8/30/2011	7:58:19 PM	BCl3 MFC set to  0.000000
8/30/2011	7:58:19 PM	PHl3 MFC set to  0.000000
8/30/2011	7:58:19 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:58:19 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:58:19 PM	Tube furnace set to 150
8/30/2011	7:58:49 PM	Helium valve closed
8/30/2011	7:58:49 PM	H2 valve closed
8/30/2011	7:58:49 PM	BCl3 valve closed
8/30/2011	7:58:50 PM	PH3 valve closed
8/30/2011	7:58:50 PM	SiCl4 pre valve closed
8/30/2011	7:58:50 PM	SiCl4 post valve closed
8/30/2011	7:58:50 PM	Bypass valve closed
8/30/2011	7:58:50 PM	Bubbler valve closed
8/30/2011	7:58:50 PM	Main Vac valve opened
8/30/2011	7:58:50 PM	Helium MFC set to  0.000000
8/30/2011	7:58:50 PM	H2 MFC set to  0.000000
8/30/2011	7:58:50 PM	BCl3 MFC set to  0.000000
8/30/2011	7:58:50 PM	PHl3 MFC set to  0.000000
8/30/2011	7:58:50 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:58:50 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:58:50 PM	Tube furnace set to 150
8/30/2011	7:59:20 PM	H2 valve closed
8/30/2011	7:59:20 PM	BCl3 valve closed
8/30/2011	7:59:20 PM	PH3 valve closed
8/30/2011	7:59:20 PM	SiCl4 pre valve closed
8/30/2011	7:59:20 PM	SiCl4 post valve closed
8/30/2011	7:59:20 PM	Bypass valve closed
8/30/2011	7:59:20 PM	Bubbler valve closed
8/30/2011	7:59:20 PM	Helium valve opened
8/30/2011	7:59:20 PM	Main Vac valve opened
8/30/2011	7:59:20 PM	Helium MFC set to  20.000000
8/30/2011	7:59:20 PM	H2 MFC set to  0.000000
8/30/2011	7:59:20 PM	BCl3 MFC set to  0.000000
8/30/2011	7:59:20 PM	PHl3 MFC set to  0.000000
8/30/2011	7:59:20 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:59:20 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:59:20 PM	Tube furnace set to 150
8/30/2011	7:59:50 PM	Helium valve closed
8/30/2011	7:59:50 PM	H2 valve closed
8/30/2011	7:59:50 PM	BCl3 valve closed
8/30/2011	7:59:50 PM	PH3 valve closed
8/30/2011	7:59:50 PM	SiCl4 pre valve closed
8/30/2011	7:59:50 PM	SiCl4 post valve closed
8/30/2011	7:59:50 PM	Bypass valve closed
8/30/2011	7:59:50 PM	Bubbler valve closed
8/30/2011	7:59:50 PM	Main Vac valve opened
8/30/2011	7:59:50 PM	Helium MFC set to  0.000000
8/30/2011	7:59:50 PM	H2 MFC set to  0.000000
8/30/2011	7:59:50 PM	BCl3 MFC set to  0.000000
8/30/2011	7:59:50 PM	PHl3 MFC set to  0.000000
8/30/2011	7:59:50 PM	SiCl4 MFC set to  0.000000
8/30/2011	7:59:50 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	7:59:50 PM	Tube furnace set to 150
8/30/2011	8:00:20 PM	H2 valve closed
8/30/2011	8:00:20 PM	BCl3 valve closed
8/30/2011	8:00:20 PM	PH3 valve closed
8/30/2011	8:00:20 PM	SiCl4 pre valve closed
8/30/2011	8:00:20 PM	SiCl4 post valve closed
8/30/2011	8:00:20 PM	Bypass valve closed
8/30/2011	8:00:20 PM	Bubbler valve closed
8/30/2011	8:00:20 PM	Helium valve opened
8/30/2011	8:00:20 PM	Main Vac valve opened
8/30/2011	8:00:20 PM	Helium MFC set to  20.000000
8/30/2011	8:00:20 PM	H2 MFC set to  0.000000
8/30/2011	8:00:20 PM	BCl3 MFC set to  0.000000
8/30/2011	8:00:20 PM	PHl3 MFC set to  0.000000
8/30/2011	8:00:20 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:00:20 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:00:20 PM	Tube furnace set to 150
8/30/2011	8:00:47 PM	Run aborted at 8:00 PM
8/30/2011	8:00:47 PM	Helium valve closed
8/30/2011	8:00:47 PM	H2 valve closed
8/30/2011	8:00:47 PM	BCl3 valve closed
8/30/2011	8:00:47 PM	PH3 valve closed
8/30/2011	8:00:47 PM	SiCl4 pre valve closed
8/30/2011	8:00:47 PM	SiCl4 post valve closed
8/30/2011	8:00:47 PM	Bypass valve closed
8/30/2011	8:00:47 PM	Main Vac valve closed
8/30/2011	8:00:47 PM	Bubbler valve closed
8/30/2011	8:00:47 PM	Helium MFC set to  0.000000
8/30/2011	8:00:47 PM	H2 MFC set to  0.000000
8/30/2011	8:00:47 PM	BCl3 MFC set to  0.000000
8/30/2011	8:00:47 PM	PHl3 MFC set to  0.000000
8/30/2011	8:00:47 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:00:47 PM	Tube furnace set to 0
8/30/2011	8:00:48 PM	Main Vac valve opened
8/30/2011	8:01:40 PM	Recipe started at 8:01 PM
8/30/2011	8:01:40 PM	Helium valve closed
8/30/2011	8:01:40 PM	H2 valve closed
8/30/2011	8:01:40 PM	BCl3 valve closed
8/30/2011	8:01:40 PM	PH3 valve closed
8/30/2011	8:01:40 PM	SiCl4 pre valve closed
8/30/2011	8:01:40 PM	SiCl4 post valve closed
8/30/2011	8:01:40 PM	Bypass valve closed
8/30/2011	8:01:40 PM	Bubbler valve closed
8/30/2011	8:01:40 PM	Main Vac valve opened
8/30/2011	8:01:40 PM	Helium MFC set to  0.000000
8/30/2011	8:01:40 PM	H2 MFC set to  0.000000
8/30/2011	8:01:40 PM	BCl3 MFC set to  0.000000
8/30/2011	8:01:40 PM	PHl3 MFC set to  0.000000
8/30/2011	8:01:40 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:01:40 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:01:40 PM	Tube furnace set to 150
8/30/2011	8:02:10 PM	H2 valve closed
8/30/2011	8:02:10 PM	BCl3 valve closed
8/30/2011	8:02:10 PM	PH3 valve closed
8/30/2011	8:02:10 PM	SiCl4 pre valve closed
8/30/2011	8:02:10 PM	SiCl4 post valve closed
8/30/2011	8:02:10 PM	Bypass valve closed
8/30/2011	8:02:10 PM	Bubbler valve closed
8/30/2011	8:02:10 PM	Helium valve opened
8/30/2011	8:02:10 PM	Main Vac valve opened
8/30/2011	8:02:10 PM	Helium MFC set to  20.000000
8/30/2011	8:02:10 PM	H2 MFC set to  0.000000
8/30/2011	8:02:10 PM	BCl3 MFC set to  0.000000
8/30/2011	8:02:10 PM	PHl3 MFC set to  0.000000
8/30/2011	8:02:10 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:02:10 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:02:10 PM	Tube furnace set to 150
8/30/2011	8:02:40 PM	Helium valve closed
8/30/2011	8:02:40 PM	H2 valve closed
8/30/2011	8:02:40 PM	BCl3 valve closed
8/30/2011	8:02:40 PM	PH3 valve closed
8/30/2011	8:02:40 PM	SiCl4 pre valve closed
8/30/2011	8:02:40 PM	SiCl4 post valve closed
8/30/2011	8:02:40 PM	Bypass valve closed
8/30/2011	8:02:40 PM	Bubbler valve closed
8/30/2011	8:02:40 PM	Main Vac valve opened
8/30/2011	8:02:40 PM	Helium MFC set to  0.000000
8/30/2011	8:02:40 PM	H2 MFC set to  0.000000
8/30/2011	8:02:40 PM	BCl3 MFC set to  0.000000
8/30/2011	8:02:40 PM	PHl3 MFC set to  0.000000
8/30/2011	8:02:40 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:02:40 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:02:41 PM	Tube furnace set to 150
8/30/2011	8:03:11 PM	H2 valve closed
8/30/2011	8:03:11 PM	BCl3 valve closed
8/30/2011	8:03:11 PM	PH3 valve closed
8/30/2011	8:03:11 PM	SiCl4 pre valve closed
8/30/2011	8:03:11 PM	SiCl4 post valve closed
8/30/2011	8:03:11 PM	Bypass valve closed
8/30/2011	8:03:11 PM	Bubbler valve closed
8/30/2011	8:03:11 PM	Helium valve opened
8/30/2011	8:03:11 PM	Main Vac valve opened
8/30/2011	8:03:11 PM	Helium MFC set to  20.000000
8/30/2011	8:03:11 PM	H2 MFC set to  0.000000
8/30/2011	8:03:11 PM	BCl3 MFC set to  0.000000
8/30/2011	8:03:11 PM	PHl3 MFC set to  0.000000
8/30/2011	8:03:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:03:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:03:11 PM	Tube furnace set to 150
8/30/2011	8:03:41 PM	Helium valve closed
8/30/2011	8:03:41 PM	H2 valve closed
8/30/2011	8:03:41 PM	BCl3 valve closed
8/30/2011	8:03:41 PM	PH3 valve closed
8/30/2011	8:03:41 PM	SiCl4 pre valve closed
8/30/2011	8:03:41 PM	SiCl4 post valve closed
8/30/2011	8:03:41 PM	Bypass valve closed
8/30/2011	8:03:41 PM	Bubbler valve closed
8/30/2011	8:03:41 PM	Main Vac valve opened
8/30/2011	8:03:41 PM	Helium MFC set to  0.000000
8/30/2011	8:03:41 PM	H2 MFC set to  0.000000
8/30/2011	8:03:41 PM	BCl3 MFC set to  0.000000
8/30/2011	8:03:41 PM	PHl3 MFC set to  0.000000
8/30/2011	8:03:41 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:03:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:03:41 PM	Tube furnace set to 150
8/30/2011	8:04:11 PM	H2 valve closed
8/30/2011	8:04:11 PM	BCl3 valve closed
8/30/2011	8:04:11 PM	PH3 valve closed
8/30/2011	8:04:11 PM	SiCl4 pre valve closed
8/30/2011	8:04:11 PM	SiCl4 post valve closed
8/30/2011	8:04:11 PM	Bypass valve closed
8/30/2011	8:04:11 PM	Bubbler valve closed
8/30/2011	8:04:11 PM	Helium valve opened
8/30/2011	8:04:11 PM	Main Vac valve opened
8/30/2011	8:04:11 PM	Helium MFC set to  20.000000
8/30/2011	8:04:11 PM	H2 MFC set to  0.000000
8/30/2011	8:04:11 PM	BCl3 MFC set to  0.000000
8/30/2011	8:04:11 PM	PHl3 MFC set to  0.000000
8/30/2011	8:04:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:04:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:04:11 PM	Tube furnace set to 150
8/30/2011	8:04:41 PM	Helium valve closed
8/30/2011	8:04:41 PM	H2 valve closed
8/30/2011	8:04:41 PM	BCl3 valve closed
8/30/2011	8:04:41 PM	PH3 valve closed
8/30/2011	8:04:41 PM	SiCl4 pre valve closed
8/30/2011	8:04:41 PM	SiCl4 post valve closed
8/30/2011	8:04:41 PM	Bypass valve closed
8/30/2011	8:04:41 PM	Bubbler valve closed
8/30/2011	8:04:41 PM	Main Vac valve opened
8/30/2011	8:04:41 PM	Helium MFC set to  0.000000
8/30/2011	8:04:41 PM	H2 MFC set to  0.000000
8/30/2011	8:04:41 PM	BCl3 MFC set to  0.000000
8/30/2011	8:04:41 PM	PHl3 MFC set to  0.000000
8/30/2011	8:04:41 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:04:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:04:41 PM	Tube furnace set to 150
8/30/2011	8:05:11 PM	H2 valve closed
8/30/2011	8:05:11 PM	BCl3 valve closed
8/30/2011	8:05:11 PM	PH3 valve closed
8/30/2011	8:05:11 PM	SiCl4 pre valve closed
8/30/2011	8:05:11 PM	SiCl4 post valve closed
8/30/2011	8:05:11 PM	Bypass valve closed
8/30/2011	8:05:11 PM	Bubbler valve closed
8/30/2011	8:05:11 PM	Helium valve opened
8/30/2011	8:05:11 PM	Main Vac valve opened
8/30/2011	8:05:11 PM	Helium MFC set to  20.000000
8/30/2011	8:05:11 PM	H2 MFC set to  0.000000
8/30/2011	8:05:11 PM	BCl3 MFC set to  0.000000
8/30/2011	8:05:11 PM	PHl3 MFC set to  0.000000
8/30/2011	8:05:11 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:05:11 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:05:12 PM	Tube furnace set to 150
8/30/2011	8:05:42 PM	Helium valve closed
8/30/2011	8:05:42 PM	H2 valve closed
8/30/2011	8:05:42 PM	BCl3 valve closed
8/30/2011	8:05:42 PM	PH3 valve closed
8/30/2011	8:05:42 PM	SiCl4 pre valve closed
8/30/2011	8:05:42 PM	SiCl4 post valve closed
8/30/2011	8:05:42 PM	Bypass valve closed
8/30/2011	8:05:42 PM	Bubbler valve closed
8/30/2011	8:05:42 PM	Main Vac valve opened
8/30/2011	8:05:42 PM	Helium MFC set to  0.000000
8/30/2011	8:05:42 PM	H2 MFC set to  0.000000
8/30/2011	8:05:42 PM	BCl3 MFC set to  0.000000
8/30/2011	8:05:42 PM	PHl3 MFC set to  0.000000
8/30/2011	8:05:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:05:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:05:42 PM	Tube furnace set to 150
8/30/2011	8:06:12 PM	H2 valve closed
8/30/2011	8:06:12 PM	BCl3 valve closed
8/30/2011	8:06:12 PM	PH3 valve closed
8/30/2011	8:06:12 PM	SiCl4 pre valve closed
8/30/2011	8:06:12 PM	SiCl4 post valve closed
8/30/2011	8:06:12 PM	Bypass valve closed
8/30/2011	8:06:12 PM	Bubbler valve closed
8/30/2011	8:06:12 PM	Helium valve opened
8/30/2011	8:06:12 PM	Main Vac valve opened
8/30/2011	8:06:12 PM	Helium MFC set to  20.000000
8/30/2011	8:06:12 PM	H2 MFC set to  0.000000
8/30/2011	8:06:12 PM	BCl3 MFC set to  0.000000
8/30/2011	8:06:12 PM	PHl3 MFC set to  0.000000
8/30/2011	8:06:12 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:06:12 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:06:12 PM	Tube furnace set to 150
8/30/2011	8:06:42 PM	Helium valve closed
8/30/2011	8:06:42 PM	H2 valve closed
8/30/2011	8:06:42 PM	BCl3 valve closed
8/30/2011	8:06:42 PM	PH3 valve closed
8/30/2011	8:06:42 PM	SiCl4 pre valve closed
8/30/2011	8:06:42 PM	SiCl4 post valve closed
8/30/2011	8:06:42 PM	Bypass valve closed
8/30/2011	8:06:42 PM	Bubbler valve closed
8/30/2011	8:06:42 PM	Main Vac valve opened
8/30/2011	8:06:42 PM	Helium MFC set to  0.000000
8/30/2011	8:06:42 PM	H2 MFC set to  0.000000
8/30/2011	8:06:42 PM	BCl3 MFC set to  0.000000
8/30/2011	8:06:42 PM	PHl3 MFC set to  0.000000
8/30/2011	8:06:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:06:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:06:42 PM	Tube furnace set to 150
8/30/2011	8:07:12 PM	H2 valve closed
8/30/2011	8:07:12 PM	BCl3 valve closed
8/30/2011	8:07:12 PM	PH3 valve closed
8/30/2011	8:07:12 PM	SiCl4 pre valve closed
8/30/2011	8:07:12 PM	SiCl4 post valve closed
8/30/2011	8:07:12 PM	Bypass valve closed
8/30/2011	8:07:12 PM	Bubbler valve closed
8/30/2011	8:07:12 PM	Helium valve opened
8/30/2011	8:07:12 PM	Main Vac valve opened
8/30/2011	8:07:12 PM	Helium MFC set to  20.000000
8/30/2011	8:07:12 PM	H2 MFC set to  0.000000
8/30/2011	8:07:12 PM	BCl3 MFC set to  0.000000
8/30/2011	8:07:12 PM	PHl3 MFC set to  0.000000
8/30/2011	8:07:12 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:07:12 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:07:12 PM	Tube furnace set to 150
8/30/2011	8:07:42 PM	Helium valve closed
8/30/2011	8:07:42 PM	H2 valve closed
8/30/2011	8:07:42 PM	BCl3 valve closed
8/30/2011	8:07:42 PM	PH3 valve closed
8/30/2011	8:07:42 PM	SiCl4 pre valve closed
8/30/2011	8:07:42 PM	SiCl4 post valve closed
8/30/2011	8:07:42 PM	Bypass valve closed
8/30/2011	8:07:42 PM	Bubbler valve closed
8/30/2011	8:07:42 PM	Main Vac valve opened
8/30/2011	8:07:42 PM	Helium MFC set to  0.000000
8/30/2011	8:07:42 PM	H2 MFC set to  0.000000
8/30/2011	8:07:42 PM	BCl3 MFC set to  0.000000
8/30/2011	8:07:42 PM	PHl3 MFC set to  0.000000
8/30/2011	8:07:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:07:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:07:43 PM	Tube furnace set to 150
8/30/2011	8:08:13 PM	H2 valve closed
8/30/2011	8:08:13 PM	BCl3 valve closed
8/30/2011	8:08:13 PM	PH3 valve closed
8/30/2011	8:08:13 PM	SiCl4 pre valve closed
8/30/2011	8:08:13 PM	SiCl4 post valve closed
8/30/2011	8:08:13 PM	Bypass valve closed
8/30/2011	8:08:13 PM	Bubbler valve closed
8/30/2011	8:08:13 PM	Helium valve opened
8/30/2011	8:08:13 PM	Main Vac valve opened
8/30/2011	8:08:13 PM	Helium MFC set to  20.000000
8/30/2011	8:08:13 PM	H2 MFC set to  0.000000
8/30/2011	8:08:13 PM	BCl3 MFC set to  0.000000
8/30/2011	8:08:13 PM	PHl3 MFC set to  0.000000
8/30/2011	8:08:13 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:08:13 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:08:13 PM	Tube furnace set to 150
8/30/2011	8:08:43 PM	Helium valve closed
8/30/2011	8:08:43 PM	H2 valve closed
8/30/2011	8:08:43 PM	BCl3 valve closed
8/30/2011	8:08:43 PM	PH3 valve closed
8/30/2011	8:08:43 PM	SiCl4 pre valve closed
8/30/2011	8:08:43 PM	SiCl4 post valve closed
8/30/2011	8:08:43 PM	Bypass valve closed
8/30/2011	8:08:43 PM	Bubbler valve closed
8/30/2011	8:08:43 PM	Main Vac valve opened
8/30/2011	8:08:43 PM	Helium MFC set to  0.000000
8/30/2011	8:08:43 PM	H2 MFC set to  0.000000
8/30/2011	8:08:43 PM	BCl3 MFC set to  0.000000
8/30/2011	8:08:43 PM	PHl3 MFC set to  0.000000
8/30/2011	8:08:43 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:08:43 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:08:43 PM	Tube furnace set to 150
8/30/2011	8:09:13 PM	H2 valve closed
8/30/2011	8:09:13 PM	BCl3 valve closed
8/30/2011	8:09:13 PM	PH3 valve closed
8/30/2011	8:09:13 PM	SiCl4 pre valve closed
8/30/2011	8:09:13 PM	SiCl4 post valve closed
8/30/2011	8:09:13 PM	Bypass valve closed
8/30/2011	8:09:13 PM	Bubbler valve closed
8/30/2011	8:09:13 PM	Helium valve opened
8/30/2011	8:09:13 PM	Main Vac valve opened
8/30/2011	8:09:13 PM	Helium MFC set to  20.000000
8/30/2011	8:09:13 PM	H2 MFC set to  0.000000
8/30/2011	8:09:13 PM	BCl3 MFC set to  0.000000
8/30/2011	8:09:13 PM	PHl3 MFC set to  0.000000
8/30/2011	8:09:13 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:09:13 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:09:13 PM	Tube furnace set to 150
8/30/2011	8:09:43 PM	Helium valve closed
8/30/2011	8:09:43 PM	H2 valve closed
8/30/2011	8:09:43 PM	BCl3 valve closed
8/30/2011	8:09:43 PM	PH3 valve closed
8/30/2011	8:09:43 PM	SiCl4 pre valve closed
8/30/2011	8:09:43 PM	SiCl4 post valve closed
8/30/2011	8:09:43 PM	Bypass valve closed
8/30/2011	8:09:43 PM	Bubbler valve closed
8/30/2011	8:09:43 PM	Main Vac valve opened
8/30/2011	8:09:43 PM	Helium MFC set to  0.000000
8/30/2011	8:09:43 PM	H2 MFC set to  0.000000
8/30/2011	8:09:43 PM	BCl3 MFC set to  0.000000
8/30/2011	8:09:43 PM	PHl3 MFC set to  0.000000
8/30/2011	8:09:43 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:09:43 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:09:43 PM	Tube furnace set to 150
8/30/2011	8:10:13 PM	H2 valve closed
8/30/2011	8:10:13 PM	BCl3 valve closed
8/30/2011	8:10:13 PM	PH3 valve closed
8/30/2011	8:10:13 PM	SiCl4 pre valve closed
8/30/2011	8:10:13 PM	SiCl4 post valve closed
8/30/2011	8:10:13 PM	Bypass valve closed
8/30/2011	8:10:13 PM	Bubbler valve closed
8/30/2011	8:10:13 PM	Helium valve opened
8/30/2011	8:10:13 PM	Main Vac valve opened
8/30/2011	8:10:13 PM	Helium MFC set to  20.000000
8/30/2011	8:10:13 PM	H2 MFC set to  0.000000
8/30/2011	8:10:13 PM	BCl3 MFC set to  0.000000
8/30/2011	8:10:13 PM	PHl3 MFC set to  0.000000
8/30/2011	8:10:13 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:10:13 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:10:14 PM	Tube furnace set to 150
8/30/2011	8:10:44 PM	Helium valve closed
8/30/2011	8:10:44 PM	H2 valve closed
8/30/2011	8:10:44 PM	BCl3 valve closed
8/30/2011	8:10:44 PM	PH3 valve closed
8/30/2011	8:10:44 PM	SiCl4 pre valve closed
8/30/2011	8:10:44 PM	SiCl4 post valve closed
8/30/2011	8:10:44 PM	Bypass valve closed
8/30/2011	8:10:44 PM	Bubbler valve closed
8/30/2011	8:10:44 PM	Main Vac valve opened
8/30/2011	8:10:44 PM	Helium MFC set to  0.000000
8/30/2011	8:10:44 PM	H2 MFC set to  0.000000
8/30/2011	8:10:44 PM	BCl3 MFC set to  0.000000
8/30/2011	8:10:44 PM	PHl3 MFC set to  0.000000
8/30/2011	8:10:44 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:10:44 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:10:44 PM	Tube furnace set to 150
8/30/2011	8:11:14 PM	H2 valve closed
8/30/2011	8:11:14 PM	BCl3 valve closed
8/30/2011	8:11:14 PM	PH3 valve closed
8/30/2011	8:11:14 PM	SiCl4 pre valve closed
8/30/2011	8:11:14 PM	SiCl4 post valve closed
8/30/2011	8:11:14 PM	Bypass valve closed
8/30/2011	8:11:14 PM	Bubbler valve closed
8/30/2011	8:11:14 PM	Helium valve opened
8/30/2011	8:11:14 PM	Main Vac valve opened
8/30/2011	8:11:14 PM	Helium MFC set to  20.000000
8/30/2011	8:11:14 PM	H2 MFC set to  0.000000
8/30/2011	8:11:14 PM	BCl3 MFC set to  0.000000
8/30/2011	8:11:14 PM	PHl3 MFC set to  0.000000
8/30/2011	8:11:14 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:11:14 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:11:14 PM	Tube furnace set to 150
8/30/2011	8:11:44 PM	Helium valve closed
8/30/2011	8:11:44 PM	H2 valve closed
8/30/2011	8:11:44 PM	BCl3 valve closed
8/30/2011	8:11:44 PM	PH3 valve closed
8/30/2011	8:11:44 PM	SiCl4 pre valve closed
8/30/2011	8:11:44 PM	SiCl4 post valve closed
8/30/2011	8:11:44 PM	Bypass valve closed
8/30/2011	8:11:44 PM	Bubbler valve closed
8/30/2011	8:11:44 PM	Main Vac valve opened
8/30/2011	8:11:44 PM	Helium MFC set to  0.000000
8/30/2011	8:11:44 PM	H2 MFC set to  0.000000
8/30/2011	8:11:44 PM	BCl3 MFC set to  0.000000
8/30/2011	8:11:44 PM	PHl3 MFC set to  0.000000
8/30/2011	8:11:44 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:11:44 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:11:44 PM	Tube furnace set to 150
8/30/2011	8:11:45 PM	Run finished at 8:11 PM
8/30/2011	8:14:09 PM	Main Vac valve closed
8/30/2011	8:14:24 PM	Main Vac valve opened
8/30/2011	8:14:48 PM	Recipe started at 8:14 PM
8/30/2011	8:14:48 PM	Helium valve closed
8/30/2011	8:14:48 PM	H2 valve closed
8/30/2011	8:14:48 PM	BCl3 valve closed
8/30/2011	8:14:48 PM	PH3 valve closed
8/30/2011	8:14:48 PM	SiCl4 pre valve closed
8/30/2011	8:14:48 PM	SiCl4 post valve closed
8/30/2011	8:14:48 PM	Main Vac valve closed
8/30/2011	8:14:48 PM	Bypass valve closed
8/30/2011	8:14:48 PM	Bubbler valve closed
8/30/2011	8:14:48 PM	Helium MFC set to  0.000000
8/30/2011	8:14:48 PM	H2 MFC set to  0.000000
8/30/2011	8:14:48 PM	BCl3 MFC set to  0.000000
8/30/2011	8:14:48 PM	PHl3 MFC set to  0.000000
8/30/2011	8:14:48 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:14:48 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:14:48 PM	Tube furnace set to 0
8/30/2011	8:14:51 PM	Helium valve closed
8/30/2011	8:14:51 PM	BCl3 valve closed
8/30/2011	8:14:51 PM	PH3 valve closed
8/30/2011	8:14:51 PM	SiCl4 pre valve closed
8/30/2011	8:14:51 PM	SiCl4 post valve closed
8/30/2011	8:14:51 PM	Main Vac valve closed
8/30/2011	8:14:51 PM	Bypass valve closed
8/30/2011	8:14:51 PM	Bubbler valve closed
8/30/2011	8:14:51 PM	H2 valve opened
8/30/2011	8:14:51 PM	Helium MFC set to  0.000000
8/30/2011	8:14:51 PM	H2 MFC set to  500.000000
8/30/2011	8:14:51 PM	BCl3 MFC set to  0.000000
8/30/2011	8:14:51 PM	PHl3 MFC set to  0.000000
8/30/2011	8:14:51 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:14:51 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:14:51 PM	Tube furnace set to 0
8/30/2011	8:15:53 PM	Helium valve closed
8/30/2011	8:15:53 PM	BCl3 valve closed
8/30/2011	8:15:53 PM	PH3 valve closed
8/30/2011	8:15:53 PM	SiCl4 pre valve closed
8/30/2011	8:15:53 PM	SiCl4 post valve closed
8/30/2011	8:15:53 PM	Main Vac valve closed
8/30/2011	8:15:53 PM	Bypass valve closed
8/30/2011	8:15:53 PM	H2 valve opened
8/30/2011	8:15:53 PM	Bubbler valve opened
8/30/2011	8:15:53 PM	Helium MFC set to  0.000000
8/30/2011	8:15:53 PM	H2 MFC set to  500.000000
8/30/2011	8:15:53 PM	BCl3 MFC set to  0.000000
8/30/2011	8:15:53 PM	PHl3 MFC set to  0.000000
8/30/2011	8:15:53 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:15:53 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:15:53 PM	Tube furnace set to 0
8/30/2011	8:15:54 PM	Helium valve closed
8/30/2011	8:15:54 PM	BCl3 valve closed
8/30/2011	8:15:54 PM	PH3 valve closed
8/30/2011	8:15:54 PM	SiCl4 pre valve closed
8/30/2011	8:15:54 PM	SiCl4 post valve closed
8/30/2011	8:15:54 PM	Main Vac valve closed
8/30/2011	8:15:54 PM	Bypass valve closed
8/30/2011	8:15:54 PM	H2 valve opened
8/30/2011	8:15:54 PM	Bubbler valve opened
8/30/2011	8:15:54 PM	Helium MFC set to  0.000000
8/30/2011	8:15:54 PM	H2 MFC set to  500.000000
8/30/2011	8:15:54 PM	BCl3 MFC set to  0.000000
8/30/2011	8:15:54 PM	PHl3 MFC set to  0.000000
8/30/2011	8:15:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	8:15:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:15:54 PM	Tube furnace set to 1000
8/30/2011	8:35:54 PM	Helium valve closed
8/30/2011	8:35:54 PM	PH3 valve closed
8/30/2011	8:35:54 PM	Main Vac valve closed
8/30/2011	8:35:54 PM	Bypass valve closed
8/30/2011	8:35:54 PM	H2 valve opened
8/30/2011	8:35:54 PM	BCl3 valve opened
8/30/2011	8:35:54 PM	SiCl4 pre valve opened
8/30/2011	8:35:54 PM	SiCl4 post valve opened
8/30/2011	8:35:54 PM	Bubbler valve opened
8/30/2011	8:35:54 PM	Helium MFC set to  0.000000
8/30/2011	8:35:54 PM	H2 MFC set to  500.000000
8/30/2011	8:35:54 PM	BCl3 MFC set to  2.000000
8/30/2011	8:35:54 PM	PHl3 MFC set to  0.000000
8/30/2011	8:35:54 PM	SiCl4 MFC set to  50.000000
8/30/2011	8:35:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	8:35:54 PM	Tube furnace set to 1000
8/30/2011	9:05:54 PM	Helium valve closed
8/30/2011	9:05:54 PM	BCl3 valve closed
8/30/2011	9:05:54 PM	PH3 valve closed
8/30/2011	9:05:54 PM	SiCl4 pre valve closed
8/30/2011	9:05:54 PM	SiCl4 post valve closed
8/30/2011	9:05:54 PM	Main Vac valve closed
8/30/2011	9:05:54 PM	Bypass valve closed
8/30/2011	9:05:54 PM	H2 valve opened
8/30/2011	9:05:54 PM	Bubbler valve opened
8/30/2011	9:05:54 PM	Helium MFC set to  0.000000
8/30/2011	9:05:54 PM	H2 MFC set to  500.000000
8/30/2011	9:05:54 PM	BCl3 MFC set to  0.000000
8/30/2011	9:05:54 PM	PHl3 MFC set to  0.000000
8/30/2011	9:05:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:05:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:05:54 PM	Tube furnace set to 750
8/30/2011	9:10:55 PM	H2 valve closed
8/30/2011	9:10:55 PM	BCl3 valve closed
8/30/2011	9:10:55 PM	PH3 valve closed
8/30/2011	9:10:55 PM	SiCl4 pre valve closed
8/30/2011	9:10:55 PM	SiCl4 post valve closed
8/30/2011	9:10:55 PM	Main Vac valve closed
8/30/2011	9:10:55 PM	Bypass valve closed
8/30/2011	9:10:55 PM	Helium valve opened
8/30/2011	9:10:55 PM	Bubbler valve opened
8/30/2011	9:10:55 PM	Helium MFC set to  500.000000
8/30/2011	9:10:55 PM	H2 MFC set to  0.000000
8/30/2011	9:10:55 PM	BCl3 MFC set to  0.000000
8/30/2011	9:10:55 PM	PHl3 MFC set to  0.000000
8/30/2011	9:10:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:10:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:10:55 PM	Tube furnace set to 0
8/30/2011	9:30:55 PM	Helium valve closed
8/30/2011	9:30:55 PM	H2 valve closed
8/30/2011	9:30:55 PM	BCl3 valve closed
8/30/2011	9:30:55 PM	PH3 valve closed
8/30/2011	9:30:55 PM	SiCl4 pre valve closed
8/30/2011	9:30:55 PM	SiCl4 post valve closed
8/30/2011	9:30:55 PM	Main Vac valve closed
8/30/2011	9:30:55 PM	Bypass valve closed
8/30/2011	9:30:55 PM	Bubbler valve closed
8/30/2011	9:30:55 PM	Helium MFC set to  0.000000
8/30/2011	9:30:55 PM	H2 MFC set to  0.000000
8/30/2011	9:30:55 PM	BCl3 MFC set to  0.000000
8/30/2011	9:30:55 PM	PHl3 MFC set to  0.000000
8/30/2011	9:30:55 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:30:55 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:30:55 PM	Tube furnace set to 0
8/30/2011	9:30:56 PM	Run finished at 9:30 PM
8/30/2011	9:36:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	9:36:41 PM	Recipe started at 9:36 PM
8/30/2011	9:36:41 PM	Helium valve closed
8/30/2011	9:36:41 PM	H2 valve closed
8/30/2011	9:36:41 PM	BCl3 valve closed
8/30/2011	9:36:41 PM	PH3 valve closed
8/30/2011	9:36:41 PM	SiCl4 pre valve closed
8/30/2011	9:36:41 PM	SiCl4 post valve closed
8/30/2011	9:36:41 PM	Main Vac valve closed
8/30/2011	9:36:41 PM	Bubbler valve closed
8/30/2011	9:36:41 PM	Bypass valve opened
8/30/2011	9:36:41 PM	Helium MFC set to  0.000000
8/30/2011	9:36:41 PM	H2 MFC set to  0.000000
8/30/2011	9:36:41 PM	BCl3 MFC set to  0.000000
8/30/2011	9:36:41 PM	PHl3 MFC set to  0.000000
8/30/2011	9:36:41 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:36:41 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:36:41 PM	Tube furnace set to 0
8/30/2011	9:37:42 PM	Helium valve closed
8/30/2011	9:37:42 PM	H2 valve closed
8/30/2011	9:37:42 PM	BCl3 valve closed
8/30/2011	9:37:42 PM	PH3 valve closed
8/30/2011	9:37:42 PM	SiCl4 pre valve closed
8/30/2011	9:37:42 PM	SiCl4 post valve closed
8/30/2011	9:37:42 PM	Main Vac valve closed
8/30/2011	9:37:42 PM	Bubbler valve closed
8/30/2011	9:37:42 PM	Bypass valve opened
8/30/2011	9:37:42 PM	Helium MFC set to  0.000000
8/30/2011	9:37:42 PM	H2 MFC set to  0.000000
8/30/2011	9:37:42 PM	BCl3 MFC set to  0.000000
8/30/2011	9:37:42 PM	PHl3 MFC set to  0.000000
8/30/2011	9:37:42 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:37:42 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:37:42 PM	Tube furnace set to 0
8/30/2011	9:38:21 PM	Helium valve closed
8/30/2011	9:38:21 PM	H2 valve closed
8/30/2011	9:38:21 PM	BCl3 valve closed
8/30/2011	9:38:21 PM	PH3 valve closed
8/30/2011	9:38:21 PM	SiCl4 pre valve closed
8/30/2011	9:38:21 PM	SiCl4 post valve closed
8/30/2011	9:38:21 PM	Bypass valve closed
8/30/2011	9:38:21 PM	Bubbler valve closed
8/30/2011	9:38:21 PM	Main Vac valve opened
8/30/2011	9:38:21 PM	Helium MFC set to  0.000000
8/30/2011	9:38:21 PM	H2 MFC set to  0.000000
8/30/2011	9:38:21 PM	BCl3 MFC set to  0.000000
8/30/2011	9:38:21 PM	PHl3 MFC set to  0.000000
8/30/2011	9:38:21 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:38:21 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:38:22 PM	Tube furnace set to 0
8/30/2011	9:38:23 PM	Run finished at 9:38 PM
8/30/2011	9:38:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	9:38:45 PM	Recipe started at 9:38 PM
8/30/2011	9:38:45 PM	Helium valve closed
8/30/2011	9:38:45 PM	H2 valve closed
8/30/2011	9:38:45 PM	BCl3 valve closed
8/30/2011	9:38:45 PM	PH3 valve closed
8/30/2011	9:38:45 PM	SiCl4 pre valve closed
8/30/2011	9:38:45 PM	SiCl4 post valve closed
8/30/2011	9:38:45 PM	Bypass valve closed
8/30/2011	9:38:45 PM	Bubbler valve closed
8/30/2011	9:38:45 PM	Main Vac valve opened
8/30/2011	9:38:45 PM	Helium MFC set to  0.000000
8/30/2011	9:38:45 PM	H2 MFC set to  0.000000
8/30/2011	9:38:45 PM	BCl3 MFC set to  0.000000
8/30/2011	9:38:45 PM	PHl3 MFC set to  0.000000
8/30/2011	9:38:45 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:38:45 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:38:45 PM	Tube furnace set to 150
8/30/2011	9:39:15 PM	H2 valve closed
8/30/2011	9:39:15 PM	BCl3 valve closed
8/30/2011	9:39:15 PM	PH3 valve closed
8/30/2011	9:39:15 PM	SiCl4 pre valve closed
8/30/2011	9:39:15 PM	SiCl4 post valve closed
8/30/2011	9:39:15 PM	Bypass valve closed
8/30/2011	9:39:15 PM	Bubbler valve closed
8/30/2011	9:39:16 PM	Helium valve opened
8/30/2011	9:39:16 PM	Main Vac valve opened
8/30/2011	9:39:16 PM	Helium MFC set to  20.000000
8/30/2011	9:39:16 PM	H2 MFC set to  0.000000
8/30/2011	9:39:16 PM	BCl3 MFC set to  0.000000
8/30/2011	9:39:16 PM	PHl3 MFC set to  0.000000
8/30/2011	9:39:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:39:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:39:16 PM	Tube furnace set to 150
8/30/2011	9:39:46 PM	Helium valve closed
8/30/2011	9:39:46 PM	H2 valve closed
8/30/2011	9:39:46 PM	BCl3 valve closed
8/30/2011	9:39:46 PM	PH3 valve closed
8/30/2011	9:39:46 PM	SiCl4 pre valve closed
8/30/2011	9:39:46 PM	SiCl4 post valve closed
8/30/2011	9:39:46 PM	Bypass valve closed
8/30/2011	9:39:46 PM	Bubbler valve closed
8/30/2011	9:39:46 PM	Main Vac valve opened
8/30/2011	9:39:46 PM	Helium MFC set to  0.000000
8/30/2011	9:39:46 PM	H2 MFC set to  0.000000
8/30/2011	9:39:46 PM	BCl3 MFC set to  0.000000
8/30/2011	9:39:46 PM	PHl3 MFC set to  0.000000
8/30/2011	9:39:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:39:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:39:46 PM	Tube furnace set to 150
8/30/2011	9:40:16 PM	H2 valve closed
8/30/2011	9:40:16 PM	BCl3 valve closed
8/30/2011	9:40:16 PM	PH3 valve closed
8/30/2011	9:40:16 PM	SiCl4 pre valve closed
8/30/2011	9:40:16 PM	SiCl4 post valve closed
8/30/2011	9:40:16 PM	Bypass valve closed
8/30/2011	9:40:16 PM	Bubbler valve closed
8/30/2011	9:40:16 PM	Helium valve opened
8/30/2011	9:40:16 PM	Main Vac valve opened
8/30/2011	9:40:16 PM	Helium MFC set to  20.000000
8/30/2011	9:40:16 PM	H2 MFC set to  0.000000
8/30/2011	9:40:16 PM	BCl3 MFC set to  0.000000
8/30/2011	9:40:16 PM	PHl3 MFC set to  0.000000
8/30/2011	9:40:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:40:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:40:16 PM	Tube furnace set to 150
8/30/2011	9:40:46 PM	Helium valve closed
8/30/2011	9:40:46 PM	H2 valve closed
8/30/2011	9:40:46 PM	BCl3 valve closed
8/30/2011	9:40:46 PM	PH3 valve closed
8/30/2011	9:40:46 PM	SiCl4 pre valve closed
8/30/2011	9:40:46 PM	SiCl4 post valve closed
8/30/2011	9:40:46 PM	Bypass valve closed
8/30/2011	9:40:46 PM	Bubbler valve closed
8/30/2011	9:40:46 PM	Main Vac valve opened
8/30/2011	9:40:46 PM	Helium MFC set to  0.000000
8/30/2011	9:40:46 PM	H2 MFC set to  0.000000
8/30/2011	9:40:46 PM	BCl3 MFC set to  0.000000
8/30/2011	9:40:46 PM	PHl3 MFC set to  0.000000
8/30/2011	9:40:46 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:40:46 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:40:46 PM	Tube furnace set to 150
8/30/2011	9:41:16 PM	H2 valve closed
8/30/2011	9:41:16 PM	BCl3 valve closed
8/30/2011	9:41:16 PM	PH3 valve closed
8/30/2011	9:41:16 PM	SiCl4 pre valve closed
8/30/2011	9:41:16 PM	SiCl4 post valve closed
8/30/2011	9:41:16 PM	Bypass valve closed
8/30/2011	9:41:16 PM	Bubbler valve closed
8/30/2011	9:41:16 PM	Helium valve opened
8/30/2011	9:41:16 PM	Main Vac valve opened
8/30/2011	9:41:16 PM	Helium MFC set to  20.000000
8/30/2011	9:41:16 PM	H2 MFC set to  0.000000
8/30/2011	9:41:16 PM	BCl3 MFC set to  0.000000
8/30/2011	9:41:16 PM	PHl3 MFC set to  0.000000
8/30/2011	9:41:16 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:41:16 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:41:16 PM	Tube furnace set to 150
8/30/2011	9:41:44 PM	Run aborted at 9:41 PM
8/30/2011	9:41:44 PM	Helium valve closed
8/30/2011	9:41:44 PM	H2 valve closed
8/30/2011	9:41:44 PM	BCl3 valve closed
8/30/2011	9:41:44 PM	PH3 valve closed
8/30/2011	9:41:44 PM	SiCl4 pre valve closed
8/30/2011	9:41:44 PM	SiCl4 post valve closed
8/30/2011	9:41:44 PM	Bypass valve closed
8/30/2011	9:41:44 PM	Main Vac valve closed
8/30/2011	9:41:44 PM	Bubbler valve closed
8/30/2011	9:41:44 PM	Helium MFC set to  0.000000
8/30/2011	9:41:44 PM	H2 MFC set to  0.000000
8/30/2011	9:41:44 PM	BCl3 MFC set to  0.000000
8/30/2011	9:41:44 PM	PHl3 MFC set to  0.000000
8/30/2011	9:41:44 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:41:44 PM	Tube furnace set to 0
8/30/2011	9:41:46 PM	Main Vac valve opened
8/30/2011	9:42:04 PM	Recipe started at 9:41 PM
8/30/2011	9:42:04 PM	Helium valve closed
8/30/2011	9:42:04 PM	H2 valve closed
8/30/2011	9:42:04 PM	BCl3 valve closed
8/30/2011	9:42:04 PM	PH3 valve closed
8/30/2011	9:42:04 PM	SiCl4 pre valve closed
8/30/2011	9:42:04 PM	SiCl4 post valve closed
8/30/2011	9:42:04 PM	Bypass valve closed
8/30/2011	9:42:04 PM	Bubbler valve closed
8/30/2011	9:42:04 PM	Main Vac valve opened
8/30/2011	9:42:04 PM	Helium MFC set to  0.000000
8/30/2011	9:42:04 PM	H2 MFC set to  0.000000
8/30/2011	9:42:04 PM	BCl3 MFC set to  0.000000
8/30/2011	9:42:04 PM	PHl3 MFC set to  0.000000
8/30/2011	9:42:04 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:42:04 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:42:05 PM	Tube furnace set to 150
8/30/2011	9:42:35 PM	H2 valve closed
8/30/2011	9:42:35 PM	BCl3 valve closed
8/30/2011	9:42:35 PM	PH3 valve closed
8/30/2011	9:42:35 PM	SiCl4 pre valve closed
8/30/2011	9:42:35 PM	SiCl4 post valve closed
8/30/2011	9:42:35 PM	Bypass valve closed
8/30/2011	9:42:35 PM	Bubbler valve closed
8/30/2011	9:42:35 PM	Helium valve opened
8/30/2011	9:42:35 PM	Main Vac valve opened
8/30/2011	9:42:35 PM	Helium MFC set to  20.000000
8/30/2011	9:42:35 PM	H2 MFC set to  0.000000
8/30/2011	9:42:35 PM	BCl3 MFC set to  0.000000
8/30/2011	9:42:35 PM	PHl3 MFC set to  0.000000
8/30/2011	9:42:35 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:42:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:42:35 PM	Tube furnace set to 150
8/30/2011	9:43:05 PM	Helium valve closed
8/30/2011	9:43:05 PM	H2 valve closed
8/30/2011	9:43:05 PM	BCl3 valve closed
8/30/2011	9:43:05 PM	PH3 valve closed
8/30/2011	9:43:05 PM	SiCl4 pre valve closed
8/30/2011	9:43:05 PM	SiCl4 post valve closed
8/30/2011	9:43:05 PM	Bypass valve closed
8/30/2011	9:43:05 PM	Bubbler valve closed
8/30/2011	9:43:05 PM	Main Vac valve opened
8/30/2011	9:43:05 PM	Helium MFC set to  0.000000
8/30/2011	9:43:05 PM	H2 MFC set to  0.000000
8/30/2011	9:43:05 PM	BCl3 MFC set to  0.000000
8/30/2011	9:43:05 PM	PHl3 MFC set to  0.000000
8/30/2011	9:43:05 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:43:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:43:05 PM	Tube furnace set to 150
8/30/2011	9:43:35 PM	H2 valve closed
8/30/2011	9:43:35 PM	BCl3 valve closed
8/30/2011	9:43:35 PM	PH3 valve closed
8/30/2011	9:43:35 PM	SiCl4 pre valve closed
8/30/2011	9:43:35 PM	SiCl4 post valve closed
8/30/2011	9:43:35 PM	Bypass valve closed
8/30/2011	9:43:35 PM	Bubbler valve closed
8/30/2011	9:43:35 PM	Helium valve opened
8/30/2011	9:43:35 PM	Main Vac valve opened
8/30/2011	9:43:35 PM	Helium MFC set to  20.000000
8/30/2011	9:43:35 PM	H2 MFC set to  0.000000
8/30/2011	9:43:35 PM	BCl3 MFC set to  0.000000
8/30/2011	9:43:35 PM	PHl3 MFC set to  0.000000
8/30/2011	9:43:35 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:43:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:43:35 PM	Tube furnace set to 150
8/30/2011	9:44:05 PM	Helium valve closed
8/30/2011	9:44:05 PM	H2 valve closed
8/30/2011	9:44:05 PM	BCl3 valve closed
8/30/2011	9:44:05 PM	PH3 valve closed
8/30/2011	9:44:05 PM	SiCl4 pre valve closed
8/30/2011	9:44:05 PM	SiCl4 post valve closed
8/30/2011	9:44:05 PM	Bypass valve closed
8/30/2011	9:44:05 PM	Bubbler valve closed
8/30/2011	9:44:05 PM	Main Vac valve opened
8/30/2011	9:44:05 PM	Helium MFC set to  0.000000
8/30/2011	9:44:05 PM	H2 MFC set to  0.000000
8/30/2011	9:44:05 PM	BCl3 MFC set to  0.000000
8/30/2011	9:44:05 PM	PHl3 MFC set to  0.000000
8/30/2011	9:44:05 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:44:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:44:05 PM	Tube furnace set to 150
8/30/2011	9:44:35 PM	H2 valve closed
8/30/2011	9:44:35 PM	BCl3 valve closed
8/30/2011	9:44:35 PM	PH3 valve closed
8/30/2011	9:44:35 PM	SiCl4 pre valve closed
8/30/2011	9:44:35 PM	SiCl4 post valve closed
8/30/2011	9:44:35 PM	Bypass valve closed
8/30/2011	9:44:35 PM	Bubbler valve closed
8/30/2011	9:44:35 PM	Helium valve opened
8/30/2011	9:44:35 PM	Main Vac valve opened
8/30/2011	9:44:35 PM	Helium MFC set to  20.000000
8/30/2011	9:44:35 PM	H2 MFC set to  0.000000
8/30/2011	9:44:35 PM	BCl3 MFC set to  0.000000
8/30/2011	9:44:35 PM	PHl3 MFC set to  0.000000
8/30/2011	9:44:35 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:44:35 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:44:36 PM	Tube furnace set to 150
8/30/2011	9:45:06 PM	Helium valve closed
8/30/2011	9:45:06 PM	H2 valve closed
8/30/2011	9:45:06 PM	BCl3 valve closed
8/30/2011	9:45:06 PM	PH3 valve closed
8/30/2011	9:45:06 PM	SiCl4 pre valve closed
8/30/2011	9:45:06 PM	SiCl4 post valve closed
8/30/2011	9:45:06 PM	Bypass valve closed
8/30/2011	9:45:06 PM	Bubbler valve closed
8/30/2011	9:45:06 PM	Main Vac valve opened
8/30/2011	9:45:06 PM	Helium MFC set to  0.000000
8/30/2011	9:45:06 PM	H2 MFC set to  0.000000
8/30/2011	9:45:06 PM	BCl3 MFC set to  0.000000
8/30/2011	9:45:06 PM	PHl3 MFC set to  0.000000
8/30/2011	9:45:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:45:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:45:06 PM	Tube furnace set to 150
8/30/2011	9:45:36 PM	H2 valve closed
8/30/2011	9:45:36 PM	BCl3 valve closed
8/30/2011	9:45:36 PM	PH3 valve closed
8/30/2011	9:45:36 PM	SiCl4 pre valve closed
8/30/2011	9:45:36 PM	SiCl4 post valve closed
8/30/2011	9:45:36 PM	Bypass valve closed
8/30/2011	9:45:36 PM	Bubbler valve closed
8/30/2011	9:45:36 PM	Helium valve opened
8/30/2011	9:45:36 PM	Main Vac valve opened
8/30/2011	9:45:36 PM	Helium MFC set to  20.000000
8/30/2011	9:45:36 PM	H2 MFC set to  0.000000
8/30/2011	9:45:36 PM	BCl3 MFC set to  0.000000
8/30/2011	9:45:36 PM	PHl3 MFC set to  0.000000
8/30/2011	9:45:36 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:45:36 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:45:36 PM	Tube furnace set to 150
8/30/2011	9:46:06 PM	Helium valve closed
8/30/2011	9:46:06 PM	H2 valve closed
8/30/2011	9:46:06 PM	BCl3 valve closed
8/30/2011	9:46:06 PM	PH3 valve closed
8/30/2011	9:46:06 PM	SiCl4 pre valve closed
8/30/2011	9:46:06 PM	SiCl4 post valve closed
8/30/2011	9:46:06 PM	Bypass valve closed
8/30/2011	9:46:06 PM	Bubbler valve closed
8/30/2011	9:46:06 PM	Main Vac valve opened
8/30/2011	9:46:06 PM	Helium MFC set to  0.000000
8/30/2011	9:46:06 PM	H2 MFC set to  0.000000
8/30/2011	9:46:06 PM	BCl3 MFC set to  0.000000
8/30/2011	9:46:06 PM	PHl3 MFC set to  0.000000
8/30/2011	9:46:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:46:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:46:06 PM	Tube furnace set to 150
8/30/2011	9:46:36 PM	H2 valve closed
8/30/2011	9:46:36 PM	BCl3 valve closed
8/30/2011	9:46:36 PM	PH3 valve closed
8/30/2011	9:46:36 PM	SiCl4 pre valve closed
8/30/2011	9:46:36 PM	SiCl4 post valve closed
8/30/2011	9:46:36 PM	Bypass valve closed
8/30/2011	9:46:36 PM	Bubbler valve closed
8/30/2011	9:46:36 PM	Helium valve opened
8/30/2011	9:46:36 PM	Main Vac valve opened
8/30/2011	9:46:36 PM	Helium MFC set to  20.000000
8/30/2011	9:46:36 PM	H2 MFC set to  0.000000
8/30/2011	9:46:36 PM	BCl3 MFC set to  0.000000
8/30/2011	9:46:36 PM	PHl3 MFC set to  0.000000
8/30/2011	9:46:36 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:46:36 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:46:36 PM	Tube furnace set to 150
8/30/2011	9:47:06 PM	Helium valve closed
8/30/2011	9:47:06 PM	H2 valve closed
8/30/2011	9:47:06 PM	BCl3 valve closed
8/30/2011	9:47:06 PM	PH3 valve closed
8/30/2011	9:47:06 PM	SiCl4 pre valve closed
8/30/2011	9:47:06 PM	SiCl4 post valve closed
8/30/2011	9:47:06 PM	Bypass valve closed
8/30/2011	9:47:06 PM	Bubbler valve closed
8/30/2011	9:47:06 PM	Main Vac valve opened
8/30/2011	9:47:06 PM	Helium MFC set to  0.000000
8/30/2011	9:47:06 PM	H2 MFC set to  0.000000
8/30/2011	9:47:06 PM	BCl3 MFC set to  0.000000
8/30/2011	9:47:06 PM	PHl3 MFC set to  0.000000
8/30/2011	9:47:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:47:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:47:07 PM	Tube furnace set to 150
8/30/2011	9:47:37 PM	H2 valve closed
8/30/2011	9:47:37 PM	BCl3 valve closed
8/30/2011	9:47:37 PM	PH3 valve closed
8/30/2011	9:47:37 PM	SiCl4 pre valve closed
8/30/2011	9:47:37 PM	SiCl4 post valve closed
8/30/2011	9:47:37 PM	Bypass valve closed
8/30/2011	9:47:37 PM	Bubbler valve closed
8/30/2011	9:47:37 PM	Helium valve opened
8/30/2011	9:47:37 PM	Main Vac valve opened
8/30/2011	9:47:37 PM	Helium MFC set to  20.000000
8/30/2011	9:47:37 PM	H2 MFC set to  0.000000
8/30/2011	9:47:37 PM	BCl3 MFC set to  0.000000
8/30/2011	9:47:37 PM	PHl3 MFC set to  0.000000
8/30/2011	9:47:37 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:47:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:47:37 PM	Tube furnace set to 150
8/30/2011	9:48:07 PM	Helium valve closed
8/30/2011	9:48:07 PM	H2 valve closed
8/30/2011	9:48:07 PM	BCl3 valve closed
8/30/2011	9:48:07 PM	PH3 valve closed
8/30/2011	9:48:07 PM	SiCl4 pre valve closed
8/30/2011	9:48:07 PM	SiCl4 post valve closed
8/30/2011	9:48:07 PM	Bypass valve closed
8/30/2011	9:48:07 PM	Bubbler valve closed
8/30/2011	9:48:07 PM	Main Vac valve opened
8/30/2011	9:48:07 PM	Helium MFC set to  0.000000
8/30/2011	9:48:07 PM	H2 MFC set to  0.000000
8/30/2011	9:48:07 PM	BCl3 MFC set to  0.000000
8/30/2011	9:48:07 PM	PHl3 MFC set to  0.000000
8/30/2011	9:48:07 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:48:07 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:48:07 PM	Tube furnace set to 150
8/30/2011	9:48:37 PM	H2 valve closed
8/30/2011	9:48:37 PM	BCl3 valve closed
8/30/2011	9:48:37 PM	PH3 valve closed
8/30/2011	9:48:37 PM	SiCl4 pre valve closed
8/30/2011	9:48:37 PM	SiCl4 post valve closed
8/30/2011	9:48:37 PM	Bypass valve closed
8/30/2011	9:48:37 PM	Bubbler valve closed
8/30/2011	9:48:37 PM	Helium valve opened
8/30/2011	9:48:37 PM	Main Vac valve opened
8/30/2011	9:48:37 PM	Helium MFC set to  20.000000
8/30/2011	9:48:37 PM	H2 MFC set to  0.000000
8/30/2011	9:48:37 PM	BCl3 MFC set to  0.000000
8/30/2011	9:48:37 PM	PHl3 MFC set to  0.000000
8/30/2011	9:48:37 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:48:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:48:37 PM	Tube furnace set to 150
8/30/2011	9:49:07 PM	Helium valve closed
8/30/2011	9:49:07 PM	H2 valve closed
8/30/2011	9:49:07 PM	BCl3 valve closed
8/30/2011	9:49:07 PM	PH3 valve closed
8/30/2011	9:49:07 PM	SiCl4 pre valve closed
8/30/2011	9:49:07 PM	SiCl4 post valve closed
8/30/2011	9:49:07 PM	Bypass valve closed
8/30/2011	9:49:07 PM	Bubbler valve closed
8/30/2011	9:49:07 PM	Main Vac valve opened
8/30/2011	9:49:07 PM	Helium MFC set to  0.000000
8/30/2011	9:49:07 PM	H2 MFC set to  0.000000
8/30/2011	9:49:07 PM	BCl3 MFC set to  0.000000
8/30/2011	9:49:07 PM	PHl3 MFC set to  0.000000
8/30/2011	9:49:07 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:49:07 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:49:07 PM	Tube furnace set to 150
8/30/2011	9:49:37 PM	H2 valve closed
8/30/2011	9:49:37 PM	BCl3 valve closed
8/30/2011	9:49:37 PM	PH3 valve closed
8/30/2011	9:49:37 PM	SiCl4 pre valve closed
8/30/2011	9:49:37 PM	SiCl4 post valve closed
8/30/2011	9:49:37 PM	Bypass valve closed
8/30/2011	9:49:37 PM	Bubbler valve closed
8/30/2011	9:49:37 PM	Helium valve opened
8/30/2011	9:49:37 PM	Main Vac valve opened
8/30/2011	9:49:37 PM	Helium MFC set to  20.000000
8/30/2011	9:49:37 PM	H2 MFC set to  0.000000
8/30/2011	9:49:37 PM	BCl3 MFC set to  0.000000
8/30/2011	9:49:37 PM	PHl3 MFC set to  0.000000
8/30/2011	9:49:37 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:49:37 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:49:37 PM	Tube furnace set to 150
8/30/2011	9:50:08 PM	Helium valve closed
8/30/2011	9:50:08 PM	H2 valve closed
8/30/2011	9:50:08 PM	BCl3 valve closed
8/30/2011	9:50:08 PM	PH3 valve closed
8/30/2011	9:50:08 PM	SiCl4 pre valve closed
8/30/2011	9:50:08 PM	SiCl4 post valve closed
8/30/2011	9:50:08 PM	Bypass valve closed
8/30/2011	9:50:08 PM	Bubbler valve closed
8/30/2011	9:50:08 PM	Main Vac valve opened
8/30/2011	9:50:08 PM	Helium MFC set to  0.000000
8/30/2011	9:50:08 PM	H2 MFC set to  0.000000
8/30/2011	9:50:08 PM	BCl3 MFC set to  0.000000
8/30/2011	9:50:08 PM	PHl3 MFC set to  0.000000
8/30/2011	9:50:08 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:50:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:50:08 PM	Tube furnace set to 150
8/30/2011	9:50:38 PM	H2 valve closed
8/30/2011	9:50:38 PM	BCl3 valve closed
8/30/2011	9:50:38 PM	PH3 valve closed
8/30/2011	9:50:38 PM	SiCl4 pre valve closed
8/30/2011	9:50:38 PM	SiCl4 post valve closed
8/30/2011	9:50:38 PM	Bypass valve closed
8/30/2011	9:50:38 PM	Bubbler valve closed
8/30/2011	9:50:38 PM	Helium valve opened
8/30/2011	9:50:38 PM	Main Vac valve opened
8/30/2011	9:50:38 PM	Helium MFC set to  20.000000
8/30/2011	9:50:38 PM	H2 MFC set to  0.000000
8/30/2011	9:50:38 PM	BCl3 MFC set to  0.000000
8/30/2011	9:50:38 PM	PHl3 MFC set to  0.000000
8/30/2011	9:50:38 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:50:38 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:50:38 PM	Tube furnace set to 150
8/30/2011	9:51:08 PM	Helium valve closed
8/30/2011	9:51:08 PM	H2 valve closed
8/30/2011	9:51:08 PM	BCl3 valve closed
8/30/2011	9:51:08 PM	PH3 valve closed
8/30/2011	9:51:08 PM	SiCl4 pre valve closed
8/30/2011	9:51:08 PM	SiCl4 post valve closed
8/30/2011	9:51:08 PM	Bypass valve closed
8/30/2011	9:51:08 PM	Bubbler valve closed
8/30/2011	9:51:08 PM	Main Vac valve opened
8/30/2011	9:51:08 PM	Helium MFC set to  0.000000
8/30/2011	9:51:08 PM	H2 MFC set to  0.000000
8/30/2011	9:51:08 PM	BCl3 MFC set to  0.000000
8/30/2011	9:51:08 PM	PHl3 MFC set to  0.000000
8/30/2011	9:51:08 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:51:08 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:51:08 PM	Tube furnace set to 150
8/30/2011	9:51:38 PM	Run aborted at 9:51 PM
8/30/2011	9:51:38 PM	Helium valve closed
8/30/2011	9:51:38 PM	H2 valve closed
8/30/2011	9:51:38 PM	BCl3 valve closed
8/30/2011	9:51:38 PM	PH3 valve closed
8/30/2011	9:51:38 PM	SiCl4 pre valve closed
8/30/2011	9:51:38 PM	SiCl4 post valve closed
8/30/2011	9:51:38 PM	Bypass valve closed
8/30/2011	9:51:38 PM	Main Vac valve closed
8/30/2011	9:51:38 PM	Bubbler valve closed
8/30/2011	9:51:38 PM	Helium MFC set to  0.000000
8/30/2011	9:51:38 PM	H2 MFC set to  0.000000
8/30/2011	9:51:38 PM	BCl3 MFC set to  0.000000
8/30/2011	9:51:38 PM	PHl3 MFC set to  0.000000
8/30/2011	9:51:38 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:51:38 PM	Tube furnace set to 0
8/30/2011	9:51:40 PM	Main Vac valve opened
8/30/2011	9:51:59 PM	Recipe started at 9:51 PM
8/30/2011	9:51:59 PM	Helium valve closed
8/30/2011	9:51:59 PM	H2 valve closed
8/30/2011	9:51:59 PM	BCl3 valve closed
8/30/2011	9:51:59 PM	PH3 valve closed
8/30/2011	9:51:59 PM	SiCl4 pre valve closed
8/30/2011	9:51:59 PM	SiCl4 post valve closed
8/30/2011	9:51:59 PM	Main Vac valve closed
8/30/2011	9:51:59 PM	Bypass valve closed
8/30/2011	9:51:59 PM	Bubbler valve closed
8/30/2011	9:51:59 PM	Helium MFC set to  0.000000
8/30/2011	9:51:59 PM	H2 MFC set to  0.000000
8/30/2011	9:51:59 PM	BCl3 MFC set to  0.000000
8/30/2011	9:51:59 PM	PHl3 MFC set to  0.000000
8/30/2011	9:51:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:51:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:51:59 PM	Tube furnace set to 0
8/30/2011	9:52:02 PM	Helium valve closed
8/30/2011	9:52:02 PM	BCl3 valve closed
8/30/2011	9:52:02 PM	PH3 valve closed
8/30/2011	9:52:02 PM	SiCl4 pre valve closed
8/30/2011	9:52:02 PM	SiCl4 post valve closed
8/30/2011	9:52:02 PM	Main Vac valve closed
8/30/2011	9:52:02 PM	Bypass valve closed
8/30/2011	9:52:02 PM	Bubbler valve closed
8/30/2011	9:52:02 PM	H2 valve opened
8/30/2011	9:52:02 PM	Helium MFC set to  0.000000
8/30/2011	9:52:02 PM	H2 MFC set to  500.000000
8/30/2011	9:52:02 PM	BCl3 MFC set to  0.000000
8/30/2011	9:52:02 PM	PHl3 MFC set to  0.000000
8/30/2011	9:52:02 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:52:02 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:52:02 PM	Tube furnace set to 0
8/30/2011	9:53:04 PM	Helium valve closed
8/30/2011	9:53:04 PM	BCl3 valve closed
8/30/2011	9:53:04 PM	PH3 valve closed
8/30/2011	9:53:04 PM	SiCl4 pre valve closed
8/30/2011	9:53:04 PM	SiCl4 post valve closed
8/30/2011	9:53:04 PM	Main Vac valve closed
8/30/2011	9:53:04 PM	Bypass valve closed
8/30/2011	9:53:04 PM	H2 valve opened
8/30/2011	9:53:04 PM	Bubbler valve opened
8/30/2011	9:53:04 PM	Helium MFC set to  0.000000
8/30/2011	9:53:04 PM	H2 MFC set to  500.000000
8/30/2011	9:53:04 PM	BCl3 MFC set to  0.000000
8/30/2011	9:53:04 PM	PHl3 MFC set to  0.000000
8/30/2011	9:53:04 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:53:04 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:53:04 PM	Tube furnace set to 0
8/30/2011	9:53:05 PM	Helium valve closed
8/30/2011	9:53:05 PM	BCl3 valve closed
8/30/2011	9:53:05 PM	PH3 valve closed
8/30/2011	9:53:05 PM	SiCl4 pre valve closed
8/30/2011	9:53:05 PM	SiCl4 post valve closed
8/30/2011	9:53:05 PM	Main Vac valve closed
8/30/2011	9:53:05 PM	Bypass valve closed
8/30/2011	9:53:05 PM	H2 valve opened
8/30/2011	9:53:05 PM	Bubbler valve opened
8/30/2011	9:53:05 PM	Helium MFC set to  0.000000
8/30/2011	9:53:05 PM	H2 MFC set to  500.000000
8/30/2011	9:53:05 PM	BCl3 MFC set to  0.000000
8/30/2011	9:53:05 PM	PHl3 MFC set to  0.000000
8/30/2011	9:53:05 PM	SiCl4 MFC set to  0.000000
8/30/2011	9:53:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	9:53:05 PM	Tube furnace set to 1000
8/30/2011	10:13:05 PM	Helium valve closed
8/30/2011	10:13:05 PM	PH3 valve closed
8/30/2011	10:13:05 PM	Main Vac valve closed
8/30/2011	10:13:05 PM	Bypass valve closed
8/30/2011	10:13:05 PM	H2 valve opened
8/30/2011	10:13:05 PM	BCl3 valve opened
8/30/2011	10:13:05 PM	SiCl4 pre valve opened
8/30/2011	10:13:05 PM	SiCl4 post valve opened
8/30/2011	10:13:05 PM	Bubbler valve opened
8/30/2011	10:13:05 PM	Helium MFC set to  0.000000
8/30/2011	10:13:05 PM	H2 MFC set to  500.000000
8/30/2011	10:13:05 PM	BCl3 MFC set to  2.000000
8/30/2011	10:13:05 PM	PHl3 MFC set to  0.000000
8/30/2011	10:13:05 PM	SiCl4 MFC set to  50.000000
8/30/2011	10:13:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:13:06 PM	Tube furnace set to 1000
8/30/2011	10:43:05 PM	Helium valve closed
8/30/2011	10:43:05 PM	BCl3 valve closed
8/30/2011	10:43:05 PM	PH3 valve closed
8/30/2011	10:43:05 PM	SiCl4 pre valve closed
8/30/2011	10:43:05 PM	SiCl4 post valve closed
8/30/2011	10:43:05 PM	Main Vac valve closed
8/30/2011	10:43:05 PM	Bypass valve closed
8/30/2011	10:43:05 PM	H2 valve opened
8/30/2011	10:43:05 PM	Bubbler valve opened
8/30/2011	10:43:05 PM	Helium MFC set to  0.000000
8/30/2011	10:43:05 PM	H2 MFC set to  500.000000
8/30/2011	10:43:05 PM	BCl3 MFC set to  0.000000
8/30/2011	10:43:05 PM	PHl3 MFC set to  0.000000
8/30/2011	10:43:05 PM	SiCl4 MFC set to  0.000000
8/30/2011	10:43:05 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:43:06 PM	Tube furnace set to 750
8/30/2011	10:48:06 PM	H2 valve closed
8/30/2011	10:48:06 PM	BCl3 valve closed
8/30/2011	10:48:06 PM	PH3 valve closed
8/30/2011	10:48:06 PM	SiCl4 pre valve closed
8/30/2011	10:48:06 PM	SiCl4 post valve closed
8/30/2011	10:48:06 PM	Main Vac valve closed
8/30/2011	10:48:06 PM	Bypass valve closed
8/30/2011	10:48:06 PM	Helium valve opened
8/30/2011	10:48:06 PM	Bubbler valve opened
8/30/2011	10:48:06 PM	Helium MFC set to  500.000000
8/30/2011	10:48:06 PM	H2 MFC set to  0.000000
8/30/2011	10:48:06 PM	BCl3 MFC set to  0.000000
8/30/2011	10:48:06 PM	PHl3 MFC set to  0.000000
8/30/2011	10:48:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	10:48:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	10:48:06 PM	Tube furnace set to 0
8/30/2011	11:08:06 PM	Helium valve closed
8/30/2011	11:08:06 PM	H2 valve closed
8/30/2011	11:08:06 PM	BCl3 valve closed
8/30/2011	11:08:06 PM	PH3 valve closed
8/30/2011	11:08:06 PM	SiCl4 pre valve closed
8/30/2011	11:08:06 PM	SiCl4 post valve closed
8/30/2011	11:08:06 PM	Main Vac valve closed
8/30/2011	11:08:06 PM	Bypass valve closed
8/30/2011	11:08:06 PM	Bubbler valve closed
8/30/2011	11:08:06 PM	Helium MFC set to  0.000000
8/30/2011	11:08:06 PM	H2 MFC set to  0.000000
8/30/2011	11:08:06 PM	BCl3 MFC set to  0.000000
8/30/2011	11:08:06 PM	PHl3 MFC set to  0.000000
8/30/2011	11:08:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:08:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:08:06 PM	Tube furnace set to 0
8/30/2011	11:08:07 PM	Run finished at 11:08 PM
8/30/2011	11:13:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	11:13:01 PM	Recipe started at 11:13 PM
8/30/2011	11:13:01 PM	Helium valve closed
8/30/2011	11:13:01 PM	H2 valve closed
8/30/2011	11:13:01 PM	BCl3 valve closed
8/30/2011	11:13:01 PM	PH3 valve closed
8/30/2011	11:13:01 PM	SiCl4 pre valve closed
8/30/2011	11:13:01 PM	SiCl4 post valve closed
8/30/2011	11:13:01 PM	Main Vac valve closed
8/30/2011	11:13:01 PM	Bubbler valve closed
8/30/2011	11:13:01 PM	Bypass valve opened
8/30/2011	11:13:01 PM	Helium MFC set to  0.000000
8/30/2011	11:13:01 PM	H2 MFC set to  0.000000
8/30/2011	11:13:01 PM	BCl3 MFC set to  0.000000
8/30/2011	11:13:01 PM	PHl3 MFC set to  0.000000
8/30/2011	11:13:01 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:13:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:13:01 PM	Tube furnace set to 0
8/30/2011	11:14:06 PM	Helium valve closed
8/30/2011	11:14:06 PM	H2 valve closed
8/30/2011	11:14:06 PM	BCl3 valve closed
8/30/2011	11:14:06 PM	PH3 valve closed
8/30/2011	11:14:06 PM	SiCl4 pre valve closed
8/30/2011	11:14:06 PM	SiCl4 post valve closed
8/30/2011	11:14:06 PM	Main Vac valve closed
8/30/2011	11:14:06 PM	Bubbler valve closed
8/30/2011	11:14:06 PM	Bypass valve opened
8/30/2011	11:14:06 PM	Helium MFC set to  0.000000
8/30/2011	11:14:06 PM	H2 MFC set to  0.000000
8/30/2011	11:14:06 PM	BCl3 MFC set to  0.000000
8/30/2011	11:14:06 PM	PHl3 MFC set to  0.000000
8/30/2011	11:14:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:14:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:14:06 PM	Tube furnace set to 0
8/30/2011	11:15:06 PM	Helium valve closed
8/30/2011	11:15:06 PM	H2 valve closed
8/30/2011	11:15:06 PM	BCl3 valve closed
8/30/2011	11:15:06 PM	PH3 valve closed
8/30/2011	11:15:06 PM	SiCl4 pre valve closed
8/30/2011	11:15:06 PM	SiCl4 post valve closed
8/30/2011	11:15:06 PM	Bypass valve closed
8/30/2011	11:15:06 PM	Bubbler valve closed
8/30/2011	11:15:06 PM	Main Vac valve opened
8/30/2011	11:15:06 PM	Helium MFC set to  0.000000
8/30/2011	11:15:06 PM	H2 MFC set to  0.000000
8/30/2011	11:15:06 PM	BCl3 MFC set to  0.000000
8/30/2011	11:15:06 PM	PHl3 MFC set to  0.000000
8/30/2011	11:15:06 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:15:06 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:15:06 PM	Tube furnace set to 0
8/30/2011	11:15:07 PM	Run finished at 11:15 PM
8/30/2011	11:15:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2011	11:16:57 PM	Recipe started at 11:16 PM
8/30/2011	11:16:57 PM	Helium valve closed
8/30/2011	11:16:57 PM	H2 valve closed
8/30/2011	11:16:57 PM	BCl3 valve closed
8/30/2011	11:16:57 PM	PH3 valve closed
8/30/2011	11:16:57 PM	SiCl4 pre valve closed
8/30/2011	11:16:57 PM	SiCl4 post valve closed
8/30/2011	11:16:57 PM	Bypass valve closed
8/30/2011	11:16:57 PM	Bubbler valve closed
8/30/2011	11:16:57 PM	Main Vac valve opened
8/30/2011	11:16:57 PM	Helium MFC set to  0.000000
8/30/2011	11:16:57 PM	H2 MFC set to  0.000000
8/30/2011	11:16:57 PM	BCl3 MFC set to  0.000000
8/30/2011	11:16:57 PM	PHl3 MFC set to  0.000000
8/30/2011	11:16:57 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:16:57 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:16:57 PM	Tube furnace set to 150
8/30/2011	11:17:27 PM	H2 valve closed
8/30/2011	11:17:27 PM	BCl3 valve closed
8/30/2011	11:17:27 PM	PH3 valve closed
8/30/2011	11:17:27 PM	SiCl4 pre valve closed
8/30/2011	11:17:27 PM	SiCl4 post valve closed
8/30/2011	11:17:27 PM	Bypass valve closed
8/30/2011	11:17:27 PM	Bubbler valve closed
8/30/2011	11:17:27 PM	Helium valve opened
8/30/2011	11:17:27 PM	Main Vac valve opened
8/30/2011	11:17:27 PM	Helium MFC set to  20.000000
8/30/2011	11:17:27 PM	H2 MFC set to  0.000000
8/30/2011	11:17:27 PM	BCl3 MFC set to  0.000000
8/30/2011	11:17:27 PM	PHl3 MFC set to  0.000000
8/30/2011	11:17:27 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:17:27 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:17:27 PM	Tube furnace set to 150
8/30/2011	11:17:58 PM	Helium valve closed
8/30/2011	11:17:58 PM	H2 valve closed
8/30/2011	11:17:58 PM	BCl3 valve closed
8/30/2011	11:17:58 PM	PH3 valve closed
8/30/2011	11:17:58 PM	SiCl4 pre valve closed
8/30/2011	11:17:58 PM	SiCl4 post valve closed
8/30/2011	11:17:58 PM	Bypass valve closed
8/30/2011	11:17:58 PM	Bubbler valve closed
8/30/2011	11:17:58 PM	Main Vac valve opened
8/30/2011	11:17:58 PM	Helium MFC set to  0.000000
8/30/2011	11:17:58 PM	H2 MFC set to  0.000000
8/30/2011	11:17:58 PM	BCl3 MFC set to  0.000000
8/30/2011	11:17:58 PM	PHl3 MFC set to  0.000000
8/30/2011	11:17:58 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:17:58 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:17:58 PM	Tube furnace set to 150
8/30/2011	11:18:28 PM	H2 valve closed
8/30/2011	11:18:28 PM	BCl3 valve closed
8/30/2011	11:18:28 PM	PH3 valve closed
8/30/2011	11:18:28 PM	SiCl4 pre valve closed
8/30/2011	11:18:28 PM	SiCl4 post valve closed
8/30/2011	11:18:28 PM	Bypass valve closed
8/30/2011	11:18:28 PM	Bubbler valve closed
8/30/2011	11:18:28 PM	Helium valve opened
8/30/2011	11:18:28 PM	Main Vac valve opened
8/30/2011	11:18:28 PM	Helium MFC set to  20.000000
8/30/2011	11:18:28 PM	H2 MFC set to  0.000000
8/30/2011	11:18:28 PM	BCl3 MFC set to  0.000000
8/30/2011	11:18:28 PM	PHl3 MFC set to  0.000000
8/30/2011	11:18:28 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:18:28 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:18:28 PM	Tube furnace set to 150
8/30/2011	11:18:58 PM	Helium valve closed
8/30/2011	11:18:58 PM	H2 valve closed
8/30/2011	11:18:58 PM	BCl3 valve closed
8/30/2011	11:18:58 PM	PH3 valve closed
8/30/2011	11:18:58 PM	SiCl4 pre valve closed
8/30/2011	11:18:58 PM	SiCl4 post valve closed
8/30/2011	11:18:58 PM	Bypass valve closed
8/30/2011	11:18:58 PM	Bubbler valve closed
8/30/2011	11:18:58 PM	Main Vac valve opened
8/30/2011	11:18:58 PM	Helium MFC set to  0.000000
8/30/2011	11:18:58 PM	H2 MFC set to  0.000000
8/30/2011	11:18:58 PM	BCl3 MFC set to  0.000000
8/30/2011	11:18:58 PM	PHl3 MFC set to  0.000000
8/30/2011	11:18:58 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:18:58 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:18:58 PM	Tube furnace set to 150
8/30/2011	11:19:28 PM	H2 valve closed
8/30/2011	11:19:28 PM	BCl3 valve closed
8/30/2011	11:19:28 PM	PH3 valve closed
8/30/2011	11:19:28 PM	SiCl4 pre valve closed
8/30/2011	11:19:28 PM	SiCl4 post valve closed
8/30/2011	11:19:28 PM	Bypass valve closed
8/30/2011	11:19:28 PM	Bubbler valve closed
8/30/2011	11:19:28 PM	Helium valve opened
8/30/2011	11:19:28 PM	Main Vac valve opened
8/30/2011	11:19:28 PM	Helium MFC set to  20.000000
8/30/2011	11:19:28 PM	H2 MFC set to  0.000000
8/30/2011	11:19:28 PM	BCl3 MFC set to  0.000000
8/30/2011	11:19:28 PM	PHl3 MFC set to  0.000000
8/30/2011	11:19:28 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:19:28 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:19:28 PM	Tube furnace set to 150
8/30/2011	11:19:58 PM	Helium valve closed
8/30/2011	11:19:58 PM	H2 valve closed
8/30/2011	11:19:58 PM	BCl3 valve closed
8/30/2011	11:19:58 PM	PH3 valve closed
8/30/2011	11:19:58 PM	SiCl4 pre valve closed
8/30/2011	11:19:58 PM	SiCl4 post valve closed
8/30/2011	11:19:58 PM	Bypass valve closed
8/30/2011	11:19:58 PM	Bubbler valve closed
8/30/2011	11:19:58 PM	Main Vac valve opened
8/30/2011	11:19:58 PM	Helium MFC set to  0.000000
8/30/2011	11:19:58 PM	H2 MFC set to  0.000000
8/30/2011	11:19:58 PM	BCl3 MFC set to  0.000000
8/30/2011	11:19:58 PM	PHl3 MFC set to  0.000000
8/30/2011	11:19:58 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:19:58 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:19:59 PM	Tube furnace set to 150
8/30/2011	11:20:29 PM	H2 valve closed
8/30/2011	11:20:29 PM	BCl3 valve closed
8/30/2011	11:20:29 PM	PH3 valve closed
8/30/2011	11:20:29 PM	SiCl4 pre valve closed
8/30/2011	11:20:29 PM	SiCl4 post valve closed
8/30/2011	11:20:29 PM	Bypass valve closed
8/30/2011	11:20:29 PM	Bubbler valve closed
8/30/2011	11:20:29 PM	Helium valve opened
8/30/2011	11:20:29 PM	Main Vac valve opened
8/30/2011	11:20:29 PM	Helium MFC set to  20.000000
8/30/2011	11:20:29 PM	H2 MFC set to  0.000000
8/30/2011	11:20:29 PM	BCl3 MFC set to  0.000000
8/30/2011	11:20:29 PM	PHl3 MFC set to  0.000000
8/30/2011	11:20:29 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:20:29 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:20:29 PM	Tube furnace set to 150
8/30/2011	11:20:59 PM	Helium valve closed
8/30/2011	11:20:59 PM	H2 valve closed
8/30/2011	11:20:59 PM	BCl3 valve closed
8/30/2011	11:20:59 PM	PH3 valve closed
8/30/2011	11:20:59 PM	SiCl4 pre valve closed
8/30/2011	11:20:59 PM	SiCl4 post valve closed
8/30/2011	11:20:59 PM	Bypass valve closed
8/30/2011	11:20:59 PM	Bubbler valve closed
8/30/2011	11:20:59 PM	Main Vac valve opened
8/30/2011	11:20:59 PM	Helium MFC set to  0.000000
8/30/2011	11:20:59 PM	H2 MFC set to  0.000000
8/30/2011	11:20:59 PM	BCl3 MFC set to  0.000000
8/30/2011	11:20:59 PM	PHl3 MFC set to  0.000000
8/30/2011	11:20:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:20:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:20:59 PM	Tube furnace set to 150
8/30/2011	11:21:29 PM	H2 valve closed
8/30/2011	11:21:29 PM	BCl3 valve closed
8/30/2011	11:21:29 PM	PH3 valve closed
8/30/2011	11:21:29 PM	SiCl4 pre valve closed
8/30/2011	11:21:29 PM	SiCl4 post valve closed
8/30/2011	11:21:29 PM	Bypass valve closed
8/30/2011	11:21:29 PM	Bubbler valve closed
8/30/2011	11:21:29 PM	Helium valve opened
8/30/2011	11:21:29 PM	Main Vac valve opened
8/30/2011	11:21:29 PM	Helium MFC set to  20.000000
8/30/2011	11:21:29 PM	H2 MFC set to  0.000000
8/30/2011	11:21:29 PM	BCl3 MFC set to  0.000000
8/30/2011	11:21:29 PM	PHl3 MFC set to  0.000000
8/30/2011	11:21:29 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:21:29 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:21:29 PM	Tube furnace set to 150
8/30/2011	11:21:59 PM	Helium valve closed
8/30/2011	11:21:59 PM	H2 valve closed
8/30/2011	11:21:59 PM	BCl3 valve closed
8/30/2011	11:21:59 PM	PH3 valve closed
8/30/2011	11:21:59 PM	SiCl4 pre valve closed
8/30/2011	11:21:59 PM	SiCl4 post valve closed
8/30/2011	11:21:59 PM	Bypass valve closed
8/30/2011	11:21:59 PM	Bubbler valve closed
8/30/2011	11:21:59 PM	Main Vac valve opened
8/30/2011	11:21:59 PM	Helium MFC set to  0.000000
8/30/2011	11:21:59 PM	H2 MFC set to  0.000000
8/30/2011	11:21:59 PM	BCl3 MFC set to  0.000000
8/30/2011	11:21:59 PM	PHl3 MFC set to  0.000000
8/30/2011	11:21:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:21:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:21:59 PM	Tube furnace set to 150
8/30/2011	11:22:29 PM	H2 valve closed
8/30/2011	11:22:29 PM	BCl3 valve closed
8/30/2011	11:22:29 PM	PH3 valve closed
8/30/2011	11:22:29 PM	SiCl4 pre valve closed
8/30/2011	11:22:29 PM	SiCl4 post valve closed
8/30/2011	11:22:29 PM	Bypass valve closed
8/30/2011	11:22:29 PM	Bubbler valve closed
8/30/2011	11:22:29 PM	Helium valve opened
8/30/2011	11:22:29 PM	Main Vac valve opened
8/30/2011	11:22:29 PM	Helium MFC set to  20.000000
8/30/2011	11:22:29 PM	H2 MFC set to  0.000000
8/30/2011	11:22:29 PM	BCl3 MFC set to  0.000000
8/30/2011	11:22:29 PM	PHl3 MFC set to  0.000000
8/30/2011	11:22:29 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:22:29 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:22:30 PM	Tube furnace set to 150
8/30/2011	11:23:00 PM	Helium valve closed
8/30/2011	11:23:00 PM	H2 valve closed
8/30/2011	11:23:00 PM	BCl3 valve closed
8/30/2011	11:23:00 PM	PH3 valve closed
8/30/2011	11:23:00 PM	SiCl4 pre valve closed
8/30/2011	11:23:00 PM	SiCl4 post valve closed
8/30/2011	11:23:00 PM	Bypass valve closed
8/30/2011	11:23:00 PM	Bubbler valve closed
8/30/2011	11:23:00 PM	Main Vac valve opened
8/30/2011	11:23:00 PM	Helium MFC set to  0.000000
8/30/2011	11:23:00 PM	H2 MFC set to  0.000000
8/30/2011	11:23:00 PM	BCl3 MFC set to  0.000000
8/30/2011	11:23:00 PM	PHl3 MFC set to  0.000000
8/30/2011	11:23:00 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:23:00 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:23:00 PM	Tube furnace set to 150
8/30/2011	11:23:30 PM	H2 valve closed
8/30/2011	11:23:30 PM	BCl3 valve closed
8/30/2011	11:23:30 PM	PH3 valve closed
8/30/2011	11:23:30 PM	SiCl4 pre valve closed
8/30/2011	11:23:30 PM	SiCl4 post valve closed
8/30/2011	11:23:30 PM	Bypass valve closed
8/30/2011	11:23:30 PM	Bubbler valve closed
8/30/2011	11:23:30 PM	Helium valve opened
8/30/2011	11:23:30 PM	Main Vac valve opened
8/30/2011	11:23:30 PM	Helium MFC set to  20.000000
8/30/2011	11:23:30 PM	H2 MFC set to  0.000000
8/30/2011	11:23:30 PM	BCl3 MFC set to  0.000000
8/30/2011	11:23:30 PM	PHl3 MFC set to  0.000000
8/30/2011	11:23:30 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:23:30 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:23:30 PM	Tube furnace set to 150
8/30/2011	11:24:00 PM	Helium valve closed
8/30/2011	11:24:00 PM	H2 valve closed
8/30/2011	11:24:00 PM	BCl3 valve closed
8/30/2011	11:24:00 PM	PH3 valve closed
8/30/2011	11:24:00 PM	SiCl4 pre valve closed
8/30/2011	11:24:00 PM	SiCl4 post valve closed
8/30/2011	11:24:00 PM	Bypass valve closed
8/30/2011	11:24:00 PM	Bubbler valve closed
8/30/2011	11:24:00 PM	Main Vac valve opened
8/30/2011	11:24:00 PM	Helium MFC set to  0.000000
8/30/2011	11:24:00 PM	H2 MFC set to  0.000000
8/30/2011	11:24:00 PM	BCl3 MFC set to  0.000000
8/30/2011	11:24:00 PM	PHl3 MFC set to  0.000000
8/30/2011	11:24:00 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:24:00 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:24:00 PM	Tube furnace set to 150
8/30/2011	11:24:30 PM	H2 valve closed
8/30/2011	11:24:30 PM	BCl3 valve closed
8/30/2011	11:24:30 PM	PH3 valve closed
8/30/2011	11:24:30 PM	SiCl4 pre valve closed
8/30/2011	11:24:30 PM	SiCl4 post valve closed
8/30/2011	11:24:30 PM	Bypass valve closed
8/30/2011	11:24:30 PM	Bubbler valve closed
8/30/2011	11:24:30 PM	Helium valve opened
8/30/2011	11:24:30 PM	Main Vac valve opened
8/30/2011	11:24:30 PM	Helium MFC set to  20.000000
8/30/2011	11:24:30 PM	H2 MFC set to  0.000000
8/30/2011	11:24:30 PM	BCl3 MFC set to  0.000000
8/30/2011	11:24:30 PM	PHl3 MFC set to  0.000000
8/30/2011	11:24:30 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:24:30 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:24:30 PM	Tube furnace set to 150
8/30/2011	11:25:00 PM	Helium valve closed
8/30/2011	11:25:00 PM	H2 valve closed
8/30/2011	11:25:00 PM	BCl3 valve closed
8/30/2011	11:25:00 PM	PH3 valve closed
8/30/2011	11:25:00 PM	SiCl4 pre valve closed
8/30/2011	11:25:00 PM	SiCl4 post valve closed
8/30/2011	11:25:00 PM	Bypass valve closed
8/30/2011	11:25:00 PM	Bubbler valve closed
8/30/2011	11:25:00 PM	Main Vac valve opened
8/30/2011	11:25:00 PM	Helium MFC set to  0.000000
8/30/2011	11:25:00 PM	H2 MFC set to  0.000000
8/30/2011	11:25:00 PM	BCl3 MFC set to  0.000000
8/30/2011	11:25:00 PM	PHl3 MFC set to  0.000000
8/30/2011	11:25:00 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:25:00 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:25:01 PM	Tube furnace set to 150
8/30/2011	11:25:31 PM	H2 valve closed
8/30/2011	11:25:31 PM	BCl3 valve closed
8/30/2011	11:25:31 PM	PH3 valve closed
8/30/2011	11:25:31 PM	SiCl4 pre valve closed
8/30/2011	11:25:31 PM	SiCl4 post valve closed
8/30/2011	11:25:31 PM	Bypass valve closed
8/30/2011	11:25:31 PM	Bubbler valve closed
8/30/2011	11:25:31 PM	Helium valve opened
8/30/2011	11:25:31 PM	Main Vac valve opened
8/30/2011	11:25:31 PM	Helium MFC set to  20.000000
8/30/2011	11:25:31 PM	H2 MFC set to  0.000000
8/30/2011	11:25:31 PM	BCl3 MFC set to  0.000000
8/30/2011	11:25:31 PM	PHl3 MFC set to  0.000000
8/30/2011	11:25:31 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:25:31 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:25:31 PM	Tube furnace set to 150
8/30/2011	11:26:01 PM	Helium valve closed
8/30/2011	11:26:01 PM	H2 valve closed
8/30/2011	11:26:01 PM	BCl3 valve closed
8/30/2011	11:26:01 PM	PH3 valve closed
8/30/2011	11:26:01 PM	SiCl4 pre valve closed
8/30/2011	11:26:01 PM	SiCl4 post valve closed
8/30/2011	11:26:01 PM	Bypass valve closed
8/30/2011	11:26:01 PM	Bubbler valve closed
8/30/2011	11:26:01 PM	Main Vac valve opened
8/30/2011	11:26:01 PM	Helium MFC set to  0.000000
8/30/2011	11:26:01 PM	H2 MFC set to  0.000000
8/30/2011	11:26:01 PM	BCl3 MFC set to  0.000000
8/30/2011	11:26:01 PM	PHl3 MFC set to  0.000000
8/30/2011	11:26:01 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:26:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:26:01 PM	Tube furnace set to 150
8/30/2011	11:26:31 PM	H2 valve closed
8/30/2011	11:26:31 PM	BCl3 valve closed
8/30/2011	11:26:31 PM	PH3 valve closed
8/30/2011	11:26:31 PM	SiCl4 pre valve closed
8/30/2011	11:26:31 PM	SiCl4 post valve closed
8/30/2011	11:26:31 PM	Bypass valve closed
8/30/2011	11:26:31 PM	Bubbler valve closed
8/30/2011	11:26:31 PM	Helium valve opened
8/30/2011	11:26:31 PM	Main Vac valve opened
8/30/2011	11:26:31 PM	Helium MFC set to  20.000000
8/30/2011	11:26:31 PM	H2 MFC set to  0.000000
8/30/2011	11:26:31 PM	BCl3 MFC set to  0.000000
8/30/2011	11:26:31 PM	PHl3 MFC set to  0.000000
8/30/2011	11:26:31 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:26:31 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:26:31 PM	Tube furnace set to 150
8/30/2011	11:27:01 PM	Helium valve closed
8/30/2011	11:27:01 PM	H2 valve closed
8/30/2011	11:27:01 PM	BCl3 valve closed
8/30/2011	11:27:01 PM	PH3 valve closed
8/30/2011	11:27:01 PM	SiCl4 pre valve closed
8/30/2011	11:27:01 PM	SiCl4 post valve closed
8/30/2011	11:27:01 PM	Bypass valve closed
8/30/2011	11:27:01 PM	Bubbler valve closed
8/30/2011	11:27:01 PM	Main Vac valve opened
8/30/2011	11:27:01 PM	Helium MFC set to  0.000000
8/30/2011	11:27:01 PM	H2 MFC set to  0.000000
8/30/2011	11:27:01 PM	BCl3 MFC set to  0.000000
8/30/2011	11:27:01 PM	PHl3 MFC set to  0.000000
8/30/2011	11:27:01 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:27:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:27:02 PM	Tube furnace set to 150
8/30/2011	11:27:03 PM	Run finished at 11:27 PM
8/30/2011	11:32:54 PM	Recipe started at 11:32 PM
8/30/2011	11:32:54 PM	Helium valve closed
8/30/2011	11:32:54 PM	H2 valve closed
8/30/2011	11:32:54 PM	BCl3 valve closed
8/30/2011	11:32:54 PM	PH3 valve closed
8/30/2011	11:32:54 PM	SiCl4 pre valve closed
8/30/2011	11:32:54 PM	SiCl4 post valve closed
8/30/2011	11:32:54 PM	Main Vac valve closed
8/30/2011	11:32:54 PM	Bypass valve closed
8/30/2011	11:32:54 PM	Bubbler valve closed
8/30/2011	11:32:54 PM	Helium MFC set to  0.000000
8/30/2011	11:32:54 PM	H2 MFC set to  0.000000
8/30/2011	11:32:54 PM	BCl3 MFC set to  0.000000
8/30/2011	11:32:54 PM	PHl3 MFC set to  0.000000
8/30/2011	11:32:54 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:32:54 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:32:54 PM	Tube furnace set to 0
8/30/2011	11:32:57 PM	Helium valve closed
8/30/2011	11:32:57 PM	BCl3 valve closed
8/30/2011	11:32:57 PM	PH3 valve closed
8/30/2011	11:32:57 PM	SiCl4 pre valve closed
8/30/2011	11:32:57 PM	SiCl4 post valve closed
8/30/2011	11:32:57 PM	Main Vac valve closed
8/30/2011	11:32:57 PM	Bypass valve closed
8/30/2011	11:32:57 PM	Bubbler valve closed
8/30/2011	11:32:57 PM	H2 valve opened
8/30/2011	11:32:57 PM	Helium MFC set to  0.000000
8/30/2011	11:32:57 PM	H2 MFC set to  500.000000
8/30/2011	11:32:57 PM	BCl3 MFC set to  0.000000
8/30/2011	11:32:57 PM	PHl3 MFC set to  0.000000
8/30/2011	11:32:57 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:32:57 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:32:58 PM	Tube furnace set to 0
8/30/2011	11:33:59 PM	Helium valve closed
8/30/2011	11:33:59 PM	BCl3 valve closed
8/30/2011	11:33:59 PM	PH3 valve closed
8/30/2011	11:33:59 PM	SiCl4 pre valve closed
8/30/2011	11:33:59 PM	SiCl4 post valve closed
8/30/2011	11:33:59 PM	Main Vac valve closed
8/30/2011	11:33:59 PM	Bypass valve closed
8/30/2011	11:33:59 PM	H2 valve opened
8/30/2011	11:33:59 PM	Bubbler valve opened
8/30/2011	11:33:59 PM	Helium MFC set to  0.000000
8/30/2011	11:33:59 PM	H2 MFC set to  500.000000
8/30/2011	11:33:59 PM	BCl3 MFC set to  0.000000
8/30/2011	11:33:59 PM	PHl3 MFC set to  0.000000
8/30/2011	11:33:59 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:33:59 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:34:00 PM	Tube furnace set to 0
8/30/2011	11:34:01 PM	Helium valve closed
8/30/2011	11:34:01 PM	BCl3 valve closed
8/30/2011	11:34:01 PM	PH3 valve closed
8/30/2011	11:34:01 PM	SiCl4 pre valve closed
8/30/2011	11:34:01 PM	SiCl4 post valve closed
8/30/2011	11:34:01 PM	Main Vac valve closed
8/30/2011	11:34:01 PM	Bypass valve closed
8/30/2011	11:34:01 PM	H2 valve opened
8/30/2011	11:34:01 PM	Bubbler valve opened
8/30/2011	11:34:01 PM	Helium MFC set to  0.000000
8/30/2011	11:34:01 PM	H2 MFC set to  500.000000
8/30/2011	11:34:01 PM	BCl3 MFC set to  0.000000
8/30/2011	11:34:01 PM	PHl3 MFC set to  0.000000
8/30/2011	11:34:01 PM	SiCl4 MFC set to  0.000000
8/30/2011	11:34:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:34:01 PM	Tube furnace set to 1000
8/30/2011	11:54:01 PM	Helium valve closed
8/30/2011	11:54:01 PM	PH3 valve closed
8/30/2011	11:54:01 PM	Main Vac valve closed
8/30/2011	11:54:01 PM	Bypass valve closed
8/30/2011	11:54:01 PM	H2 valve opened
8/30/2011	11:54:01 PM	BCl3 valve opened
8/30/2011	11:54:01 PM	SiCl4 pre valve opened
8/30/2011	11:54:01 PM	SiCl4 post valve opened
8/30/2011	11:54:01 PM	Bubbler valve opened
8/30/2011	11:54:01 PM	Helium MFC set to  0.000000
8/30/2011	11:54:01 PM	H2 MFC set to  500.000000
8/30/2011	11:54:01 PM	BCl3 MFC set to  2.000000
8/30/2011	11:54:01 PM	PHl3 MFC set to  0.000000
8/30/2011	11:54:01 PM	SiCl4 MFC set to  50.000000
8/30/2011	11:54:01 PM	Bypass solenoid MFC set to  0.000000
8/30/2011	11:54:01 PM	Tube furnace set to 1000
